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    • 94. 发明授权
    • Plasma source design
    • 等离子源设计
    • US08771538B2
    • 2014-07-08
    • US12949661
    • 2010-11-18
    • Dmitry LubomirskyJang-Gyoo YangMatthew MillerJay PinsonKien Chuc
    • Dmitry LubomirskyJang-Gyoo YangMatthew MillerJay PinsonKien Chuc
    • B44C1/22H01J37/32
    • H01J37/32357H01J37/3211
    • Embodiments of the present invention generally provide a plasma source apparatus, and method of using the same, that is able to generate radicals and/or gas ions in a plasma generation region that is symmetrically positioned around a magnetic core element by use of an electromagnetic energy source. In general, the orientation and shape of the plasma generation region and magnetic core allows for the effective and uniform coupling of the delivered electromagnetic energy to a gas disposed in the plasma generation region. In general, the improved characteristics of the plasma formed in the plasma generation region is able to improve deposition, etching and/or cleaning processes performed on a substrate or a portion of a processing chamber that is disposed downstream of the plasma generation region.
    • 本发明的实施例通常提供一种等离子体源装置及其使用方法,其能够通过使用电磁能量在等离子体产生区域内产生自由基和/或气体离子,所述等离子体产生区域围绕磁芯元件对称地定位 资源。 通常,等离子体产生区域和磁芯的取向和形状允许将输送的电磁能量有效均匀地耦合到设置在等离子体产生区域中的气体。 通常,等离子体产生区域中形成的等离子体的改进的特性能够改善在设置在等离子体产生区域下游的衬底或处理室的一部分上进行的沉积,蚀刻和/或清洁过程。
    • 96. 发明授权
    • Temperature measurement correction using multiple temperature sensors
    • 使用多个温度传感器的温度测量校正
    • US08473238B2
    • 2013-06-25
    • US12854652
    • 2010-08-11
    • Matthew MillerRalph M. Kling
    • Matthew MillerRalph M. Kling
    • G01K15/00G06F11/30
    • G01K1/20G01K1/024
    • Correcting a temperature measurement of a target sensed at one temperature sensor in an asset tracking device by using another temperature sensor. The asset tracking device includes at least one heat source that affects the temperature sensor for sensing the temperature of the target. The other temperature sensor measures temperature at a location in the asset tracking device. The relationships between an actual temperature of the target and the temperature measured at the two sensors are established through experiments or model. Using the relationships, the measured temperature of the target can be corrected to obtain a corrected temperature of the target.
    • 通过使用另一个温度传感器来校正在资产跟踪装置中的一个温度传感器处感测到的目标的温度测量。 资产跟踪装置包括影响温度传感器以感测目标温度的至少一个热源。 另一个温度传感器测量资产跟踪设备中某个位置的温度。 通过实验或模型确定目标实际温度与两个传感器测得的温度之间的关系。 使用这些关系,可以校正目标的测量温度以获得目标的校正温度。