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1. 发明授权

US5063300A Method and apparatus for determining line centers in a microminiature element 失效
标题翻译：用于确定微细胞元件中的线中心的方法和装置
公开(公告)号：US5063300A
公开(公告)日：1991-11-05
申请号：US546216
申请日：1990-06-28
申请人： Michael Kallmeyer , Dietmar Wagner
发明人： Michael Kallmeyer , Dietmar Wagner
IPC分类号： G01B11/00 , G01B11/02 , H01L21/66
CPC分类号： G01B11/02
摘要： Method and an apparatus for determining line centers in a microminiature element such as on a semiconductor wafer or a mask having linewidths and other spacings below the one micron range. The invention uses, two focussed laser beams which are directed across a line on the element, both beams being illuminated successively with a distance therebetween below the classic resolving power. A portion of the incident beam and a portion of the beam reflected from the line is conducted to respective detectors which respectively generate measurement and reference signals. These signals are treated to eliminate high frequency noise components therein. Subsequently, the filtered measurement and reference signals are digitized and synchronously processed to provide two sine shaped curves whose intersection point corresponds to the center of the scanned line.

2. 发明授权

US4681442A Method for surface testing 失效
标题翻译：表面测试方法
公开(公告)号：US4681442A
公开(公告)日：1987-07-21
申请号：US713077
申请日：1985-03-18
申请人： Dietmar Wagner
发明人： Dietmar Wagner
IPC分类号： G01M11/00 , G01B11/30 , G01N21/88 , G01N21/94 , G01N21/956 , G02B21/10 , G03F7/20
CPC分类号： G03F7/70483 , G01N21/8806 , G02B21/10
摘要： This teaches a method and device for testing of the surface of a transparent object such as a photolithographic mask in which respective recordings with darkfield reflection illumination and darkfield transmission illumination is made, and the intensities measured are compared to form a different image, in which defects are characterized by high local levels of light intensity. Both recordings can be generated in a point-by-point mode if the surface is scanned by a focussed laser beam. In another embodiment, two recordings of the entire surface are digitized, and examined arithmetically for local image differences. Surfaces of opaque bodies can also be examined with the difference image of two darkfield reflection recordings made at different angles of illumination.
摘要翻译：这教导了用于测试诸如光刻掩模的透明物体的表面的方法和装置，其中进行具有暗场反射照明和暗场透射照明的各个记录，并且将所测量的强度进行比较以形成不同的图像，其中缺陷其特点是局部光线强度较高。如果表面被聚焦激光束扫描，则可以逐点模式生成两个记录。在另一个实施例中，整个表面的两个记录被数字化，并且被算术地检查局部图像差异。不透明体的表面也可以用在不同照明角度下进行的两个暗场反射记录的差异图像进行检查。

3. 发明授权

US09933492B2 Method for safely and economically operating an electrolyser 有权
公开(公告)号：US09933492B2
公开(公告)日：2018-04-03
申请号：US14233838
申请日：2012-07-03
申请人： Randolf Kiefer , Ulf-Steffen Baeumer , Dietmar Wagner , Michael Streitboerger
发明人： Randolf Kiefer , Ulf-Steffen Baeumer , Dietmar Wagner , Michael Streitboerger
IPC分类号： G01R31/36 , C25B15/02
CPC分类号： G01R31/3648 , C25B15/02 , G01R31/361 , G01R31/3665
摘要： A method for determining a safe and economic voltage operating range dependent on current density and/or a specific energy consumption operating range of a cell element of an electrolyser. A method for improving voltage results and/or specific energy consumption results, in which the voltage operating range and/or specific energy consumption operating range is determined depending on an operating parameter associated with the cell element.

4. 发明授权

US06122037A Reflective phaseshift lithography system 失效
标题翻译：反光相移光刻系统
公开(公告)号：US06122037A
公开(公告)日：2000-09-19
申请号：US358302
申请日：1999-07-21
申请人： Dietmar Wagner
发明人： Dietmar Wagner
IPC分类号： G03F1/00 , G03F1/26 , G03F7/20 , G03B27/54 , G03B27/42 , G03B27/72
CPC分类号： G03F7/70216 , G03F7/70375 , G03F1/26
摘要： The invention refers to a lithographic device for transferring patterns onto a wafer. The task of the invention is to create a new optical lithographic device with improved resolution and depth of sharpness which will allow semiconductor components to be produced with a higher packing density. According to the invention, an imaging device is used which includes an interferometric device with confocal beam path and a reflection phase shift mask. Based on the achievable resolution and depth of sharpness, the device is suitable for use in DUV step and scan systems for the manufacture of highly integrated semiconductor components. Electron-beam and x-ray lithography only have to be used for smaller grids.
摘要翻译：本发明涉及用于将图案转印到晶片上的光刻设备。本发明的任务是创建一种具有改进的分辨率和锐度深度的新型光学平版印刷设备，这将使得以更高的包装密度生产半导体部件。根据本发明，使用包括具有共焦光束路径和反射相移掩模的干涉仪的成像装置。基于可实现的分辨率和锐度深度，该器件适用于DUV步骤和扫描系统，用于制造高度集成的半导体器件。电子束和x射线光刻只能用于较小的栅格。

5. 发明授权

US07693686B2 Sensor arrangement with a sensor and a signal processing means 有权
标题翻译：传感器布置与传感器和信号处理装置
公开(公告)号：US07693686B2
公开(公告)日：2010-04-06
申请号：US11786664
申请日：2007-04-12
申请人： Dietmar Wagner , Armin Seitz
发明人： Dietmar Wagner , Armin Seitz
IPC分类号： G01D5/00 , G06F17/00
CPC分类号： G01D3/02 , G01D18/006 , G01D18/008
摘要： A sensor arrangement comprises a sensor responsive to a measurement parameter as a sensor signal and a signal processing means for the sensor signal, the signal processing means having a switching stage for comparison of the sensor signal with a comparison or switching value and for producing a switching signal in a manner dependent on the comparison. A functional stage is present, which constitutes one function of the sensor signal, is comprised in the signal processing means, such function including a time derivative of the sensor signal or a sensor signal value modified by an additive factor, and the output signal of the functional stage forming the comparison of switching value for the switching stage.
摘要翻译：传感器装置包括响应于作为传感器信号的测量参数的传感器和用于传感器信号的信号处理装置，信号处理装置具有用于将传感器信号与比较或切换值进行比较并用于产生开关的切换级信号以取决于比较的方式。存在功能级，其构成传感器信号的一个功能，包括在信号处理装置中，该功能包括传感器信号的时间导数或由加法因子修改的传感器信号值，以及输出信号功能级形成开关级开关值的比较。

6. 发明申请

US20070279118A1 Sensor arrangement with a sensor and a signal processing means 有权
标题翻译：传感器布置与传感器和信号处理装置
公开(公告)号：US20070279118A1
公开(公告)日：2007-12-06
申请号：US11786664
申请日：2007-04-12
申请人： Dietmar Wagner , Armin Seitz
发明人： Dietmar Wagner , Armin Seitz
IPC分类号： G06F7/64
CPC分类号： G01D3/02 , G01D18/006 , G01D18/008
摘要： A sensor arrangement comprises a sensor responsive to a measurement parameter as a sensor signal and a signal processing means for the sensor signal, said means having a switching stage for comparison of the sensor signal with a comparison or switching value and for producing a switching signal in a manner dependent on the comparison. A functional stage is present, which constitutes one function of the sensor signal, is comprised in the signal processing means, such function including a time derivative of the sensor signal or a sensor signal value modified by an additive factor, and the output signal of the functional stage forming the comparison of switching value for the switching stage. As a result simply processed binary signals are produced which may comprise not only functions in a manner dependent on the sensor signal but also functions derived therefrom and additional parameters.
摘要翻译：传感器装置包括响应于作为传感器信号的测量参数的传感器和用于传感器信号的信号处理装置，所述装置具有切换级，用于将传感器信号与比较或切换值进行比较并产生开关信号取决于比较的方式。存在功能级，其构成传感器信号的一个功能，包括在信号处理装置中，该功能包括传感器信号的时间导数或由加法因子修改的传感器信号值，以及输出信号功能级形成开关级开关值的比较。结果，产生简单处理的二进制信号，其不仅可以包括取决于传感器信号的方式的功能，而且还包括从其导出的功能和附加参数。

7. 发明授权

US06937160B2 Sensor arrangement for application to at least one data item 失效
标题翻译：用于应用于至少一个数据项的传感器布置
公开(公告)号：US06937160B2
公开(公告)日：2005-08-30
申请号：US10004099
申请日：2001-10-31
申请人： Dietmar Wagner , Ralf Medow
发明人： Dietmar Wagner , Ralf Medow
IPC分类号： G01D18/00 , G08C19/22 , H04Q9/00
CPC分类号： G01D18/006 , G01D18/008
摘要： A sensor arrangement for application to at least one data item, and comprising at least one sensitive element connected by way of sensor electronic circuitry having a storage arrangement with an input/output port. This input/output port of the sensor arrangement is able to be connected by a line arrangement having at least three lines, with an external electrical or electronic device with an external electrical device, two lines being adapted for use as power supply lines and at least one third line being adapted for the transmission of sensor signals to the electrical device. By way of an external parametrization means, able to be connected with the at least one sensor signal line, parametrization signals may be supplied to the sensor electronic circuitry in order to parametrize the sensor arrangement by the storage of parametrization values. Accordingly sensor arrangement may be parametrized or re-parametrized fitting without any additional line or wireless transmission path being necessary.
摘要翻译：一种用于应用于至少一个数据项的传感器装置，并且包括通过具有带有输入/输出端口的存储装置的传感器电子电路连接的至少一个敏感元件。传感器装置的该输入/输出端口能够通过具有至少三条线路的线路布置来连接，外部电气或电子设备具有外部电气设备，两条线适于用作电源线，并且至少三分之一线适于将传感器信号传输到电气设备。通过能够与至少一个传感器信号线连接的外部参数化装置，可以将参数化信号提供给传感器电子电路，以便通过存储参数值参数化传感器装置。因此，传感器布置可以被参数化或重新参数拟合，而不需要任何额外的线路或无线传输路径。

8. 发明申请

US20150127279A1 METHOD FOR SAFELY AND ECONOMICALLY OPERATING AN ELECTROLYSER 有权
标题翻译：用于安全和经济地操作电解质的方法
公开(公告)号：US20150127279A1
公开(公告)日：2015-05-07
申请号：US14233838
申请日：2012-07-03
申请人： Randolf Kiefer , Ulf-Steffen Baeumer , Dietmar Wagner , Michael Streitboerger
发明人： Randolf Kiefer , Ulf-Steffen Baeumer , Dietmar Wagner , Michael Streitboerger
IPC分类号： G01R31/36
CPC分类号： G01R31/3648 , C25B15/02 , G01R31/361 , G01R31/3665
摘要： A method for determining a safe and economic voltage operating range dependent on current density and/or a specific energy consumption operating range of a cell element of an electrolyser. A method for improving voltage results and/or specific energy consumption results, in which the voltage operating range and/or specific energy consumption operating range is determined depending on an operating parameter associated with the cell element.
摘要翻译：一种用于根据电解槽的电池元件的电流密度和/或特定能量消耗工作范围来确定安全和经济的电压工作范围的方法。一种用于改善电压结果和/或比能量消耗结果的方法，其中电压工作范围和/或比能量消耗操作范围根据与电池元件相关联的操作参数确定。

9. 发明授权

US06429548B1 Pressure switch 失效
标题翻译：压力开关
公开(公告)号：US06429548B1
公开(公告)日：2002-08-06
申请号：US09505035
申请日：2000-02-16
申请人： Dietmar Wagner , Jochen Franz
发明人： Dietmar Wagner , Jochen Franz
IPC分类号： H01H3524
CPC分类号： G01L19/12 , F15B11/028 , Y10T307/779
摘要： A pressure switch is described with a pressure connection (11), with an electrical pressure sensor (19) to generate a pressure-dependent electrical signal, with an operator-device and/or an adjusting device (16-18) to input at least one pressure switch threshold and with at least one electrical switch output (16-18) [sic; 13,14]. The pressure switch can be adjusted by operation of the operator device (16-18) in such a manner that the electrical signal corresponding to the instantaneously applied pressure (p) is saved as the first saved pressure value (S1) and the electrical signal corresponding to a pressure (p) applied temporally thereafter, is saved as a second saved pressure value (S2), where these two saved pressure values (S1, S2) define the pressure switching threshold(s) in the operating mode. Thus, the saved pressure values can be specified very easily and in a variable manner and saved, and a great variability of operating modes is possible.
摘要翻译：压力开关用压力连接（11）用电压力传感器（19）描述，以产生与压力相关的电信号，操作者装置和/或调节装置（16-18）至少输入一个压力开关阈值和至少一个电气开关输出（16-18）[sic; 13,14]。可以通过操作装置（16-18）的操作来调节压力开关，使得对应于瞬时施加的压力（p）的电信号被保存为第一保存的压力值（S1），并且电信号对应在此之后暂时施加的压力（p）被保存为第二保存的压力值（S2），其中这两个保存的压力值（S1，S2）定义了操作模式中的压力切换阈值。因此，保存的压力值可以非常容易地且以可变的方式被指定并被保存，并且操作模式的很大变化是可能的。

10. 发明授权

US4291938A Apparatus for dark field illumination 失效
标题翻译：暗场照明装置
公开(公告)号：US4291938A
公开(公告)日：1981-09-29
申请号：US99052
申请日：1979-11-30
申请人： Dietmar Wagner
发明人： Dietmar Wagner
IPC分类号： G02B21/06 , G02B21/10 , G02B21/12 , G02B21/26
CPC分类号： G02B21/10
摘要： Apparatus for dark field illumination consisting of light conducting fibers having end faces arranged within an annular region which is coaxial with the optical axis of an optical assembly, such as a microscope objective. The annular region is within the numerical aperture of the optical assembly and is positioned in the rear focal plane thereof so that light emitted by the fibers becomes dark field illumination for the object plane of the optical assembly when viewed through the central aperture of the annular region. Illumination of the object plane through the central aperture also dark field illuminates the object plane when viewed through the fibers. This is true even when the object plane is illuminated in only a small area by forcussing an illumination source through the central aperture and onto the object plane.
摘要翻译：用于暗场照明的装置，其由导光纤维组成，其具有布置在与光学组件的光轴（例如显微镜物镜）同轴的环形区域内的端面。环形区域在光学组件的数值孔内，并且位于其后焦平面中，使得当通过环形区域的中心孔观察时，由光纤发射的光成为光学组件的物平面的暗场照明。物体平面通过中心孔的照明也通过光纤观察物体平面。即使通过将照明源通过中心孔和对物平面进行击打，物体平面仅在较小的区域中被照亮，这一点也是如此。

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