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    • 95. 发明授权
    • Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography
    • 用于在极紫外光中产生光并用于用于极紫外光刻的光源的装置
    • US07399981B2
    • 2008-07-15
    • US11151696
    • 2005-06-13
    • Guy CheymolPhilippe CormontPierre-Yves ThroOlivier SublemontierMartin SchmidtBenoit Barthod
    • Guy CheymolPhilippe CormontPierre-Yves ThroOlivier SublemontierMartin SchmidtBenoit Barthod
    • H05G2/00
    • G03F7/70166B82Y10/00G03F7/70033H05G2/003H05G2/008
    • The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4). The collector device (110) is disposed symmetrically about the mean collection axis (6) in the half-space containing the laser beams (1) focused on the target (4) and inside a conical space (8) centered on the mean collection axis (6) with a vertex situated at the target (4) and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams (1) relative to the mean collection axis (6). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.
    • 该装置包括用于在激光束(1)被聚焦的抽空空间中产生基本上线性的目标(4)的装置(2),所述目标适合于与聚焦的激光束(1)相互作用以发射等离子体发射辐射 在极紫外线。 接收机装置(3)在与聚焦激光束(1)相互作用后接收目标(4),并且收集装置(110)收集目标(4)发射的EUV辐射。 用于将激光束聚焦在靶(4)上的聚焦元件(11)以这样一种方式被布置,使得激光束(1)横向聚焦在靶(4)上,相对于 目标(4)并相对于垂直于目标(4)的平均收集轴线(6)以确定的角度倾斜在约60°至约90°的范围内。 收集器装置(110)围绕包含聚焦在目标(4)上的激光束(1)的半空间中的平均收集轴线(6)对称地设置在以平均收集轴线为中心的锥形空间(8)内部 (6)具有位于目标(4)处的顶点,并且在顶点处的半角小于聚焦激光束(1)相对于平均收集轴线(6)的倾斜角度。 该器件适合用作光刻用于制造集成电路的EUV辐射源。
    • 97. 发明申请
    • SEAT-BELT RETRACTOR
    • 座椅背带
    • US20080135665A1
    • 2008-06-12
    • US11963797
    • 2007-12-22
    • Martin SchmidtStefan HofsThomas SchneiderMiriam OrsSanti GasolJordi Casiano
    • Martin SchmidtStefan HofsThomas SchneiderMiriam OrsSanti GasolJordi Casiano
    • B60R22/40
    • B60R22/40B60R2022/402
    • In at least one embodiment of the present invention a seat-belt retractor is provided. The seat-belt retractor comprises a locking system that is controlled by means of at least one vehicle-sensitive sensor. The sensor has an alignment mass for autonomous alignment and is configured to pivot on the seat-belt retractor when the angular installation position of the seat-belt retractor is changed and when the seat-belt is extended, the sensor can be fixed in position by a blocking device. The blocking device is friction-controlled by the rotation of the belt shaft in the extension direction. The blocking device includes a rotatably mounted blocking lever which can be displaced into a release position for the sensor by a control lever that is coupled to the belt shaft by a friction coupling when the belt shaft rotates in a retraction direction.
    • 在本发明的至少一个实施例中,提供了一种安全带卷收器。 座椅安全带卷收器包括通过至少一个车辆敏感传感器控制的锁定系统。 传感器具有用于自主对准的对准质量,并且当安全带卷收器的角度安装位置改变时,构造成在安全带卷收器上枢转,并且当座椅安全带延伸时,传感器可以通过 阻塞装置。 阻挡装置通过带轴沿延伸方向的旋转来摩擦控制。 阻挡装置包括可旋转地安装的阻挡杆,其可以通过控制杆移动到用于传感器的释放位置,当控制杆沿回缩方向旋转时,该控制杆通过摩擦联接器联接到带轴上。
    • 99. 发明申请
    • Coupling System Between Pre-Tensioning Wheel and Seat Belt Retainer Spool
    • 预张紧轮和安全带保持器轴套之间的耦合系统
    • US20080042001A1
    • 2008-02-21
    • US11596643
    • 2005-04-22
    • Martin SchmidtStefan SuhrThomas Schneider
    • Martin SchmidtStefan SuhrThomas Schneider
    • B60R22/34
    • B60R22/36B60R22/46B60R2022/468
    • A combination of belt retractor and belt pre-tensioner in which the pre-tensioning device is coupled to the belt shaft by means of the vehicle-sensitive or belt strap sensitive locking system of the belt retractor, is characterised in that a lever (16) entrained by the drive wheel (10) on its rotation in the pre-tensioning direction is mounted pivotally on the housing and on its pivoting movement effected by the rotation of the drive wheel (10) its free end (18) comes into engagement with the control disc (12) and in so doing, over part of its pivoting movement, drives the control disc (12) for its relative rotation relatively to the belt shaft and after the lever (16) has passed through its pivoting path serving to drive the control disc (12) it is released from the control disc (12) and the drive wheel (10).
    • 皮带卷收器和皮带预张紧器的组合,其中预张紧装置通过带卷收器的车辆敏感或带束带敏感锁定系统联接到皮带轴,其特征在于,杆(16) 驱动轮(10)在其预张紧方向上的旋转被夹紧,其枢转地安装在壳体上,并且由于驱动轮(10)的旋转而产生的枢转运动,其自由端(18)与 控制盘(12),并且在这样做的过程中,在其枢转运动的一部分上,驱动控制盘(12)相对于皮带轴的相对转动,并且在杠杆(16)已经通过其枢转路径以驱动 控制盘(12)从控制盘(12)和驱动轮(10)释放。