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    • 3. 发明申请
    • MEMS ENCAPSULATION BY MULTILAYER FILM LAMINATION
    • 多层薄膜层叠的MEMS封装
    • US20150166333A1
    • 2015-06-18
    • US14104915
    • 2013-12-12
    • QUALCOMM MEMS Technologies, Inc.
    • Wenguang LiTsongming Kao
    • B81B7/00B81C1/00
    • B81B7/0058B81B7/0038B81C1/00333B81C2203/0172
    • This disclosure provides systems, methods and apparatus for a laminated film enclosing an array of microelectromechanical systems (MEMS) structures. In one aspect, a MEMS apparatus includes a substrate having a device region and an edge region surrounding the device region and an array of MEMS structures on the substrate at the device region. A protective layer is disposed over the array of MEMS structures. A laminated film is disposed over the protective layer and in contact with the substrate to form a seal at the edge region, where the laminated film forms a cavity between the substrate and the laminated film at the device region. The laminated film includes a moisture barrier layer facing away from the array of MEMS structures, and a desiccant layer facing toward the array of MEMS structures.
    • 本公开提供了用于封装微机电系统(MEMS)结构阵列的层压膜的系统,方法和装置。 在一个方面,MEMS装置包括具有器件区域和围绕器件区域的边缘区域以及器件区域上的衬底上的MEMS结构阵列的衬底。 保护层设置在MEMS结构阵列上。 层叠膜设置在保护层上方并与基板接触以在边缘区域形成密封,其中层压膜在器件区域处在基板和层压膜之间形成空腔。 层压膜包括背离MEMS结构阵列的防潮层和面向MEMS结构阵列的干燥剂层。
    • 4. 发明授权
    • MEMS encapsulation by multilayer film lamination
    • MEMS封装通过多层膜层压
    • US09156678B2
    • 2015-10-13
    • US14104915
    • 2013-12-12
    • QUALCOMM MEMS Technologies, Inc.
    • Wenguang LiTsongming Kao
    • H01L23/20B81B7/00B81C1/00
    • B81B7/0058B81B7/0038B81C1/00333B81C2203/0172
    • This disclosure provides systems, methods and apparatus for a laminated film enclosing an array of microelectromechanical systems (MEMS) structures. In one aspect, a MEMS apparatus includes a substrate having a device region and an edge region surrounding the device region and an array of MEMS structures on the substrate at the device region. A protective layer is disposed over the array of MEMS structures. A laminated film is disposed over the protective layer and in contact with the substrate to form a seal at the edge region, where the laminated film forms a cavity between the substrate and the laminated film at the device region. The laminated film includes a moisture barrier layer facing away from the array of MEMS structures, and a desiccant layer facing toward the array of MEMS structures.
    • 本公开提供了用于封装微机电系统(MEMS)结构阵列的层压膜的系统,方法和装置。 在一个方面,MEMS装置包括具有器件区域和围绕器件区域的边缘区域以及器件区域上的衬底上的MEMS结构阵列的衬底。 保护层设置在MEMS结构阵列上。 层叠膜设置在保护层上方并与基板接触以在边缘区域形成密封,其中层压膜在器件区域处在基板和层压膜之间形成空腔。 层压膜包括背离MEMS结构阵列的防潮层和面向MEMS结构阵列的干燥剂层。