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    • 93. 发明授权
    • Scanning probe system with spring probe
    • 用弹簧探头扫描探针系统
    • US06668628B2
    • 2003-12-30
    • US10112215
    • 2002-03-29
    • Thomas HantschelEugene M. ChowDavid K. Fork
    • Thomas HantschelEugene M. ChowDavid K. Fork
    • G01B900
    • G01Q70/10G01Q70/06G01Q70/16G01R1/06727Y10S977/873
    • Scanning probe systems, which include scanning probe microscopes (SPMs), atomic force microscope (AFMs), or profilometers, are disclosed that use cantilevered spring (e.g., stressy metal) probes formed on transparent substrates. When released, a free end bends away from the substrate to form the cantilevered spring probe, which has an in-plane or out-of-plane tip at its free end. The spring probe is mounted in a scanning probe system and is used to scan or otherwise probe a substrate surface. A laser beam is directed through the transparent substrate onto the probe to measure tip movement during scanning or probing. Other detection schemes can also be used (e.g., interferometry, capacitive, piezoresistive). The probes are used for topography, electrical, optical and thermal measurements. The probes also allow an SPM to operate as a depth gauge.
    • 公开了扫描探针系统,其包括扫描探针显微镜(SPM),原子力显微镜(AFM)或轮廓仪,其使用形成在透明基底上的悬臂弹簧(例如,应力金属)探针。 当释放时,自由端从基板弯曲以形成悬臂弹簧探针,其在其自由端具有平面内或平面外的尖端。 弹簧探针安装在扫描探针系统中,用于扫描或以其他方式探测衬底表面。 激光束通过透明基板被引导到探头上,以在扫描或探测期间测量尖端移动。 也可以使用其他检测方案(例如,干涉测量,电容式,压阻式)。 探头用于地形,电气,光学和热测量。 探头还允许SPM作为深度计操作。