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    • 91. 发明授权
    • Non-tensioned carbon nanotube switch design and process for making same
    • 非张力碳纳米管开关的设计与制造过程
    • US07928521B1
    • 2011-04-19
    • US11142725
    • 2005-05-31
    • Peter A. BurkeThomas RueckesClaude L. Bertin
    • Peter A. BurkeThomas RueckesClaude L. Bertin
    • H01L29/82
    • H01H1/0094B82Y10/00H01H59/0009H01H2001/0042H01H2059/0045H01L51/0048H01L51/0591Y10S977/932
    • The invention comprises a carbon nanotube switch suitable for use in an integrated circuit structure and capable of being moved from a first position in a first plane in the switch to a second position in a second plane in the switch using approximately the same energy as required to move the switch from the second position back to the first position. The switch comprises a flexible carbon nanotube strip secured clamped at one end in a first plane in a switching chamber, and secured or clamped, at the opposite end of the carbon nanotube, in a second plane in the switching chamber, which is parallel to the first plane but spaced therefrom, to permit the central portion of the carbon nanotube strip to move in the chamber between a first position in the first plane and in electrical contact with one or more first electrodes and a second position in the second plane and in electrical contact with one or more second electrodes.
    • 本发明包括一种适用于集成电路结构的碳纳米管开关,其能够使用开关中的第一平面中的第一位置移动到开关中的第二平面中的第二位置,使用大约相同的能量 将开关从第二个位置移回到第一个位置。 开关包括柔性碳纳米管条,其固定在切换室中的第一平面中的一端处夹持,并且在碳纳米管的相对端处固定或夹紧在开关室中的平行于第二平面的第二平面中 第一平面但与其间隔开,以允许碳纳米管条的中心部分在室中在第一平面中的第一位置和与一个或多个第一电极电连接并且在第二平面中的第二位置和电气 与一个或多个第二电极接触。
    • 94. 发明授权
    • Nanotube-based switching element
    • 基于纳米管的开关元件
    • US07652337B2
    • 2010-01-26
    • US11542524
    • 2006-10-03
    • Claude L. BertinThomas RueckesBrent M. Segal
    • Claude L. BertinThomas RueckesBrent M. Segal
    • H01L29/76
    • H01L29/0665B82Y10/00G11C13/025G11C23/00H01H1/0094H01H2001/0005H01L27/28H01L29/0673H01L29/73H01L29/78H01L51/0048H01L51/0508Y10S977/708Y10S977/762
    • Nanotube-based switching elements and logic circuits. Under one aspect, a switching element includes an input node; an output node; a nanotube channel element comprising a ribbon of nanotube fabric; and a control electrode disposed in relation to the nanotube channel element to form an electrically conductive channel between the input node and the output node, wherein the electrically conductive channel at least includes the nanotube channel element. Under another aspect, a switching element includes an input node; an output node; a nanotube channel element comprising at least one electrically conductive nanotube, the nanotube being clamped at both ends by a clamping structure; and a control electrode disposed in relation to the nanotube channel element to form an electrically conductive channel between the input node and the output node, wherein the electrically conductive channel at least includes the nanotube channel element.
    • 基于纳米管的开关元件和逻辑电路。 在一个方面,开关元件包括输入节点; 输出节点; 包括纳米管织物带的纳米管通道元件; 以及控制电极,其相对于所述纳米管通道元件设置,以在所述输入节点和所述输出节点之间形成导电通道,其中所述导电通道至少包括所述纳米管通道元件。 另一方面,开关元件包括输入节点; 输出节点; 包括至少一个导电纳米管的纳米管通道元件,所述纳米管通过夹持结构夹在两端; 以及控制电极,其相对于所述纳米管通道元件设置,以在所述输入节点和所述输出节点之间形成导电通道,其中所述导电通道至少包括所述纳米管通道元件。
    • 98. 发明授权
    • Nanotube device structure and methods of fabrication
    • 纳米管器件结构及其制造方法
    • US07071023B2
    • 2006-07-04
    • US10918181
    • 2004-08-13
    • Claude L. BertinThomas RueckesBrent M. Segal
    • Claude L. BertinThomas RueckesBrent M. Segal
    • H01L51/40H01L21/335H03H9/00
    • H01L29/0665B82Y10/00G11C13/025G11C23/00H01H1/0094H01H1/027H01H2001/0005H01L27/28H01L29/0673H01L29/73H01L29/78H01L51/0048H01L51/0508Y10S977/725Y10S977/733Y10S977/755Y10S977/938Y10T29/49105
    • Nanotube device structures and methods of fabrication. Under one embodiment, a method of forming a nanotube switching element includes forming a first structure having at least one output electrode, forming a conductive article having at least one nanotube, and forming a second structure having at least one output electrode and positioning said second structure in relation to the first structure and the conductive article such that the output electrode of the first structure is opposite the output electrode of the second structure and such that a portion of the conductive article is positioned therebetween. At least one signal electrode is provided in electrical communication with the conductive article having at least one nanotube, and at least one control electrode is provided in relation to the conductive article such that the conductive electrode may control the conductive article to form a channel between the signal electrode and at least one of the output electrodes. The first and second structures each include a respective second output electrode and wherein the second electrodes are positioned opposite each other with the conductive article positioned therebetween. The control electrode and the second control electrode includes an insulator layer on a surface facing the conductive article.
    • 纳米管器件结构和制造方法。 在一个实施例中,形成纳米管切换元件的方法包括形成具有至少一个输出电极的第一结构,形成具有至少一个纳米管的导电制品,并形成具有至少一个输出电极的第二结构,并且将所述第二结构 相对于第一结构和导电制品,使得第一结构的输出电极与第二结构的输出电极相对,并且导电制品的一部分位于它们之间。 提供至少一个信号电极与具有至少一个纳米管的导电制品电连通,并且相对于导电制品提供至少一个控制电极,使得导电电极可以控制导电制品以在导电制品之间形成通道 信号电极和至少一个输出电极。 第一和第二结构各自包括相应的第二输出电极,并且其中第二电极彼此相对定位,导电制品位于它们之间。 控制电极和第二控制电极在面向导电物品的表面上包括绝缘体层。
    • 99. 发明授权
    • Process for making bit selectable devices having elements made with nanotubes
    • 用于制造具有由纳米管制成的元件的位选择器件的工艺
    • US07045421B2
    • 2006-05-16
    • US10824706
    • 2004-04-15
    • Thomas RueckesVenkatachalam C. JaiprakashClaude L. Bertin
    • Thomas RueckesVenkatachalam C. JaiprakashClaude L. Bertin
    • H01L21/00
    • G11C13/025B82Y10/00G11C23/00H01L27/28H01L51/0048H01L51/0052
    • A method is used to make a bit selectable device having nanotube memory elements. A structure having at least two transistors is provided, each with a drain and a source with a defined channel region therebetween, each transistor further including a gate over said channel. A trench is formed between one of the source and drain of a first transistor and one of the source and drain of a second transistor. An electrical communication path is formed in the trench between one of the source and drain of a first transistor and one of the source and drain of a second transistor. A defined pattern of nanotube fabric is provided over at least a horizontal portion of the structure and extending into the trench. An electrode is provided in the trench. A pattern of nanotube fabric is suspended so that at least a portion is vertically suspended in spaced relation to the vertical walls of the trench and positioned so that the vertically suspended defined pattern of nanotube fabric is electromechanically deflectable into electrical communication with one of the drain and source of a first transistor and one of the source and drain of a second transistor.
    • 一种方法用于制造具有纳米管存储元件的位选择器件。 提供了具有至少两个晶体管的结构,每个具有漏极和源极之间具有限定的沟道区域,每个晶体管还包括位于所述沟道上的栅极。 在第一晶体管的源极和漏极之一以及第二晶体管的源极和漏极之一之间形成沟槽。 在第一晶体管的源极和漏极之一以及第二晶体管的源极和漏极中的一个之间的沟槽中形成电连通路径。 在结构的至少一个水平部分上提供限定的纳米管织物图案并且延伸到沟槽中。 在沟槽中设置电极。 纳米管织物的图案被悬浮,使得至少一部分垂直悬挂在与沟槽的垂直壁隔开的位置上,并且被定位成使得垂直悬挂的限定图案的纳米管织物可机电偏转成与排水管之一电连通 第一晶体管的源极和第二晶体管的源极和漏极之一。
    • 100. 发明授权
    • Process for making byte erasable devices having elements made with nanotubes
    • 用于制造具有由纳米管制成的元件的字节可擦除器件的过程
    • US06995046B2
    • 2006-02-07
    • US10824678
    • 2004-04-15
    • Thomas RueckesVenkatachalam C. JaiprakashClaude L. Bertin
    • Thomas RueckesVenkatachalam C. JaiprakashClaude L. Bertin
    • H01L21/335
    • H01L51/0048B82Y10/00G11C13/025G11C23/00Y10S977/943
    • A method of making byte erasable devices having elements made with nanotubes. Under one aspect of the invention, a device is made having nanotube memory elements. A structure is provided having a plurality of transistors, each with a drain and a source with a defined channel region therebetween, each transistor further including a gate over said channel. For a predefined set of transistors, a corresponding trench is formed between gates of adjacent transistors. For each trench, a defined pattern of nanotube fabric is provided over at least a horizontal portion of the structure and extending into the trench. An electrode is provided in each trench. Each defined pattern of nanotube fabric is suspended so that at least a portion is vertically suspended in spaced relation to the vertical walls of the trench and positioned so that the vertically suspended defined pattern of nanotube fabric is electromechanically deflectable into electrical communication with one of the drain and source of a transistor. An electrical communication path is provided electrically connecting each electrode so that all electrodes may electro-statically attract a corresponding defined pattern of nanotube fabric away from a transistor and toward the electrode.
    • 一种制造具有由纳米管制成的元件的字节可擦除器件的方法。 在本发明的一个方面,制造具有纳米管存储元件的装置。 提供了具有多个晶体管的结构,每个具有漏极和源极之间的沟道区域,每个晶体管还包括位于所述沟道上的栅极。 对于预定义的一组晶体管,在相邻晶体管的栅极之间形成相应的沟槽。 对于每个沟槽,在结构的至少水平部分上提供限定的纳米管织物图案并且延伸到沟槽中。 在每个沟槽中设置电极。 每个限定的纳米管织物图案被悬挂,使得至少一部分垂直悬挂在与沟槽的垂直壁隔开的关系中,并且定位成使得垂直悬挂的限定图案的纳米管织物可机电偏转成与漏斗之一电连通 和晶体管的源极。 电气连接路径被电连接每个电极,使得所有电极可以静电吸引相应的限定图案的纳米管织物远离晶体管并朝向电极。