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    • 5. 发明授权
    • Substrate processing system managing apparatus information of substrate processing apparatus
    • 基板处理系统管理基板处理装置的装置信息
    • US07460923B2
    • 2008-12-02
    • US11368586
    • 2006-03-06
    • Toru KitamotoKenji KameiHidekazu InoueTetsuya Hamada
    • Toru KitamotoKenji KameiHidekazu InoueTetsuya Hamada
    • G06F19/00
    • H01L21/67276G05B19/4184G05B23/0264G05B2219/31337G05B2219/31365G05B2219/31402G05B2219/32207Y02P90/14Y02P90/18
    • A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.
    • 基板处理系统包括分别连接到网络的基板处理装置,信息存储服务器和支持计算机。 当基板处理装置发生故障时,报警处理部分提取必要的相关日志文件并将其存储在信息存储服务器的硬盘中。 故障信息生成部生成作为故障信息数据库而最终存储在信息存储服务器的硬盘中的故障信息。 设备信息解除部分使相关日志文件和故障信息数据库从位于远程位置的支持计算机可读。 因此,可以立即读取相关日志文件和故障信息数据库。 换句话说,提供了当基板处理装置导致故障时,从远程位置立即读取操作信息的基板处理系统。