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    • 1. 发明授权
    • Device for detecting rotating speed of thin shape motor
    • 用于检测薄型电机转速的装置
    • US4606223A
    • 1986-08-19
    • US619033
    • 1984-06-11
    • Hiroshi MatsunagaYoji ShimojimaIchiro TokunagaKosei ObataYukihiko Yasuhara
    • Hiroshi MatsunagaYoji ShimojimaIchiro TokunagaKosei ObataYukihiko Yasuhara
    • H02K29/14G01P3/486G01M15/00
    • G01P3/486
    • A device for detecting rotating speed of a thin shape motor including a vertical shaft rotatably supported on a base plate, a rotor of a planar shape secured to the vertical shaft in a spaced apart relation from the base plate, and a stator provided downwardly from the rotor on the base plate, comprises a rotatable disc of a diameter smaller than that of the rotor secured to the vertical shaft and having speed detecting indices on a peripheral surface thereof, and a luminous element and a light-receiving element provided outwardly of the rotor. A light-projecting optical fiber and a light-receiving optical fiber are further provided to extend along the base plate such that one end of the light-projecting optical fiber is located to oppose the luminous element, while one end of the light-receiving optical fiber is located to oppose the light-receiving element, and that the other ends of the two optical fibers are placed in opposition to the peripheral surface of the rotatable disc.
    • 一种用于检测包括可旋转地支撑在基板上的垂直轴的薄型电动机的转速的装置,与基板间隔开地固定到垂直轴的平面形状的转子以及从底板向下设置的定子 转子在基板上包括直径小于固定到垂直轴的转子的旋转盘,并且在其外周表面上具有速度检测指数,以及设置在转子外侧的发光元件和光接收元件 。 进一步提供一种投光光纤和光接收光纤,沿着基板延伸,使得投光光纤的一端与发光元件相对配置,而受光光纤的一端 光纤被定位成与光接收元件相对,并且两个光纤的另一端被放置成与可旋转盘的外围表面相对。
    • 3. 发明授权
    • Rotary encoder
    • 旋转编码器
    • US4580871A
    • 1986-04-08
    • US626636
    • 1984-07-02
    • Hiroshi MatsunagaYoji ShimojimaIchiro TokunagaKosei Obata
    • Hiroshi MatsunagaYoji ShimojimaIchiro TokunagaKosei Obata
    • G01D5/30G01D5/347G01D5/36G01P3/486G02B6/35G02B6/26G02B6/42
    • G01P3/486G01D5/34723
    • A light-reflective type rotary encoder used to measure the rotational frequency of a rotating shaft, the distance travelled by a sliding body, or other physical quantity has a casing body in which a rotor is rotatably held. Two input optical fibers laid parallel to each other and an output optical fiber laid between the input fibers are held in the casing body in such a way that each one end of these fibers is arranged in line and opposed to the fringe of the rotor on which reflective areas and non-reflective areas are alternately formed at regular intervals circumferentially. The other ends of the fibers which are disposed on the open end side of the casing body are surrounded and covered by a device-mounting case which is detachably mounted to the casing body and which holds a light-emitting device and light-receiving devices therein.
    • 用于测量旋转轴的旋转频率,滑动体行进的距离或其他物理量的光反射型旋转编码器具有可旋转地保持转子的壳体。 彼此平行布置的两个输入光纤和布置在输入光纤之间的输出光纤被保持在壳体中,使得这些光纤的每一端排列成与转子的边缘对齐, 反射区域和非反射区域周向地以规则的间隔交替地形成。 布置在壳体的开口端侧的纤维的另一端被可拆卸地安装在壳体上并将发光装置和光接收装置保持在其中的装置安装壳体包围并覆盖 。
    • 7. 发明授权
    • Rotary encoder
    • 旋转编码器
    • US4580130A
    • 1986-04-01
    • US599546
    • 1984-04-12
    • Ichiro TokunagaHiroshi MatsunagaYoji Shimojima
    • Ichiro TokunagaHiroshi MatsunagaYoji Shimojima
    • G01D5/30G01P13/04G01P13/00
    • G01P13/045
    • A rotary encoder used for measuring the rotational velocity, for example, of a rotating disk provided with reflecting surfaces and non-reflecting surfaces which are formed alternately on its periphery with a pitch l. The encoder includes one output optical fiber and two input optical fibers. All of the fibers have their one end surfaces opposed to the periphery of the disk. The input fibers are attached to the opposite sides of the output fiber in side-by-side relation. The interval between the end surfaces of the input fibers is set equal to l (n.+-.1/4), where n is a positive integer. Light-emitting devices connected to the input fibers produce output waveforms that are 90 degrees out of phase.
    • 用于测量旋转速度的旋转编码器,例如设置有反射面的旋转盘和在其周边上以间距l交替形成的非反射表面。 编码器包括一根输出光纤和两根输入光纤。 所有的纤维的一端表面与盘的周边相对。 输入光纤并排连接到输出光纤的相对两侧。 输入光纤的端面之间的间隔设定为l(n +/- 1/4),其中n为正整数。 连接到输入光纤的发光器件产生90度相位的输出波形。
    • 9. 发明授权
    • Copper wiring surface protective liquid and method for manufacturing semiconductor circuit
    • 铜布线表面保护液及制造半导体电路的方法
    • US08420529B2
    • 2013-04-16
    • US13119539
    • 2009-09-02
    • Kenji YamadaKenji ShimadaHiroshi Matsunaga
    • Kenji YamadaKenji ShimadaHiroshi Matsunaga
    • H01L21/28
    • H01L21/321H01L21/02063H01L21/02074
    • A copper wiring material surface protective liquid for production of a semiconductor device is provided, containing an oxyalkylene adduct of an acetylenediol containing an acetylenediol having an oxyalkylene having 2 or 3 carbon atoms added thereto. A method for producing a semiconductor circuit device is provided, containing: forming an insulating film and/or a diffusion preventing film on a silicon substrate; then forming a copper film by a sputtering method; then forming a copper wiring containing 80% by mass or more of copper thereon by a plating method; and flattening the wiring by a chemical mechanical polishing (CMP) method, thereby providing a semiconductor substrate containing a copper wiring, the semiconductor substrate having an exposed surface of a copper wiring material being treated by making in contact with the copper wiring material surface protective liquid.
    • 提供一种用于制造半导体器件的铜布线材料表面保护液,其含有含有具有2或3个碳原子的氧化烯的乙炔二醇的乙炔二醇的氧化烯加成物。 提供一种制造半导体电路器件的方法,包括:在硅衬底上形成绝缘膜和/或防扩散膜; 然后通过溅射法形成铜膜; 然后通过电镀法形成含有80质量%以上的铜的铜布线; 并通过化学机械抛光(CMP)方法使布线变平,从而提供含有铜布线的半导体基板,该半导体基板具有通过与铜布线材料表面保护液体接触来处理铜布线材料的暴露表面 。
    • 10. 发明授权
    • Cleaning composition and process for producing semiconductor device
    • 清洁组合物和半导体器件制造工艺
    • US07977292B2
    • 2011-07-12
    • US12530766
    • 2008-03-06
    • Hiroshi MatsunagaMasaru OhtoHideo KashiwagiHiroshi Yoshida
    • Hiroshi MatsunagaMasaru OhtoHideo KashiwagiHiroshi Yoshida
    • C11D7/18
    • H01L21/31133C11D3/3947C11D7/06C11D7/36C11D11/0047G03F7/423G03F7/425H01L21/02063
    • A cleaning composition of a semiconductor device for laminating an organosiloxane-based thin film and a photoresist layer in this order on a substrate having a low dielectric interlayer insulation film and a copper wiring or a copper alloy wiring, then applying selective exposure and development treatments to the subject photoresist layer to form a photoresist pattern, subsequently applying a dry etching treatment to the organosiloxane-based thin film and the low dielectric interlayer insulation film while using this resist pattern as a mask and then removing the organosiloxane-based thin film, a residue generated by the dry etching treatment, a modified photoresist having been modified by the dry etching treatment and an unmodified photoresist layer located in a lower layer than the modified photoresist, the cleaning composition containing from 15 to 20% by mass of hydrogen peroxide, from 0.0001 to 0.003% by mass of an amino polymethylene phosphonic acid, from 0.02 to 0.5% by mass of potassium hydroxide and water and having a pH of from 7.5 to 8.5, is provided. Also, a method for manufacturing a semiconductor device using the subject cleaning composition is provided.
    • 一种用于在具有低介电层间绝缘膜和铜布线或铜合金布线的基板上依次层叠有机硅氧烷类薄膜和光致抗蚀剂层的半导体装置的清洗组合物,然后对其进行选择性曝光和显影处理 该主体光致抗蚀剂层形成光致抗蚀剂图案,随后在使用该抗蚀剂图案作为掩模的同时对有机硅氧烷类薄膜和低介电层间绝缘膜进行干蚀刻处理,然后除去有机硅氧烷类薄膜,残留物 通过干蚀刻处理产生的改性光致抗蚀剂,通过干蚀刻处理改性的改性光致抗蚀剂和位于比改性光致抗蚀剂低的层中的未改性光致抗蚀剂层,清洗组合物含有15〜20质量%的过氧化氢,0.0001 至0.003质量%的氨基聚亚甲基膦酸,为0.02〜0.5质量% 氢氧化钾和水,pH为7.5至8.5。 另外,提供了使用该被检体组合物的半导体装置的制造方法。