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    • 92. 发明授权
    • Method for forming a fine pattern by using a patterned resist layer
    • 通过使用图案化抗蚀剂层形成精细图案的方法
    • US5171718A
    • 1992-12-15
    • US639325
    • 1991-01-09
    • Akira IshibashiYoshifumi MoriKenji Funato
    • Akira IshibashiYoshifumi MoriKenji Funato
    • G03F7/004G03F7/20
    • G03F7/004G03F7/2041Y10S148/10Y10S148/131Y10S148/137Y10S438/949
    • A fine pattern formation using an electron beam induced resist, and use of the resist in making semiconductor devices are disclosed. Collimated electron beam is irradiated and scanned along a desired pattern on a layer on which a resist layer of a desired pattern is deposited under an atmosphere containing a starting material layer for the resist. The resist thus deposited is partially removed by reactive ion etching to remove the skirt like portion of the resist layer, or totally removed by reactive ion etching during or after processing by using the resist layer as a processing mask. Since the resist layer width is determined by a diameter of the collimated electron beam, line width of less than hundred .ANG. can be directly drawn. There are also disclosed processes using the resist layer in manufacturing semiconductor devices.
    • 公开了使用电子束感应抗蚀剂的精细图案形成,以及在制造半导体器件中使用抗蚀剂。 沿着期望的图案沿着期望的图案照射准直的电子束,在其上沉积有所需图案的抗蚀剂层的层上,在含有抗蚀剂的起始材料层的气氛下。 通过反应离子蚀刻部分去除由此沉积的抗蚀剂以去除抗蚀剂层的裙状部分,或者通过使用抗蚀剂层作为处理掩模在处理期间或之后通过反应离子蚀刻完全除去。 由于抗蚀剂层宽度由准直电子束的直径确定,所以可以直接绘制小于100的棱线宽度。 还公开了在制造半导体器件中使用抗蚀剂层的工艺。
    • 94. 发明授权
    • Disk apparatus
    • 磁盘设备
    • US4809091A
    • 1989-02-28
    • US38837
    • 1987-04-15
    • Shyoichi MiyazawaSatoshi KawamuraShoichiro TohyamaAkira IshibashiKazutoshi KatoJunichi Ideda
    • Shyoichi MiyazawaSatoshi KawamuraShoichiro TohyamaAkira IshibashiKazutoshi KatoJunichi Ideda
    • G11B5/55G11B5/596G11B5/09G11B15/04
    • G11B5/5521G11B5/59633
    • A disk drive system includes a magnetic disk apparatus which accurately positions read/write heads for reading data from and writing data on tracks on the data surface of a rotary disk on a predetermined track on the disk on the basis of servo data written in the servo area formed on the data surface, and a disk controller which controls the mode of operation of the disk apparatus. Index signals respectively indicating the start and end of the servo area are generated on the basis of the result of detection of the angular phase of the disk. The mode of operation of the magnetic disk apparatus is determined on the basis of a write control signal provided by the disk controller. The index signals respectively indicating the start and end of the servo area are sent to the disk controller when the mode of operation is track format write mode, while the index signal indicating the end of the servo area is sent to the disk controller when the mode of operation is other than the track format write mode.
    • 磁盘驱动器系统包括磁盘装置,其基于写入伺服器中的伺服数据,准确地定位用于从盘上的预定轨道上的旋转盘的数据表面上的数据读取数据的读/写头数据 在数据表面上形成的区域,以及控制盘装置的操作模式的盘控制器。 基于盘的角度相位的检测结果生成分别表示伺服区域的开始和结束的索引信号。 基于由盘控制器提供的写入控制信号来确定磁盘装置的操作模式。 当操作模式为轨道格式写入模式时,分别表示伺服区域的开始和结束的索引信号被发送到磁盘控制器,而当模式下指示伺服区域结束的索引信号被发送到磁盘控制器 的操作是跟踪格式写入模式。
    • 96. 发明授权
    • Stepping motor control system
    • 步进电机控制系统
    • US4691154A
    • 1987-09-01
    • US852756
    • 1986-04-16
    • Masahiko SatoKazutoshi KatoAkira IshibashiTsurumasa Matsushita
    • Masahiko SatoKazutoshi KatoAkira IshibashiTsurumasa Matsushita
    • H02P8/32H02P8/00
    • H02P8/32
    • It takes a comparatively long time for a rotor of a stepping motor to be positioned at the next target stop position (target angular position) and stopped there. This time is the settling time. Before the rotor passes through the next target angular position and begins to oscillate, necessary control is provided to reduce the magnitude of the oscillation for the purpose of shortening the settling time. The phase excitation on each winding of the stepping motor is usually changed over successively until the target angular position is reached. When the stepping motor has approached the target angular position, the changeover of phase excitation is gradually conducted. As a result, the magnitude of the above described oscillation is reduced and hence the settling time is shortened.
    • 步进电机的转子位于下一个目标停止位置(目标角度位置)需要比较长的时间,并停在那里。 这一次是定居时间。 在转子通过下一个目标角位置并开始振荡之前,提供必要的控制以减小振荡的幅度,以缩短稳定时间。 步进电动机的每个绕组上的相位激励通常连续地改变,直到到达目标角位置。 当步进电机接近目标角位置时,相位激励的切换逐渐进行。 结果,上述振荡的幅度减小,因此建立时间缩短。