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1. 发明申请

US20080223132A1 Vibration Piezoelectric Acceleration Sensor 失效
标题翻译：振动压电加速度传感器
公开(公告)号：US20080223132A1
公开(公告)日：2008-09-18
申请号：US10585618
申请日：2005-02-14
申请人： Jiro Terada , Masaya Nakatani , Takami Ishida
发明人： Jiro Terada , Masaya Nakatani , Takami Ishida
IPC分类号： G01P15/09
CPC分类号： G01P15/09 , G01P15/097 , G01P15/18 , G01P2015/084
摘要： A vibration piezoelectric acceleration sensor including a pair of diaphragms linearly and oppositely disposed on a frame, a support body supporting the diaphragm, and a holding part holding the support body slidably in a linear direction, and another pair of diaphragms disposed linearly and oppositely crossing the pair of diaphragms detecting acceleration in two axes, i.e. X and Y directions. The diaphragms are extended and retracted by the acceleration transmitted to the support body through the holding part, changing a natural oscillation frequency. Accordingly, a high change ratio of resonance frequency can be provided with the detection of the acceleration, and the acceleration in two axes directions can be detected without being affected by a change in temperature.
摘要翻译：一种振动压电加速度传感器，包括线性地并相对地设置在框架上的一对隔膜，支撑隔膜的支撑体以及沿直线方向可滑动地保持支撑体的保持部以及与线状地相反地交叉的另一对隔膜一对隔膜检测两轴的加速度，即X和Y方向。通过保持部分传递到支撑体的加速度使膜片伸长和缩回，改变固有的振荡频率。因此，可以通过检测加速度来提供高谐振频率的变化率，并且可以在不受温度变化的影响的情况下检测两个轴向的加速度。

2. 发明授权

US07168321B2 Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith 有权
标题翻译：振动式压电加速度传感器元件及其振动型压电加速度传感器
公开(公告)号：US07168321B2
公开(公告)日：2007-01-30
申请号：US11182098
申请日：2005-07-15
申请人： Jiro Terada , Takami Ishida , Masaya Nakatani , Masahiro Yasumi
发明人： Jiro Terada , Takami Ishida , Masaya Nakatani , Masahiro Yasumi
IPC分类号： G01P15/09
CPC分类号： G01P15/0802 , B81B3/0051 , B81B2201/0235 , B81B2203/0127 , G01P15/097
摘要： The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.
摘要翻译：振动型压电加速度传感器元件包括框架; 以及在框架中提供的隔膜，支撑和保持部件。隔膜包括底电极层，形成在底电极层上的压电薄膜层和形成在压电薄膜层上的顶电极层。隔膜的第一端连接到框架。支架保持隔膜的第二端。保持部件保持支撑件，使得支撑件仅在通过隔膜的第一端和第二端的方向上往复运动。

3. 发明授权

US07587941B2 Vibration piezoelectric acceleration sensor 失效
标题翻译：振动压电加速度传感器
公开(公告)号：US07587941B2
公开(公告)日：2009-09-15
申请号：US10585618
申请日：2005-02-14
申请人： Jiro Terada , Masaya Nakatani , Takami Ishida
发明人： Jiro Terada , Masaya Nakatani , Takami Ishida
IPC分类号： G01P15/10
CPC分类号： G01P15/09 , G01P15/097 , G01P15/18 , G01P2015/084
摘要： A vibration piezoelectric acceleration sensor including a pair of beam shaped members linearly and oppositely disposed on a frame, a support body supporting the beam shaped member, and a holding part holding the support body moveably in a linear direction, and another pair of beam shaped members disposed linearly and oppositely crossing the pair of beam shaped members detecting acceleration in two axes, i.e. X and Y directions. The beam shaped members are extended and retracted by the acceleration transmitted to the support body through the holding part, changing a natural oscillation frequency. Accordingly, a high change ratio of resonance frequency can be provided with the detection of the acceleration, and the acceleration in the direction of two axes can be detected without being affected by a change in temperature.
摘要翻译：一种振动压电加速度传感器，包括一对直线相对地设置在框架上的梁状构件，支撑梁状构件的支撑体和沿直线方向可动地保持支撑体的保持部，以及另一对梁状构件线性地和相对地交叉的一对梁形构件，检测两个轴的加速度，即X和Y方向。梁状构件通过保持部分传递到支撑体的加速度而延伸和缩回，从而改变固有的振荡频率。因此，可以通过加速度的检测来提供高谐振频率的变化率，并且可以检测两轴方向的加速度，而不受温度变化的影响。

4. 发明申请

US20060236763A1 Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith 有权
标题翻译：振动式压电加速度传感器元件及其振动型压电加速度传感器
公开(公告)号：US20060236763A1
公开(公告)日：2006-10-26
申请号：US11182098
申请日：2005-07-15
申请人： Jiro Terada , Takami Ishida , Masaya Nakatani , Masahiro Yasumi
发明人： Jiro Terada , Takami Ishida , Masaya Nakatani , Masahiro Yasumi
IPC分类号： G01P15/09
CPC分类号： G01P15/0802 , B81B3/0051 , B81B2201/0235 , B81B2203/0127 , G01P15/097
摘要： The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.
摘要翻译：振动型压电加速度传感器元件包括框架; 以及在框架中提供的隔膜，支撑和保持部件。隔膜包括底电极层，形成在底电极层上的压电薄膜层和形成在压电薄膜层上的顶电极层。隔膜的第一端连接到框架。支架保持隔膜的第二端。保持部件保持支撑件，使得支撑件仅在通过隔膜的第一端和第二端的方向上往复运动。

5. 发明申请

US20120009097A1 FLOW PATH DEVICE 审中-公开
标题翻译：流道设备
公开(公告)号：US20120009097A1
公开(公告)日：2012-01-12
申请号：US13238128
申请日：2011-09-21
申请人： Takeki YAMAMOTO , Masaya Nakatani , Makoto Takahashi , Takami Ishida
发明人： Takeki YAMAMOTO , Masaya Nakatani , Makoto Takahashi , Takami Ishida
IPC分类号： B01L99/00
CPC分类号： B01L3/502746 , B01J2219/00286 , B01J2219/00509 , B01J2219/00511 , B01J2219/00605 , B01J2219/00612 , B01L3/502707 , B01L3/502753 , B01L2300/0681 , B01L2400/086 , B81B1/008 , B81B2201/051 , B81B2203/0338 , B81B2203/0361 , B81B2203/0392 , B81C1/00206
摘要： A flow path device includes a substrate having a trench and columns extending from a bottom of the trench. The trench is configured to have a fluid flowing therein. Each of columns has a side surface having grooves formed therein. The grooves have an annular shape or an arcuate shape. This flow path device reduces damage to the columns, and has a high reliability.
摘要翻译：流路装置包括具有从沟槽的底部延伸的沟槽和列的衬底。沟槽被构造成具有在其中流动的流体。每列具有形成在其中的槽的侧表面。凹槽具有环形或弓形。该流路装置减少对柱的损伤，并且具有高可靠性。

6. 发明申请

US20110283796A1 INERTIAL FORCE SENSOR 有权
标题翻译：惯性力传感器
公开(公告)号：US20110283796A1
公开(公告)日：2011-11-24
申请号：US13195530
申请日：2011-08-01
申请人： Satoshi Ohuchi , Hiroyuki Aizawa , Jiro Terada , Takami Ishida , Ichirou Satou , Hideo Ohkoshi , Yohei Ashimori
发明人： Satoshi Ohuchi , Hiroyuki Aizawa , Jiro Terada , Takami Ishida , Ichirou Satou , Hideo Ohkoshi , Yohei Ashimori
IPC分类号： G01P15/08
CPC分类号： G01C19/5642 , G01C19/56 , G01C19/5607 , G01C19/574 , G01P15/097 , G01P15/18
摘要： An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.
摘要翻译：惯性力传感器包括检测惯性力的检测装置，所述检测装置具有第一正交臂和支撑部，所述第一正交臂具有大致正交的方向固定的第一臂和第二臂，所述支撑部支持第一臂。第二臂具有折叠部分。在该结构中，提供了一种实现多个不同惯性力的检测和多个检测轴的惯性力检测的小型惯性力传感器。

7. 发明授权

US08434362B2 Inertial force sensor 有权
公开(公告)号：US08434362B2
公开(公告)日：2013-05-07
申请号：US13195530
申请日：2011-08-01
申请人： Satoshi Ohuchi , Hiroyuki Aizawa , Jiro Terada , Takami Ishida , Ichirou Satou , Hideo Ohkoshi , Yohei Ashimori
发明人： Satoshi Ohuchi , Hiroyuki Aizawa , Jiro Terada , Takami Ishida , Ichirou Satou , Hideo Ohkoshi , Yohei Ashimori
IPC分类号： G01C19/56
CPC分类号： G01C19/5642 , G01C19/56 , G01C19/5607 , G01C19/574 , G01P15/097 , G01P15/18
摘要： An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

8. 发明申请

US20090064783A1 INERTIAL FORCE SENSOR 审中-公开
标题翻译：惯性力传感器
公开(公告)号：US20090064783A1
公开(公告)日：2009-03-12
申请号：US12160237
申请日：2007-01-22
申请人： Satoshi Ohuchi , Hiroyuki Aizawa , Jiro Terada , Takami Ishida , Ichirou Satou , Hideo Ohkoshi , Yohei Ashimori
发明人： Satoshi Ohuchi , Hiroyuki Aizawa , Jiro Terada , Takami Ishida , Ichirou Satou , Hideo Ohkoshi , Yohei Ashimori
IPC分类号： G01P15/097
CPC分类号： G01C19/5642 , G01C19/56 , G01C19/5607 , G01C19/574 , G01P15/097 , G01P15/18
摘要： An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.
摘要翻译：惯性力传感器包括检测惯性力的检测装置，所述检测装置具有第一正交臂和支撑部，所述第一正交臂具有大致正交的方向固定的第一臂和第二臂，所述支撑部支持第一臂。第二臂具有折叠部分。在该结构中，提供了一种实现多个不同惯性力的检测和多个检测轴的惯性力检测的小型惯性力传感器。

9. 发明申请

US20130307094A1 SENSOR 有权
标题翻译：传感器
公开(公告)号：US20130307094A1
公开(公告)日：2013-11-21
申请号：US13983770
申请日：2012-03-05
申请人： Shigehiro Yoshiuchi , Takashi Imanaka , Takami Ishida , Satoshi Ohuchi , Hideo Ohkoshi , Katsuya Morinaka , Daisuke Nakamura , Hiroyuki Nakamura
发明人： Shigehiro Yoshiuchi , Takashi Imanaka , Takami Ishida , Satoshi Ohuchi , Hideo Ohkoshi , Katsuya Morinaka , Daisuke Nakamura , Hiroyuki Nakamura
IPC分类号： H01L29/84
CPC分类号： H01L29/84 , G01C19/5783 , G01P1/023 , H01L41/08
摘要： A sensor includes a circuit board, a wiring connection layer, a sensor element, and a conductive post. The circuit board has a first electrode. The wiring connection layer has second and third electrodes. The second electrode is connected to the first electrode. The sensor element has a fourth electrode. The conductive post connects the third electrode electrically with the fourth electrode. This sensor can be driven efficiently.
摘要翻译：传感器包括电路板，布线连接层，传感器元件和导电柱。电路板具有第一电极。布线连接层具有第二和第三电极。第二电极连接到第一电极。传感器元件具有第四电极。导电柱将第三电极与第四电极电连接。该传感器可以有效地驱动。

10. 发明授权

US09231119B2 Sensor 有权
标题翻译：传感器
公开(公告)号：US09231119B2
公开(公告)日：2016-01-05
申请号：US13983770
申请日：2012-03-05
申请人： Shigehiro Yoshiuchi , Takashi Imanaka , Takami Ishida , Satoshi Ohuchi , Hideo Ohkoshi , Katsuya Morinaka , Daisuke Nakamura , Hiroyuki Nakamura
发明人： Shigehiro Yoshiuchi , Takashi Imanaka , Takami Ishida , Satoshi Ohuchi , Hideo Ohkoshi , Katsuya Morinaka , Daisuke Nakamura , Hiroyuki Nakamura
IPC分类号： H01L29/84 , G01C19/5783 , G01P1/02 , H01L41/08
CPC分类号： H01L29/84 , G01C19/5783 , G01P1/023 , H01L41/08
摘要： A sensor includes a circuit board, a wiring connection layer, a sensor element, and a conductive post. The circuit board has a first electrode. The wiring connection layer has second and third electrodes. The second electrode is connected to the first electrode. The sensor element has a fourth electrode. The conductive post connects the third electrode electrically with the fourth electrode. This sensor can be driven efficiently.
摘要翻译：传感器包括电路板，布线连接层，传感器元件和导电柱。电路板具有第一电极。布线连接层具有第二和第三电极。第二电极连接到第一电极。传感器元件具有第四电极。导电柱将第三电极与第四电极电连接。该传感器可以有效地驱动。

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