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    • 1. 发明授权
    • Photoresist stripper composition for semiconductor manufacturing
    • 用于半导体制造的光刻胶剥离剂组合物
    • US07951765B2
    • 2011-05-31
    • US12063745
    • 2006-08-05
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong Baek
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong Baek
    • C11D7/50
    • G03F7/425G03F7/426
    • The present invention relates to a photoresist stripper composition for removing the photoresist in the manufacturing process of the semiconductor device. More particularly, the photoresist stripper composition comprises 3-20 wt % of hydrazine hydrate or amine compound; 20˜40 wt % of polar solvent; 0.01-3 wt % of corrosion inhibitor selected from the group consisting of imidazoline derivative, sulfide derivative, sulfoxide derivative, aromatic compound or aromatic compound with hydroxyl group; 0.01-5 wt % of monoalcohol compound of C2-C10; and 40-70 wt % of deionized water. The photoresist stripper composition for manufacturing the semiconductor can remove the photoresist film thermoset by hard bake, dry etching, ashing or ion implantation and denatured by the metallic by-product etched from the bottom metallic film in said process at low temperature easily and quickly, and minimize the corrosion of the bottom metallic wiring in the removing process of the photoresist.
    • 本发明涉及在半导体器件的制造过程中去除光致抗蚀剂的光致抗蚀剂剥离剂组合物。 更具体地,光致抗蚀剂剥离剂组合物包含3-20重量%的水合肼或胺化合物; 20〜40重量%的极性溶剂; 0.01-3重量%的选自咪唑啉衍生物,硫化物衍生物,亚砜衍生物,芳族化合物或具有羟基的芳族化合物组成的组中的腐蚀抑制剂; 0.01-5重量%的C2-C10的一元醇化合物; 和40-70重量%的去离子水。 用于制造半导体的光致抗蚀剂剥离剂组合物可以通过硬烘烤,干蚀刻,灰化或离子注入去除光致抗蚀剂膜热固性,并且在低温下容易且快速地在所述工艺中从底部金属膜蚀刻的金属副产物变性, 在光致抗蚀剂的去除过程中最小化底部金属布线的腐蚀。
    • 2. 发明申请
    • Photoresist Stripper Composition for Semiconductor Manufacturing
    • 半导体制造用光阻剥离剂组合物
    • US20090312216A1
    • 2009-12-17
    • US12063745
    • 2006-08-05
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong BaekWoong HahnSang Won LeeGun-Woong Lee
    • Hyun Tak KimSeong Hwan ParkJung Hun LimSung Bae KimChan Jin JeongKui Jong BaekWoong HahnSang Won LeeGun-Woong Lee
    • G03F7/42
    • G03F7/425G03F7/426
    • The present invention relates to a photoresist stripper composition for removing the photoresist in the manufacturing process of the semiconductor device. More particularly, the photoresist stripper composition comprises 3-20 wt % of hydrazine hydrate or amine compound; 20˜40 wt % of polar solvent; 0.01-3 wt % of corrosion inhibitor selected from the group consisting of imidazoline derivative, sulfide derivative, sulfoxide derivative, aromatic compound or aromatic compound with hydroxyl group; 0.01-5 wt % of monoalcohol compound of C2-C10; and 40-70 wt % of deionized water. The photoresist stripper composition for manufacturing the semiconductor can remove the photoresist film thermoset by hard bake, dry etching, ashing or ion implantation and denatured by the metallic by-product etched from the bottom metallic film in said process at low temperature easily and quickly, and minimize the corrosion of the bottom metallic wiring in the removing process of the photoresist.
    • 本发明涉及在半导体器件的制造过程中去除光致抗蚀剂的光致抗蚀剂剥离剂组合物。 更具体地,光刻胶剥离剂组合物包含3-20重量%的水合肼或胺化合物; 20〜40wt%极性溶剂; 0.01-3重量%的选自咪唑啉衍生物,硫化物衍生物,亚砜衍生物,芳族化合物或具有羟基的芳族化合物组成的组中的腐蚀抑制剂; 0.01-5重量%的C2-C10的一元醇化合物; 和40-70重量%的去离子水。 用于制造半导体的光致抗蚀剂剥离剂组合物可以通过硬烘烤,干蚀刻,灰化或离子注入去除光致抗蚀剂膜热固性,并且在低温下容易且快速地在所述工艺中从底部金属膜蚀刻的金属副产物变性, 在光致抗蚀剂的去除过程中最小化底部金属布线的腐蚀。
    • 3. 发明授权
    • Field effect transistor having graphene channel layer
    • 具有石墨烯通道层的场效应晶体管
    • US08247806B2
    • 2012-08-21
    • US12649321
    • 2009-12-29
    • Byung-Gyu ChaeHyun Tak Kim
    • Byung-Gyu ChaeHyun Tak Kim
    • H01L51/30
    • H01L29/1606H01L29/0673H01L29/0895H01L29/778H01L29/78684H01L29/78696H01L51/0541
    • Provided is a field effect transistor including a graphene channel layer, and capable of increasing an on/off ratio of an operating current by using the graphene of the graphene channel layer. The field effect transistor includes: a substrate; the graphene channel layer which is disposed on a portion of the substrate and includes graphene; a first electrode disposed on a first region of the graphene channel layer and a portion of the substrate; an interlayer disposed on a second region of the graphene channel layer, which is apart from the first region, and a portion of the substrate; a second electrode disposed on the interlayer; a gate insulation layer disposed on a portion of the graphene channel layer, the first electrode, and the second electrode; and a gate electrode disposed on a portion of the gate insulation layer.
    • 提供了包括石墨烯通道层的场效应晶体管,并且能够通过使用石墨烯沟道层的石墨烯来提高工作电流的导通/截止比。 场效应晶体管包括:衬底; 所述石墨烯通道层设置在所述基板的一部分上并且包括石墨烯; 设置在所述石墨烯通道层的第一区域上的第一电极和所述基板的一部分; 设置在离开第一区域的石墨烯通道层的第二区域上的中间层和基板的一部分; 设置在所述中间层上的第二电极; 设置在石墨烯通道层,第一电极和第二电极的一部分上的栅极绝缘层; 以及设置在栅极绝缘层的一部分上的栅电极。
    • 8. 发明申请
    • THERMISTOR WITH 3 TERMINALS, THERMISTOR-TRANSISTOR, CIRCUIT FOR CONTROLLING HEAT OF POWER TRANSISTOR USING THE THERMISTOR-TRANSISTOR, AND POWER SYSTEM INCLUDING THE CIRCUIT
    • 具有3个端子的热敏电阻器,热敏电阻器,用于使用热敏电阻器控制功率晶体管的电路的电路,以及包括电路的电力系统
    • US20100122976A1
    • 2010-05-20
    • US12608054
    • 2009-10-29
    • Bongjun KIMGiwan SeoHyun Tak Kim
    • Bongjun KIMGiwan SeoHyun Tak Kim
    • H05B1/00H01L29/66
    • H01C7/008H01C7/18H01L27/0248H03K17/08H03K2017/0806
    • Provided are a thermistor with 3 terminals, a thermistor-transistor including the thermistor, a circuit for controlling heat of a power transistor using the thermistor-transistor, and a power system including the circuit. The circuit includes: a thermistor-transistor which comprises a thermistor having a resistance decreasing with an increase in temperature and a control transistor connected to the thermistor; and at least one power transistor which is connected to a driving device to control a supply of power to the driving device, wherein the thermistor-transistor is adhered to one of a surface and a heat-emitting part of the at least one power transistor and is connected to one of a base, a gate, a collector, and a drain of the at least one power transistor to decrease or block a current flowing in the at least one power transistor when the temperature of the at least one power transistor rises, so as to prevent the power transistor from heating up.
    • 本发明提供一种具有3个端子的热敏电阻,包括该热敏电阻的热敏电阻晶体管,一个用于控制使用该热敏电阻晶体管的功率晶体管的热量的电路以及包括该电路的电力系统。 该电路包括:热敏电阻晶体管,其包括具有随着温度升高而降低的电阻的热敏电阻和连接到热敏电阻的控制晶体管; 以及连接到驱动装置以控制向驱动装置供电的至少一个功率晶体管,其中所述热敏电阻 - 晶体管粘附到所述至少一个功率晶体管的表面和发热部分中的一个,以及 连接到所述至少一个功率晶体管的基极,栅极,集电极和漏极中的一个,以在所述至少一个功率晶体管的温度升高时降低或阻断在所述至少一个功率晶体管中流动的电流, 以防止功率晶体管升温。
    • 10. 发明授权
    • Thermistor with 3 terminals, thermistor-transistor, circuit for controlling heat of power transistor using the thermistor-transistor, and power system including the circuit
    • 具有3个端子的热敏电阻,热敏电阻晶体管,使用该热敏电阻晶体管来控制功率晶体管的热的电路,以及包含该电路的电力系统
    • US08420987B2
    • 2013-04-16
    • US12608054
    • 2009-10-29
    • Bongjun KimGiwan SeoHyun Tak Kim
    • Bongjun KimGiwan SeoHyun Tak Kim
    • H05B1/00H01L29/66
    • H01C7/008H01C7/18H01L27/0248H03K17/08H03K2017/0806
    • Provided are a thermistor with 3 terminals, a thermistor-transistor including the thermistor, a circuit for controlling heat of a power transistor using the thermistor-transistor, and a power system including the circuit. The circuit includes: a thermistor-transistor which comprises a thermistor having a resistance decreasing with an increase in temperature and a control transistor connected to the thermistor; and at least one power transistor which is connected to a driving device to control a supply of power to the driving device, wherein the thermistor-transistor is adhered to one of a surface and a heat-emitting part of the at least one power transistor and is connected to one of a base, a gate, a collector, and a drain of the at least one power transistor to decrease or block a current flowing in the at least one power transistor when the temperature of the at least one power transistor rises, so as to prevent the power transistor from heating up.
    • 本发明提供一种具有3个端子的热敏电阻,包括该热敏电阻的热敏电阻晶体管,一个用于控制使用该热敏电阻晶体管的功率晶体管的热量的电路以及包括该电路的电力系统。 该电路包括:热敏电阻晶体管,其包括具有随着温度升高而降低的电阻的热敏电阻和连接到热敏电阻的控制晶体管; 以及连接到驱动装置以控制向驱动装置供电的至少一个功率晶体管,其中所述热敏电阻 - 晶体管粘附到所述至少一个功率晶体管的表面和发热部分中的一个,以及 连接到所述至少一个功率晶体管的基极,栅极,集电极和漏极中的一个,以在所述至少一个功率晶体管的温度升高时降低或阻断在所述至少一个功率晶体管中流动的电流, 以防止功率晶体管升温。