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    • 91. 发明授权
    • Method and structure for chip-level testing of wire delay independent of silicon delay
    • 线延迟芯片级测试的方法和结构独立于硅延迟
    • US07489204B2
    • 2009-02-10
    • US11160603
    • 2005-06-30
    • Peter A. HabitzAnthony D. Polson
    • Peter A. HabitzAnthony D. Polson
    • G01R23/00H03B5/24H03K3/03
    • G01R31/31725G01R31/3016
    • Disclosed are a method and a structure for testing location-specific wire delay at a chip-level independent of silicon delay. The invention incorporates the use of a tester embedded in a metal layer of a chip. The tester comprises a ring oscillator that is selectively connected to either a first wire or a second wire by a multiplexer. A monitor measures ring frequencies of the ring oscillator when connected to either the first or second wire. A processor determines the wire delay based upon differences in the ring frequencies. Additional testers or multiple stages of a single tester may be embedded into either the same metal layer at a different location or into a different metal layer to allow for intra-metal layer or inter-metal layer comparisons of wire delay. Since metal capacitance and silicon load remains constant for both the first and second wires and the transient voltage change along the wire is hold small, metal delay is separable from delay due to silicon device performance. Pass/Fail criteria based upon a maximum allowable resistance-capacitance delay for a metal layer or based upon a comparison of resistance-capacitance delays across the same metal layer or between metal layers can be used to reject a chip.
    • 公开了用于在独立于硅延迟的芯片级测试位置特定的线延迟的方法和结构。 本发明结合使用嵌入在芯片的金属层中的测试仪。 测试器包括环形振荡器,其通过多路复用器选择性地连接到第一线或第二线。 当连接到第一根或第二根导线时,监视器测量环形振荡器的振铃频率。 处理器根据环频的差异来确定导线延迟。 单个测试器的附加测试器或多个阶段可以嵌入到不同位置处的相同金属层中或者嵌入到不同的金属层中以允许金属间层或金属间层对比延迟线。 由于金属电容和硅负载对于第一和第二导线都保持恒定,并且沿着导线的瞬态电压变化保持较小,所以由于硅器件性能,金属延迟与延迟分离。 可以使用基于金属层的最大允许电阻 - 电容延迟或基于相同金属层或金属层之间的电阻 - 电容延迟的比较的通过/失败标准来拒绝芯片。