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    • 5. 发明授权
    • Adjusting the germanium concentration of a semiconductor layer for equal thermal expansion for a hetero-junction bipolar transistor device
    • 调整用于异质结双极晶体管器件的相同热膨胀的半导体层的锗浓度
    • US07060582B2
    • 2006-06-13
    • US10480061
    • 2002-06-04
    • Takeyoshi KoumotoHideo Yamagata
    • Takeyoshi KoumotoHideo Yamagata
    • H01L21/331
    • H01L29/66242H01L29/7378Y10S438/933Y10S438/938
    • The present invention relates to a semiconductor layer applicable to a hetero-junction bipolar transistor, a forming method thereof, and a semiconductor device and a manufacturing method thereof, for example. The semiconductor layer and the forming method thereof according to the present invention includes a first SiGe film or SiGeC film containing Ge of which the concentration become equal to a thermal expansion coefficient of silicon oxide and a second SiGe film or SiGeC film formed on the first film. In a semiconductor device according to the present invention and a manufacturing method thereof, first and second layers are laminated on an oxide film having an opening, and the first layer has the substantially same thermal expansion coefficient as that of the oxide film and has a thermal expansion coefficient different from that of the second layer. Thus, a stress that is caused by a difference between the thermal expansion coefficients becomes difficult to occur in the laminated film, and hence the occurrence of misfit dislocation can be suppressed. Thus, the present invention is suitable as the application to a hetero-junction bipolar transistor.
    • 本发明涉及例如可应用于异质结双极晶体管的半导体层及其形成方法以及半导体器件及其制造方法。 根据本发明的半导体层及其形成方法包括含有Ge的第一SiGe膜或SiGeC膜,其浓度变得等于氧化硅的热膨胀系数,以及形成在第一膜上的第二SiGe膜或SiGeC膜 。 在根据本发明的半导体器件及其制造方法中,第一层和第二层层叠在具有开口的氧化物膜上,并且第一层具有与氧化膜大致相同的热膨胀系数,并且具有热 膨胀系数与第二层不同。 因此,难以在层压膜中产生由热膨胀系数之差引起的应力,因此能够抑制失配位错的发生。 因此,本发明适用于异质结双极晶体管。
    • 7. 发明授权
    • Process for expressing genes by Bacillus brevis
    • 用短芽孢杆菌表达基因的方法
    • US4994380A
    • 1991-02-19
    • US928125
    • 1986-11-07
    • Shigezo UdakaNorihiro TsukagoshiHideo Yamagata
    • Shigezo UdakaNorihiro TsukagoshiHideo Yamagata
    • C12N15/09C12N1/21C12N9/28C12N15/00C12N15/75C12P21/00C12P21/02C12R1/08
    • C12N9/2417C12N15/75Y10S435/833
    • An improved vector for expression in Bacillus brevis having:(1) a nucleotide sequence (a) represented by a general formula MNOACP;(2) a nucleotide sequence (b) located in the downstream of the nucleotide sequence (a) and represented by a general formula QRSWXY;(3) a nucleotide sequence (c) located in the downstream of the nucleotide sequence (b) and acting as a binding site to ribosome in the cell of Bacillus brevis;(4) a nucleotide sequence (d) located in the downstream of the nucleotide sequence (c) and acting as a translation initiation condon in the cell of Bacillus brevis; and(5) a gene directly connected with the nucleotide sequence (d) and to express in the cell of Bacillus brevis;wherein M represents G or T; N represents C, T or A; O represents A, C or T; P represents T or G; Q represents T or A; R represents T or A; S represents T, C or A; W represents A or G; X represents A or C; and Y represents T or G; and furthermore, wherein A represents adenine, C cytosine, G guanine and T thymine.
    • 一种用于在短芽孢杆菌中表达的改良载体,其具有:(1)由通式MNOACP表示的核苷酸序列(a) (2)位于核苷酸序列(a)的下游并由通式QRSWXY表示的核苷酸序列(b); (3)位于核苷酸序列(b)下游的核苷酸序列(c),并且作为芽孢杆菌细胞中核糖体的结合位点; (4)位于核苷酸序列(c)下游的核苷酸序列(d),并在短芽孢杆菌细胞中作为翻译起始细菌; 和(5)与核苷酸序列(d)直接连接并在短芽孢杆菌细胞中表达的基因; 其中M表示G或T; N表示C,T或A; O表示A,C或T; P表示T或G; Q表示T或A; R表示T或A; S表示T,C或A; W代表A或G; X表示A或C; Y表示T或G; 此外,其中A表示腺嘌呤,C胞嘧啶,G鸟嘌呤和T胸腺嘧啶。
    • 10. 发明申请
    • Semiconductor layer and forming method thereof, and semiconductor device and manufacturing method thereof technical field
    • 半导体层及其形成方法,半导体器件及其制造方法技术领域
    • US20060163625A1
    • 2006-07-27
    • US11341578
    • 2006-01-26
    • Takeyoshi KoumotoHideo Yamagata
    • Takeyoshi KoumotoHideo Yamagata
    • H01L29/76H01L21/331
    • H01L29/66242H01L29/7378Y10S438/933Y10S438/938
    • The present invention relates to a semiconductor layer applicable to a hetero-junction bipolar transistor, a forming method thereof, and a semiconductor device and a manufacturing method thereof, for example. The semiconductor layer and the forming method thereof according to the present invention includes a first SiGe film or SiGeC film containing Ge of which the concentration become equal to a thermal expansion coefficient of silicon oxide and a second SiGe film or SiGeC film formed on the first film. In a semiconductor device according to the present invention and a manufacturing method thereof, first and second layers are laminated on an oxide film having an opening, and the first layer has the substantially same thermal expansion coefficient as that of the oxide film and has a thermal expansion coefficient different from that of the second layer. Thus, a stress that is caused by a difference between the thermal expansion coefficients becomes difficult to occur in the laminated film, and hence the occurrence of misfit dislocation can be suppressed. Thus, the present invention is suitable as the application to a hetero-junction bipolar transistor.
    • 本发明涉及例如可应用于异质结双极晶体管的半导体层及其形成方法以及半导体器件及其制造方法。 根据本发明的半导体层及其形成方法包括含有Ge的第一SiGe膜或SiGeC膜,其浓度变得等于氧化硅的热膨胀系数,以及形成在第一膜上的第二SiGe膜或SiGeC膜 。 在根据本发明的半导体器件及其制造方法中,第一层和第二层层叠在具有开口的氧化物膜上,并且第一层具有与氧化膜大致相同的热膨胀系数,并且具有热 膨胀系数与第二层不同。 因此,难以在层压膜中产生由热膨胀系数之差引起的应力,因此能够抑制失配位错的发生。 因此,本发明适用于异质结双极晶体管。