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91. 发明申请

US20060250583A1 Multi-mode projectors with spatial light modulators 审中-公开
标题翻译：具有空间光调制器的多模投影机
公开(公告)号：US20060250583A1
公开(公告)日：2006-11-09
申请号：US11169990
申请日：2005-06-28
申请人： Andrew Huibers , Robert Duboc
发明人： Andrew Huibers , Robert Duboc
IPC分类号： G03B21/26
CPC分类号： G03B21/26
摘要： Disclosed herein is a projection system that comprises an enhanced projection mode and regular mode. In the enhanced mode, media contents are displayed such that the perceived resolution is higher than the native resolution of the light valve. In the regular mode, media contents are projected with a resolution of the naïve resolution of the light valve. Viewers can operate the projection system in either of the two modes based upon the property of the media content or the viewers' preferences, or both.
摘要翻译：这里公开了一种投影系统，其包括增强的投影模式和规则模式。在增强模式中，显示媒体内容，使得感知分辨率高于光阀的原始分辨率。在常规模式下，以光阀的初始分辨率的分辨率来投影媒体内容。观看者可以基于媒体内容的属性或观看者的偏好，或两者同时以两种模式中的任一种来操作投影系统。

92. 发明申请

US20060177957A1 Micromirror array device with a small pitch size 有权
公开(公告)号：US20060177957A1
公开(公告)日：2006-08-10
申请号：US11388116
申请日：2006-03-23
申请人： Satyadev Patel , Andrew Huibers
发明人： Satyadev Patel , Andrew Huibers
IPC分类号： H01L21/00
CPC分类号： B82Y30/00 , G02B26/0841 , H04N5/7458
摘要： A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

93. 发明申请

US20060175622A1 Micromirror-based projection system and a method of making the same 有权
公开(公告)号：US20060175622A1
公开(公告)日：2006-08-10
申请号：US11332594
申请日：2006-01-12
申请人： Peter Richards , Andrew Huibers , Satyadev Patel
发明人： Peter Richards , Andrew Huibers , Satyadev Patel
IPC分类号： H01L33/00 , H01L21/00 , G02B26/00
CPC分类号： B82Y30/00 , G02B26/0841 , H04N5/7458
摘要： A projection system is disclosed herein. The projection system employs a spatial light modulator comprising an array of individually addressable pixels for modulating the incident light based on image data. The modulated light is projected on a screen for viewing.

94. 发明授权

US07085035B2 Display apparatus with improved contrast ratio 有权
标题翻译：具有改善对比度的显示装置
公开(公告)号：US07085035B2
公开(公告)日：2006-08-01
申请号：US10969502
申请日：2004-10-19
申请人： Andrew Huibers , Satyadev Patel , Peter Heureux , Robert Duboc , Regis Grasser
发明人： Andrew Huibers , Satyadev Patel , Peter Heureux , Robert Duboc , Regis Grasser
IPC分类号： G02B26/00 , G03B21/00 , G03B21/14 , G03B27/54
CPC分类号： G02B26/0841
摘要： Disclosed herein is a micromirror-based display system having an improved contrast ratio with the deflection of the micromirrors accomplished through one addressing electrode associate with the micromirror.
摘要翻译：本文公开了一种基于微镜的显示系统，其具有与通过与微镜相关联的一个寻址电极实现的微镜的偏转的改善的对比度。

95. 发明申请

US20060082860A1 ASYMMETRIC SPATIAL LIGHT MODULATOR IN A PACKAGE 有权
标题翻译：不对称空间光调制器在一个包
公开(公告)号：US20060082860A1
公开(公告)日：2006-04-20
申请号：US10969300
申请日：2004-10-19
申请人： Andrew Huibers , Regis Grasser
发明人： Andrew Huibers , Regis Grasser
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , Y10S359/904
摘要： Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.
摘要翻译：本文公开了一种微镜封装，其具有附接到封装基板的支撑表面的微镜，并且密封在封装基板和封装盖之间，而微镜阵列被放置在支撑表面的中心偏移位置。

96. 发明授权

US07019880B1 Micromirrors and hinge structures for micromirror arrays in projection displays 有权
标题翻译：投影显示器中微镜阵列的微镜和铰链结构
公开(公告)号：US07019880B1
公开(公告)日：2006-03-28
申请号：US10927562
申请日：2004-08-25
申请人： Andrew Huibers , Satyadev Patel
发明人： Andrew Huibers , Satyadev Patel
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： The micromirror of the present invention comprises a mirror plate having thereon a cavity allowing deformation of a hinge attached to the mirror plate and deflection of the mirror plate in operation.
摘要翻译：本发明的微反射镜包括一个镜板，其上具有允许在镜面板上附接的铰链变形并且操作中的镜板偏转的腔体。

97. 发明申请

US20060044519A1 Micromirrors and hinge structures for micromirror arrays in projection displays 有权
标题翻译：投影显示器中微镜阵列的微镜和铰链结构
公开(公告)号：US20060044519A1
公开(公告)日：2006-03-02
申请号：US10927408
申请日：2004-08-25
申请人： Andrew Huibers , Satyadev Patel
发明人： Andrew Huibers , Satyadev Patel
IPC分类号： G03B21/26 , G02B26/00
CPC分类号： H04N5/7458 , G02B26/008 , G02B26/0841 , G03B21/008
摘要： A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis and the hinge structure is located between the micromirror plate and the light source. The mirror plate is formed between the hinge and the substrate on which the hinge is formed. As a result, the hinge is exposed to the incident light during the operation.
摘要翻译：公开了一种空间光调制器以及用于制造这种调制器的方法。空间光调制器包括微镜阵列，每个微镜具有通过基板上的铰链保持的铰链和微镜板，微镜板附接到铰链，使得微镜板可以沿着旋转轴线旋转并且铰链结构位于在微镜板和光源之间。镜板形成在铰链和形成有铰链的基板之间。结果，铰链在操作期间暴露于入射光。

98. 发明申请

US20060033977A1 Micromirror device 有权
标题翻译：微镜装置
公开(公告)号：US20060033977A1
公开(公告)日：2006-02-16
申请号：US11256035
申请日：2005-10-21
申请人： Satyadev Patel , Andrew Huibers
发明人： Satyadev Patel , Andrew Huibers
IPC分类号： G02F1/03 , G02F1/07
CPC分类号： G02B26/0841
摘要： A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is not parallel to the substrate on which the mirror plate is formed. The micromirror device may have an ON state stopper for limiting the rotation of the mirror plate at the ON state angle, but does not have an OFF state angle. The non-zero OFF state is achieved by attaching the mirror plate to a deformable hinge held by a hinge support that is curved at the natural resting state.
摘要翻译：空间光调制器包括微镜器件的阵列，每个微镜器件具有反射和可偏转的镜板。在操作期间，镜板在ON和OFF状态之间移动，其中OFF状态是其中镜板不平行于其上形成有镜板的基板的状态。微镜装置可以具有用于将镜板的旋转限制在ON状态角但不具有OFF状态角的ON状态止动器。通过将镜板附接到由在自然静止状态下弯曲的铰链支撑件保持的可变形铰链来实现非零关闭状态。

99. 发明申请

US20060007522A1 Micromirror and post arrangements on substrates 有权
公开(公告)号：US20060007522A1
公开(公告)日：2006-01-12
申请号：US11216594
申请日：2005-08-30
申请人： Andrew Huibers , Satyadev Patel
发明人： Andrew Huibers , Satyadev Patel
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

100. 发明申请

US20050286044A1 Method and apparatus for qualitatively analyzing uniformity in microelectromechanical devices 审中-公开
标题翻译：定性分析微机电装置均匀性的方法和装置
公开(公告)号：US20050286044A1
公开(公告)日：2005-12-29
申请号：US10875602
申请日：2004-06-23
申请人： Andrew Huibers
发明人： Andrew Huibers
IPC分类号： G01N21/55 , G01N21/88 , G01N21/95
CPC分类号： G01N21/55 , G01N21/95
摘要： The method and apparatus of the invention qualitatively evaluate the product quality of a wafer having microelectromechanical devices that have deflectable reflective planar members using an optical technique. At least three wafer images are captured for different reflected light from different spatial directions. The brightness of the captured images is compared between the captured images so as to obtain qualitative information of the deflection distribution of the deflectable members. The qualitative information can be used as basis for further product quality analysis or as standard for determining whether to discard the product.
摘要翻译：本发明的方法和装置定性评估具有使用光学技术的具有可偏转反射平面构件的微机电装置的晶片的产品质量。对于来自不同空间方向的不同反射光捕获至少三个晶片图像。在拍摄图像之间比较拍摄图像的亮度，以获得可偏转构件的偏转分布的定性信息。定性信息可以作为进一步的产品质量分析的基础，也可以作为确定是否丢弃产品的标准。

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