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    • 2. 发明授权
    • Device for detecting magnetism
    • 用于检测磁性的装置
    • US5005064A
    • 1991-04-02
    • US233431
    • 1988-08-18
    • Yoshimi YoshinoKenichi AoIchiro IzawaToshikazu Arasuna
    • Yoshimi YoshinoKenichi AoIchiro IzawaToshikazu Arasuna
    • G01R33/09H01L27/22H01L43/08
    • G01R33/09H01L27/22H01L43/08
    • According to this invention, a device for detecting magnetism comprises; a substrate, an interposed insulating layer containing impurities therein, formed on the substrate, and a ferromagnetic magnetoresistive element formed on the interposed layer, wherein at least a portion of the interposed layer on which the ferromagnetic magnetoresistive element is formed has a concentration of impurities of less than a predetermined value. Further, in the device of this invention, the surface of the layer interposed between the substrate and the ferromagnetic magnetoresistive element has a surface roughness of less than 120 and an angle between a contacting surface of a conductive wiring and the ferromagnetic magnetoresistive element and the surface of the interposed layer is less than 78 degrees. Therefore, a device wherein a deterioration of the quality film of the ferromagnetic magnetoresistive element can be avoided and a reduction of the ratio of the resistance variation of the ferromagnetic magnetoresistive element can be maintained at less than 10% can be obtained, and further, a device wherein the generation of noise can be effectively suppressed so that the device is highly sensitive to magnetism and has a high S/N ratio, and further, the breakdown ratio caused by wiring breakages is effectively reduced, can be obtained.
    • 4. 发明授权
    • Displacement detecting device
    • 位移检测装置
    • US5656936A
    • 1997-08-12
    • US588329
    • 1996-01-18
    • Kenichi AoYoshimi YoshinoYasuaki MakinoSeiki Aoyama
    • Kenichi AoYoshimi YoshinoYasuaki MakinoSeiki Aoyama
    • G01B7/00G01D5/14G01D5/16G01D5/18G01D5/245G01P3/488G01R33/09G01B7/30
    • G01D5/147G01P3/488
    • A displacement detector to obtain high-precision displacement detection with a small-sized, low-cost apparatus. A displacement detector comprises rectangular teeth formed on the outer circumference surface at a pitch of .lambda., a gearwheel made of a magnetic material, a magnet having a width larger than the pitch .lambda. of the gearwheel and so disposed that the N-pole thereof faces the teeth, and a pair of MREs constructed by alternately connecting the long strip portions and short strip portions thereof to have a zigzag shape. A uniform cyclic magnet field from the magnet to the gearwheel is formed within a gap between the gearwheel and the magnet. On the same phase of the magnet field are disposed the pair of MREs so that the directions of the long strip portions thereof and the directions of the magnetic force lines make angles of approximately 45.degree. and approximately 135.degree., respectively.
    • 一种位移检测器,用小型,低成本的装置获得高精度位移检测。 位移检测器包括以λ的间距形成在外圆周表面上的矩形齿,由磁性材料制成的齿轮,具有大于齿轮的间距λ的宽度的磁体,并且被布置成使得其N极面向 齿,以及通过交替地将长带部分和短条带部分交替地连接以形成锯齿形的一对MRE。 在磁体和磁体之间的间隙内形成有从磁体到齿轮的均匀的循环磁场。 在磁场的相同相位上设置一对MRE,使得其长条状部分的方向和磁力线的方向分别为大约45度和大约135度的角度。
    • 10. 发明授权
    • Magnetoresistive element and manufacturing method therefor
    • 磁阻元件及其制造方法
    • US5471084A
    • 1995-11-28
    • US94142
    • 1993-07-30
    • Yasutoshi SuzukiKenichi AoHirofumi UenoyamaHiroki NoguchiKoji EguchiIchiro ItoYoshimi Yoshino
    • Yasutoshi SuzukiKenichi AoHirofumi UenoyamaHiroki NoguchiKoji EguchiIchiro ItoYoshimi Yoshino
    • H01L43/08H01L27/22
    • H01L43/08
    • This invention relates to a magnetoresistive element used for a magnetic sensor, etc. A ferromagnetic magnetoresistive element thin film is formed so as to be electrically connected to and so as to overlap the upper end portion of an aluminum wiring metal on a substrate. Through using a vacuum heat treatment with a temperature between 350.degree. and 450.degree. C., a Ni--Al-based alloy is formed at the overlapping portion. Therefore, even when a surface protection film of silicon nitride is subsequently formed by plasma CVD on the substrate, the alloy prevents the nitriding of the upper end portion of the aluminum wiring metal. Accordingly, the surface can be protected from moisture by the silicon nitride film without increasing the contact resistance between the magnetoresistive element thin film and the wiring metal. Instead of the Ni--Al-based alloy, other conductive metals such as TiW, TiN, Ti, Zr, or the like may be used. Also, the surface protection film may be a multi-layered film having a first film containing no nitrogen, such as a silicon oxide film, and a second film of silicon nitride film formed on the first film.
    • PCT No.PCT / JP92 / 01581 Sec。 371日期:1993年7月30日 102(e)日期1993年7月30日PCT提交1992年12月3日PCT公布。 公开号WO93 / 11569 日本特许公报1993年6月10日。本发明涉及用于磁传感器等的磁阻元件。铁磁磁阻元件薄膜形成为与铝布线的上端部电连接并与其重叠 金属在基板上。 通过使用350〜450℃的真空热处理,在重叠部分形成Ni-Al系合金。 因此,即使在基板上随后通过等离子体CVD形成氮化硅的表面保护膜,合金也能防止铝布线金属的上端部的氮化。 因此,可以防止表面被氮化硅膜防止湿气,而不增加磁阻元件薄膜和布线金属之间的接触电阻。 可以使用TiW,TiN,Ti,Zr等其他导电性金属代替Ni-Al系合金。 此外,表面保护膜也可以是具有不含氮的第一膜的多层膜,例如氧化硅膜,以及形成在第一膜上的第二氮化硅膜。