专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07218981B1 Dispatch integration system and method based on semiconductor manufacturing 失效
标题翻译：基于半导体制造的调度集成系统和方法
公开(公告)号：US07218981B1
公开(公告)日：2007-05-15
申请号：US11401900
申请日：2006-04-12
申请人： Yu-Wen Ho , Hung-En Tai , Chien-Chung Chen
发明人： Yu-Wen Ho , Hung-En Tai , Chien-Chung Chen
IPC分类号： G06F19/00
CPC分类号： G05B19/4187 , G05B2219/32257 , G05B2219/45031 , Y02P90/12 , Y02P90/205
摘要： A dispatch integration method based on semiconductor manufacturing. When multiple tools are idle, idle messages are sent to a real-time dispatch system through a tool control system and a manufacturing execution system. The real-time dispatch system sorts tool parameters relating to tool efficiency based on a currently executed process using a principal component analysis method, defining weights of each tool according to the defined tool parameters and corresponding factor weights using a linear regression weight formula, calculating tool weights of each tool parameter using a linear regression weight formula, and determining a desired tool for dispatch according to the calculated tool weights.
摘要翻译：基于半导体制造的调度集成方法。当多个工具空闲时，空闲消息通过工具控制系统和制造执行系统发送到实时调度系统。实时调度系统基于使用主成分分析方法的当前执行的过程来分类与工具效率相关的工具参数，根据所定义的工具参数和相应的因子权重使用线性回归权重公式定义每个工具的权重，计算工具使用线性回归权重公式的每个工具参数的权重，以及根据所计算的工具权重确定用于调度的期望工具。

2. 发明申请

US20070129833A1 DISPATCH INTEGRATION SYSTEM AND METHOD BASED ON SEMICONDUCTOR MANUFACTURING 失效
标题翻译：基于半导体制造的分布式集成系统和方法
公开(公告)号：US20070129833A1
公开(公告)日：2007-06-07
申请号：US11401900
申请日：2006-04-12
申请人： Yu-Wen Ho , Hung-En Tai , Chien-Chung Chen
发明人： Yu-Wen Ho , Hung-En Tai , Chien-Chung Chen
IPC分类号： G06F19/00
CPC分类号： G05B19/4187 , G05B2219/32257 , G05B2219/45031 , Y02P90/12 , Y02P90/205
摘要： A dispatch integration method based on semiconductor manufacturing. When multiple tools are idle, idle messages are sent to a real-time dispatch system through a tool control system and a manufacturing execution system. The real-time dispatch system sorts tool parameters relating to tool efficiency based on a currently executed process using a principal component analysis method, defining weights of each tool according to the defined tool parameters and corresponding factor weights using a linear regression weight formula, calculating tool weights of each tool parameter using a linear regression weight formula, and determining a desired tool for dispatch according to the calculated tool weights.
摘要翻译：基于半导体制造的调度集成方法。当多个工具空闲时，空闲消息通过工具控制系统和制造执行系统发送到实时调度系统。实时调度系统基于使用主成分分析方法的当前执行的过程来分类与工具效率相关的工具参数，根据所定义的工具参数和相应的因子权重使用线性回归权重公式定义每个工具的权重，计算工具使用线性回归权重公式的每个工具参数的权重，以及根据所计算的工具权重确定用于调度的期望工具。

3. 发明申请

US20050203858A1 METHOD AND RELATED SYSTEM FOR SEMICONDUCTOR EQUIPMENT PREVENTION MAINTENANCE MANAGEMENT 有权
标题翻译：半导体设备预防维护管理方法与相关系统
公开(公告)号：US20050203858A1
公开(公告)日：2005-09-15
申请号：US10708572
申请日：2004-03-11
申请人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
IPC分类号： G06F19/00 , G21C17/00
CPC分类号： H01L22/20 , G05B19/41875 , G06Q30/0283 , Y02P90/22
摘要： A method and related system for semiconductor equipment prevention maintenance management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording time and cost of prevention maintenance after each piece of equipment runs prevention maintenance, evaluating the quality of semiconductor products, and analyzing a relationship between the corresponding process parameter, the corresponding equipment parameters, prevention maintenance cost, and semiconductor products of each piece of equipment.
摘要翻译：一种半导体设备预防维护管理方法及相关系统。该方法包括记录每件设备的工艺参数，每台设备的加工记录设备参数，每台设备运行后的预防维护的评估和记录时间和成本预防维护，半导体产品的质量评估和分析相应的过程参数，相应的设备参数，预防维护成本以及每件设备的半导体产品之间的关系。

4. 发明申请

US20050187648A1 SEMICONDUCTOR PROCESS AND YIELD ANALYSIS INTEGRATED REAL-TIME MANAGEMENT METHOD 失效
标题翻译：半导体工艺和分析实时管理方法
公开(公告)号：US20050187648A1
公开(公告)日：2005-08-25
申请号：US10708277
申请日：2004-02-20
申请人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
IPC分类号： G05B19/418 , G05B23/02 , H01L21/02 , G06F19/00
CPC分类号： H01L22/20 , G05B2219/32191 , Y02P90/22
摘要： A semiconductor process and yield analysis integrated real-time management method comprises inspecting a plurality of semiconductor products with a plurality of items to generate and record a plurality of inspecting results during semiconductor process, classifying the semiconductor products as a plurality of groups with a default rule to generate and record an initial data in a database, indexing a plurality of semiconductor product groups and the corresponding initial data from the database by a default product rule and parameter to calculate a corresponding analysis result, and displaying the analysis result according to the indexed semiconductor product groups and the initial data.
摘要翻译：集成实时管理方法的半导体工艺和成品率分析包括在半导体处理期间检查多个半导体产品以产生并记录多个检查结果，并将半导体产品作为具有默认规则的多个组进行分类在数据库中生成和记录初始数据，通过默认产品规则和参数从数据库索引多个半导体产品组和相应的初始数据，以计算相应的分析结果，并根据索引的半导体显示分析结果产品组和初始数据。

5. 发明授权

US07099729B2 Semiconductor process and yield analysis integrated real-time management method 失效
标题翻译：半导体工艺和产量分析集成实时管理方法
公开(公告)号：US07099729B2
公开(公告)日：2006-08-29
申请号：US10708277
申请日：2004-02-20
申请人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
IPC分类号： G06F19/00
CPC分类号： H01L22/20 , G05B2219/32191 , Y02P90/22
摘要： A semiconductor process and yield analysis integrated real-time management method comprises inspecting a plurality of semiconductor products with a plurality of items to generate and record a plurality of inspecting results during semiconductor process, classifying the semiconductor products as a plurality of groups with a default rule to generate and record an initial data in a database, indexing a plurality of semiconductor product groups and the corresponding initial data from the database by a default product rule and parameter to calculate a corresponding analysis result, and displaying the analysis result according to the indexed semiconductor product groups and the initial data.
摘要翻译：集成实时管理方法的半导体工艺和成品率分析包括在半导体处理期间检查多个半导体产品以产生并记录多个检查结果，并将半导体产品作为具有默认规则的多个组进行分类在数据库中生成和记录初始数据，通过默认产品规则和参数从数据库索引多个半导体产品组和相应的初始数据，以计算相应的分析结果，并根据索引的半导体显示分析结果产品组和初始数据。

6. 发明授权

US06999897B2 Method and related system for semiconductor equipment early warning management 失效
标题翻译：半导体设备预警管理方法及相关系统
公开(公告)号：US06999897B2
公开(公告)日：2006-02-14
申请号：US10708573
申请日：2004-03-11
申请人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
IPC分类号： G11C7/00
CPC分类号： G05B19/41875 , Y02P90/22
摘要： A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.
摘要翻译：一种半导体设备预警管理方法及相关系统。该方法包括记录每件设备的处理参数，每台设备处理时记录设备参数，评估和记录半导体产品的质量和相应的测试参数，分析相应工艺参数，相应设备参数之间的关系，以及每件设备的半导体产品的质量。

7. 发明授权

US06950783B1 Method and related system for semiconductor equipment prevention maintenance management 有权
标题翻译：半导体设备预防维护管理方法及相关系统
公开(公告)号：US06950783B1
公开(公告)日：2005-09-27
申请号：US10708572
申请日：2004-03-11
申请人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
IPC分类号： G06F19/00 , G21C17/00
CPC分类号： H01L22/20 , G05B19/41875 , G06Q30/0283 , Y02P90/22
摘要： A method and related system for semiconductor equipment prevention maintenance management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording time and cost of prevention maintenance after each piece of equipment runs prevention maintenance, evaluating the quality of semiconductor products, and analyzing a relationship between the corresponding process parameter, the corresponding equipment parameters, prevention maintenance cost, and semiconductor products of each piece of equipment.
摘要翻译：一种半导体设备预防维护管理方法及相关系统。该方法包括记录每件设备的工艺参数，每台设备的加工记录设备参数，每台设备运行后的预防维护的评估和记录时间和成本预防维护，半导体产品的质量评估和分析相应的过程参数，相应的设备参数，预防维护成本以及每件设备的半导体产品之间的关系。

8. 发明申请

US20050203715A1 METHOD AND RELATED SYSTEM FOR SEMICONDUCTOR EQUIPMENT EARLY WARNING MANAGEMENT 失效
标题翻译：用于半导体设备的方法和相关系统早期警告管理
公开(公告)号：US20050203715A1
公开(公告)日：2005-09-15
申请号：US10708573
申请日：2004-03-11
申请人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , Y02P90/22
摘要： A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.
摘要翻译：一种半导体设备预警管理方法及相关系统。该方法包括记录每件设备的处理参数，每台设备处理时记录设备参数，评估和记录半导体产品的质量和相应的测试参数，分析相应工艺参数，相应设备参数之间的关系，以及每件设备的半导体产品的质量。

9. 发明授权

US06898539B2 Method for analyzing final test parameters 有权
标题翻译：分析最终测试参数的方法
公开(公告)号：US06898539B2
公开(公告)日：2005-05-24
申请号：US10604979
申请日：2003-08-29
申请人： Hung-En Tai , Chien-Chung Chen
发明人： Hung-En Tai , Chien-Chung Chen
IPC分类号： G01R31/26 , G05B19/418 , G06F11/30 , G06F19/00 , H01L21/66
CPC分类号： G05B19/41875 , G05B2219/32222 , G05B2219/45031 , H01L22/20 , H01L2924/0002 , Y02P90/14 , Y02P90/22 , H01L2924/00
摘要： A method for analyzing final test parameters includes the following steps: To retrieve the final test parameters of each product lots by searching a database. To compare the final test parameters to select a representative final test parameter and a representative final test item. To determine if the representative final test item is correlated to a packaging process step. To classify the plurality of product lots into at least a first qualified group and a first failed group according to the representative final test item if there is correlation. To search for the equipment through which the first qualified group or the first failed group had passed in the packaging process step. To determine the equipment having a probability of having processed the first failed group being greater than a probability of having processed the first qualified group.
摘要翻译：分析最终测试参数的方法包括以下步骤：通过搜索数据库来检索每个产品批次的最终测试参数。比较最终测试参数以选择代表性的最终测试参数和代表性的最终测试项目。确定代表性的最终测试项目是否与包装过程步骤相关。如果存在相关性，则根据代表性的最终测试项目将多个产品批次分类为至少第一合格组和第一故障组。在包装过程中搜索第一个合格组或第一个故障组通过的设备。确定具有处理第一故障组的可能性的设备大于处理第一合格组的概率。

10. 发明申请

US20050004773A1 METHOD FOR ANALYZING IN-LINE QC TEST PARAMETERS 失效
标题翻译：用于分析在线QC测试参数的方法
公开(公告)号：US20050004773A1
公开(公告)日：2005-01-06
申请号：US10604244
申请日：2003-07-03
申请人： Hung-En Tai , Haw-Jyue Luo
发明人： Hung-En Tai , Haw-Jyue Luo
IPC分类号： G01R31/26 , G05B19/418 , G06F19/00
CPC分类号： G05B19/41875 , Y02P90/22
摘要： A method for analyzing in-line QCtest parameters is used to analyze a plurality of lots of products, each lot of products having a lot number and being formed using a plurality of equipments. At least one wafer of each lot of products is tested by at least one in-line QC test item to generate an in-line QC test parameter. The in-line QC test item, a sample test item and a wafer test item related to the in-line QC test item are stored in a database. The database further stores the in-line QC test parameter and data of a plurality of lots of high-yield product stocks, such as various test items and test parameters. The method includes the following steps: analyzing the in-line QC test parameter to determine whether the in-line QC test parameter corresponds to a predetermined spec or not; searching the database to find out the sample test item or the wafer test item related to the in-line QC test item when the in-line QC test parameter does not correspond to the predetermined spec; searching the database to find out the corresponding test parameters of the high-yield product stocks according to the in-line QC test item and the searched sample test item or the wafer test item; and generating a correlation to illustrate the relationship between the in-line QC test item and the sample test item, or the relationship between the in-line QC test item and the wafer test item according to the searched high-yield product stocks.
摘要翻译：用于分析在线QC测试参数的方法用于分析多批产品，每批产品具有批号并且使用多个设备形成。每批产品的至少一个晶片通过至少一个在线QC测试项目进行测试，以生成在线QC测试参数。在线QC测试项目，样品测试项目和与在线QC测试项目相关的晶片测试项目存储在数据库中。数据库进一步存储多个批量的高收益产品库存的在线QC测试参数和数据，例如各种测试项目和测试参数。该方法包括以下步骤：分析在线QC测试参数，以确定在线QC测试参数是否对应于预定规格; 搜索数据库以查找在线QC测试参数不符合预定规格的样品测试项目或与在线QC测试项目相关的晶片测试项目; 搜索数据库，根据在线QC测试项目和搜索到的样品测试项目或晶片测试项目，找出高产量产品库存的相应测试参数; 并产生相关性，以说明根据所搜索的高产量库存，在线QC测试项目和样本测试项目之间的关系，或者在线QC测试项目与晶片测试项目之间的关系。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式