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1. 发明授权

US09069264B2 Metrology method and apparatus, and device manufacturing method 有权
标题翻译：计量方法和装置以及装置制造方法
公开(公告)号：US09069264B2
公开(公告)日：2015-06-30
申请号：US13542319
申请日：2012-07-05
申请人： Patrick Warnaar , Mark Van Schijndel , Michael Kubis
发明人： Patrick Warnaar , Mark Van Schijndel , Michael Kubis
IPC分类号： G06K9/46 , G03F1/44 , G03F7/20 , G03B27/54
CPC分类号： G03F7/70633 , G03F1/44 , G03F7/70683
摘要： A target structure including a periodic structure is formed on a substrate. An image of the target structure is detected while illuminating the target structure with a beam of radiation, the image being formed using a first part of non-zero order diffracted radiation while excluding zero order diffracted radiation. Intensity values extracted from a region of interest within the image are used to determine a property of the periodic structure. A processing unit recognizes locations of a plurality of boundary features in the image of the target structure to identify regions of interest. The number of boundary features in each direction is at least twice a number of boundaries of periodic structures within the target structure. The accuracy of locating the region is greater than by recognizing only the boundaries of the periodic structure(s).
摘要翻译：包括周期性结构的靶结构形成在基板上。在用辐射束照射目标结构的同时检测目标结构的图像，该图像使用非零次衍射辐射的第一部分形成，同时排除零级衍射辐射。使用从图像内的感兴趣区域提取的强度值来确定周期性结构的性质。处理单元识别目标结构的图像中的多个边界特征的位置以识别感兴趣的区域。每个方向上边界特征的数量至少是目标结构内周期性结构边界数量的两倍。定位区域的精度大于仅识别周期性结构的边界。

2. 发明申请

US20130050501A1 Metrology Method and Apparatus, and Device Manufacturing Method 有权
标题翻译：计量方法与装置及装置制造方法
公开(公告)号：US20130050501A1
公开(公告)日：2013-02-28
申请号：US13542319
申请日：2012-07-05
申请人： Patrick WARNAAR , Mark Van Schijndel , Michael Kubis
发明人： Patrick WARNAAR , Mark Van Schijndel , Michael Kubis
IPC分类号： G06K9/46 , H04N5/225 , G03B27/32 , G06K9/00
CPC分类号： G03F7/70633 , G03F1/44 , G03F7/70683
摘要： A target structure including a periodic structure is formed on a substrate. An image of the target structure is detected while illuminating the target structure with a beam of radiation, the image being formed using a first part of non-zero order diffracted radiation while excluding zero order diffracted radiation. Intensity values extracted from a region of interest within the image are used to determine a property of the periodic structure. A processing unit recognizes locations of a plurality of boundary features in the image of the target structure to identify regions of interest. The number of boundary features in each direction is at least twice a number of boundaries of periodic structures within the target structure. The accuracy of locating the region is greater than by recognizing only the boundaries of the periodic structure(s).
摘要翻译：包括周期性结构的靶结构形成在基板上。在用辐射束照射目标结构的同时检测目标结构的图像，该图像使用非零次衍射辐射的第一部分形成，同时排除零级衍射辐射。使用从图像内的感兴趣区域提取的强度值来确定周期性结构的性质。处理单元识别目标结构的图像中的多个边界特征的位置以识别感兴趣的区域。每个方向上边界特征的数量至少是目标结构内周期性结构边界数量的两倍。定位区域的精度大于仅识别周期性结构的边界。

3. 发明授权

US07169454B2 Multi-stack optical data storage medium and use of such medium 失效
标题翻译：多层光学数据存储介质和这种介质的使用
公开(公告)号：US07169454B2
公开(公告)日：2007-01-30
申请号：US10513049
申请日：2003-04-11
申请人： Mark Van Schijndel , Guofu Zhou , Johannes Cornelis Norbertus Rijpers , Johannes Henricus Jocephus Roosen , Antonius Emilius Theodorus Kuiper
发明人： Mark Van Schijndel , Guofu Zhou , Johannes Cornelis Norbertus Rijpers , Johannes Henricus Jocephus Roosen , Antonius Emilius Theodorus Kuiper
IPC分类号： B32B3/02
CPC分类号： G11B7/257 , G11B7/00454 , G11B7/24038 , G11B7/258 , G11B2007/25706 , G11B2007/25708 , G11B2007/2571 , G11B2007/25711 , G11B2007/25713 , G11B2007/25715
摘要： A description is given of a multi-stack optical data storage medium (20) for rewritable recording using a focused radiation beam (30) entering through an entrance face (16) of the medium (20) during recording. The medium (20) has a substrate (1). Deposited on a side thereof is a first recording stack (2) with a phase-change type recording layer (6). The first recording stack (2) is present at a position most remote from the entrance face (16). At least one further recording stack (3), with a phase-change type recording layer (12) is present closer to the entrance face (16) than the first recording stack (2). A metal reflective layer of Cu, transparent for the radiation beam (30), is present in the further recording stack (3) and has a thickness between 2 and 10 nm. A transparent spacer layer (9) is present between the recording stacks (2, 3). In such a way a metal reflective layer (14) with a high optical transmission combined with sufficient heat sink action is achieved which furthermore has a low chemical reactivity with adjacent layers.
摘要翻译：给出了在记录期间使用聚焦辐射束（30）通过介质（20）的入射面（16）进入可重写记录的多层光学数据存储介质（20）的描述。介质（20）具有基板（1）。沉积在其一侧的是具有相变型记录层（6）的第一记录层（2）。第一记录堆叠（2）存在于最远离入射面（16）的位置处。具有相变型记录层（12）的至少一个另外的记录堆叠（3）比第一记录堆叠（2）更靠近入口面（16）。对于辐射束（30）透明的Cu的金属反射层存在于另外的记录叠层（3）中，并且具有2至10nm的厚度。在记录叠层（2,3）之间存在透明间隔层（9）。以这种方式，实现了具有与具有足够散热作用的高光学透射率的金属反射层（14），该金属反射层还具有与相邻层的低化学反应性。

4. 发明授权

US07385907B2 Rewritable optical record carrier 失效
标题翻译：可重写光学记录载体
公开(公告)号：US07385907B2
公开(公告)日：2008-06-10
申请号：US10540700
申请日：2003-12-18
申请人： Ruud Vlutters , Wilhelmus Robert Koppers , Pierre Hermanus Woerlee , Mark Van Schijndel
发明人： Ruud Vlutters , Wilhelmus Robert Koppers , Pierre Hermanus Woerlee , Mark Van Schijndel
IPC分类号： G11B7/24 , B32B3/02
CPC分类号： G11B7/24038 , G11B7/2403 , G11B7/24067 , G11B7/243 , G11B7/257 , G11B7/258 , G11B7/2585 , G11B7/259 , G11B2007/2431 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316 , Y10T428/21
摘要： A rewritable optical record carrier comprising a first substrate carrying a first recording stack of layers, which recording stack comprises, a first dielectric layer, a recording layer comprising a phase-change recording material, a second dielectric layer, and a metal mirror layer. In order to achieve a maximum R*M said first dielectric layer has a thickness d1 in the range of 20 nm to 50 nm, and said second dielectric layer has a thickness d2 according to the relation 0.0225*d22−2.6572*d2+173.3 (nm)
摘要翻译：一种可重写光学记录载体，包括承载层的第一记录叠层的第一衬底，该记录层包括第一介电层，包含相变记录材料的记录层，第二介电层和金属镜层。为了实现最大R * M，所述第一介电层的厚度d 1在20nm至50nm的范围内，并且所述第二介电层具有根据0.0225 * d <2的关系的厚度d 2， /SUB>²-2.6572*d₂+173.3（nm） <0.0225 * D 2 当反射镜层包含铝时，根据关系0.0191 *的厚度d <2> 2 <2>±2.6572 * d 2 +213.3（nm） d 2 -22482 * d 2 +149.6（nm） <0.0191 * D _{2 2 -2.0482 * d 2 + 189.6（nm）。}

5. 发明申请

US20060104189A1 Rewritable optical record carrier 失效
标题翻译：可重写光学记录载体
公开(公告)号：US20060104189A1
公开(公告)日：2006-05-18
申请号：US10540700
申请日：2003-12-18
申请人： Ruud Vlutters , Wilhelmus Koppers , Pierre Woerlee , Mark Van Schijndel
发明人： Ruud Vlutters , Wilhelmus Koppers , Pierre Woerlee , Mark Van Schijndel
IPC分类号： G11B7/24
CPC分类号： G11B7/24038 , G11B7/2403 , G11B7/24067 , G11B7/243 , G11B7/257 , G11B7/258 , G11B7/2585 , G11B7/259 , G11B2007/2431 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316 , Y10T428/21
摘要： A rewritable optical record carrier comprising a first substrate carrying a first recording stack of layers, which recording stack comprises, a first dielectric layer, a recording layer comprising a phase-change recording material, a second dielectric layer, and a metal mirror layer. In order to achieve a maximum R*M said first dielectric layer has a thickness d1 in the range of 20 nm to 50 nm, and said second dielectric layer has a thickness d2 according to the relation 0.0225*d22−2.6572*d2+173.3 (nm)
摘要翻译：一种可重写光学记录载体，包括承载层的第一记录叠层的第一衬底，该记录层包括第一介电层，包含相变记录材料的记录层，第二介电层和金属镜层。为了实现最大R * M，所述第一介电层的厚度d 1在20nm至50nm的范围内，并且所述第二介电层具有根据0.0225 * d <2的关系的厚度d 2， /SUB>²-2.6572*d₂+173.3（nm） <0.0225 * D 2 当反射镜层包含铝时，根据关系0.0191 *的厚度d <2> 2 <2>±2.6572 * d 2 +213.3（nm） d 2 -22482 * d 2 +149.6（nm） <0.0191 * D _{2 2 -2.0482 * d 2 + 189.6（nm）。}

6. 发明申请

US20060063108A1 Multi-stack optical data storage medium and use of such medium 审中-公开
标题翻译：多层光学数据存储介质和这种介质的使用
公开(公告)号：US20060063108A1
公开(公告)日：2006-03-23
申请号：US10533713
申请日：2003-10-22
申请人： Mark Van Schijndel , Hubert Martens , Benno Tieke , Guofu Zhou
发明人： Mark Van Schijndel , Hubert Martens , Benno Tieke , Guofu Zhou
IPC分类号： G11B7/24 , G11B15/64
CPC分类号： G11B7/258 , G11B7/24038 , G11B7/246 , G11B7/2585
摘要： The present invention relates to a multi-stack optical data storage medium (10). The medium comprises a first substrate (1a) with present on a side thereof a first recording stack (13) named L0, a second substrate (1b) with present on a side thereof a second recording stack (12) named L1 comprising a recordable type L1 recording layer (4) having a thickness tRL1 and a complex refractive index nλ−i*kλ at a wavelength λ. A second reflective layer (6) is present adjacent the L1 recording layer (4) at a side most remote from a radiation beam (20) entrance face (11) of the medium. The second recording stack L1 (12) is present at a position closer to the entrance face (11) than the L0 recording stack (13). A radiation beam transparent spacer layer (9) is sandwiched between the recording stacks (12, 13). In order to achieve compatibility with the DVD-9 ROM standard as far as reflection levels are concerned, the second reflective layer (6) mainly comprises the metal Cu and has a thickness tMLn selected from the range of 8-20 nm and the thickness tRL1 and kλ of the recordable L1 recording layer (4) fulfils the formula tRL1*kλ≦8 nm.
摘要翻译：本发明涉及一种多层光学数据存储介质（10）。介质包括第一衬底（1a），其一侧上具有名为L 0 O的第一记录叠层（13），第二衬底（1b），其一侧存在第二记录包括具有厚度t L RL1的可记录类型L 1记录层（4）的复合折射率n（n）的叠层（12），名称为L 1 <1， λ波长λ-λ*λλλ/λ。第二反射层（6）在距离介质的辐射束（20）入射面（11）最远的一侧存在于L 1记录层（4）附近。第二记录堆叠L 1（12）存在于比L 0记录堆叠（13）更靠近入口面（11）的位置。辐射束透明间隔层（9）夹在记录叠层（12,13）之间。为了实现与DVD-9 ROM标准的兼容性，就反射水平而言，第二反射层（6）主要包括金属Cu，并且具有选自以下范围的厚度t MLn < 8-20nm的记录层，记录层L 1记录层（4）的厚度t RL1和kλλ/ SUB>满足公式t < RL1 * kλλ<= 8nm。

7. 发明申请

US20050226128A1 Multi-stack optical data storage medium and use of such medium 失效
标题翻译：多层光学数据存储介质和这种介质的使用
公开(公告)号：US20050226128A1
公开(公告)日：2005-10-13
申请号：US10513049
申请日：2003-04-11
申请人： Mark Van Schijndel , Guofu Zhou , Johannes Rijpers , Johannes Roosen , Antonius Kuiper
发明人： Mark Van Schijndel , Guofu Zhou , Johannes Rijpers , Johannes Roosen , Antonius Kuiper
IPC分类号： G11B7/24038 , G11B7/257 , G11B7/258 , G11B7/00
CPC分类号： G11B7/257 , G11B7/00454 , G11B7/24038 , G11B7/258 , G11B2007/25706 , G11B2007/25708 , G11B2007/2571 , G11B2007/25711 , G11B2007/25713 , G11B2007/25715
摘要： A description is given of a multi-stack optical data storage medium (20) for rewritable recording using a focused radiation beam (30) entering through an entrance face (16) of the medium (20) during recording. The medium (20) has a substrate (1). Deposited on a side thereof is a first recording stack (2) with a phase-change type recording layer (6). The first recording stack (2) is present at a position most remote from the entrance face (16). At least one further recording stack (3), with a phase-change type recording layer (12) is present closer to the entrance face (16) than the first recording stack (2). A metal reflective layer of Cu, transparent for the radiation beam (30), is present in the further recording stack (3) and has a thickness between 2 and 10 nm. A transparent spacer layer (9) is present between the recording stacks (2, 3). In such a way a metal reflective layer (14) with a high optical transmission combined with sufficient heat sink action is achieved which furthermore has a low chemical reactivity with adjacent layers.
摘要翻译：给出了在记录期间使用聚焦辐射束（30）通过介质（20）的入射面（16）进入可重写记录的多层光学数据存储介质（20）的描述。介质（20）具有基板（1）。沉积在其一侧的是具有相变型记录层（6）的第一记录层（2）。第一记录堆叠（2）存在于最远离入射面（16）的位置。具有相变型记录层（12）的至少一个另外的记录堆叠（3）比第一记录堆叠（2）更靠近入口面（16）。对于辐射束（30）透明的Cu的金属反射层存在于另外的记录叠层（3）中，并且具有2至10nm的厚度。在记录叠层（2,3）之间存在透明间隔层（9）。以这种方式，实现了具有与具有足够散热作用的高光学透射率的金属反射层（14），该金属反射层还具有与相邻层的低化学反应性。

8. 发明申请

US20050243706A1 Rewritable optical data storage medium and use of such a medium 审中-公开
标题翻译：可重写的光学数据存储介质和这种介质的使用
公开(公告)号：US20050243706A1
公开(公告)日：2005-11-03
申请号：US10519067
申请日：2003-06-13
申请人： Martijn Lankhorst , Liesbeth Van Pieterson , Mark Van Schijndel
发明人： Martijn Lankhorst , Liesbeth Van Pieterson , Mark Van Schijndel
IPC分类号： B41M5/26 , G11B7/243 , G11B7/253 , G11B7/2531 , G11B7/2533 , G11B7/2542 , G11B7/257 , G11B7/258 , G11B7/26
CPC分类号： G11B7/258 , G11B7/00454 , G11B7/006 , G11B7/243 , G11B7/2531 , G11B7/2533 , G11B7/2542 , G11B7/257 , G11B2007/2431 , G11B2007/24314 , G11B2007/24316
摘要： A rewritable optical data storage medium (20) for high-speed recording by means of a focused radiation beam (10) is described. The medium (20) comprises a substrate (1) carrying a stack (2) of layers. The stack (2) comprises a first dielectric layer (3), a second dielectric layer (5), and a recording layer (4) of a phase-change material of an alloy comprising Sb and Te. The recording layer (4) is interposed between the first dielectric layer (3) and the second dielectric layer (5). The alloy additionally contains 2-10 at. % of Ga, by which a significant improvement of the maximum data rate during direct overwrite is achieved. By furthermore adding 0.5-4.0% of Ge to the alloy the archival life stability is enhanced.
摘要翻译：描述了用于通过聚焦辐射束（10）进行高速记录的可重写光学数据存储介质（20）。介质（20）包括承载层（2）层的衬底（1）。堆叠（2）包括第一介电层（3），第二介电层（5）和包含Sb和Te的合金的相变材料的记录层（4）。记录层（4）介于第一介电层（3）和第二介质层（5）之间。该合金另外含有2-10英寸 Ga的百分比，通过该Ga获得在直接重写期间的最大数据速率的显着改善。通过进一步向合金中添加0.5-4.0％的Ge，提高了档案寿命的稳定性。

9. 发明申请

US20050227176A1 Rewritable optical storage medium and use of such medium 审中-公开
标题翻译：可重写的光存储介质和使用这种介质
公开(公告)号：US20050227176A1
公开(公告)日：2005-10-13
申请号：US10503425
申请日：2003-01-24
申请人： Guo-Fu Zhou , Johannes Rijpers , Hermanus Borg , Mark Van Schijndel
发明人： Guo-Fu Zhou , Johannes Rijpers , Hermanus Borg , Mark Van Schijndel
IPC分类号： B41M5/26 , G11B7/243 , G11B7/2433 , G11B7/257 , G11B7/258 , G11B7/24
CPC分类号： G11B7/243 , G11B7/00454 , G11B7/257 , G11B7/258 , G11B2007/24312 , G11B2007/24314 , G11B2007/24316
摘要： A description is given of a rewritable optical storage medium (10) comprising a substrate (1), a first dielectric layer (2), a phase-change recording layer (3) on the basis of Ge—Sb—Te, a second dielectric layer (4), and a metal reflective layer (5). The recording layer (3) is an alloy having the composition GexSbyTez, in atom %, wherein 0
摘要翻译：给出了包括基板（1），第一电介质层（2），基于Ge-Sb-Te的相变记录层（3），第二电介质（10）的可重写光学存储介质层（4）和金属反射层（5）。记录层（3）是原子％中具有组成为Ge x Sb 2 Si z z的合金，其中0

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