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1. 发明授权

US06238581B1 Process for manufacturing an electro-mechanical grating device 有权
标题翻译：制造机电光栅装置的方法
公开(公告)号：US06238581B1
公开(公告)日：2001-05-29
申请号：US09216202
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos
IPC分类号： B81B300
CPC分类号： G02B5/1828 , G02B26/0808
摘要： A method for manufacturing a mechanical grating device is presented. The device consists of a plurality of parallel-suspended ribbons that are deformed using, for example, an electrostatic force to actuate alternate ribbons. Actuation is a deformation of the ribbon resulting from an applied voltage to affect the height of the ribbons above a substrate. The method for manufacturing a mechanical gating device comprises the steps of: providing a spacer layer on top of a protective layer which covers a substrate; etching a channel entirely through the spacer layer; depositing a sacrificial layer at least as thick as the spacer layer; rendering the deposited sacrificial layer optically coplanar by chemical mechanical polishing; providing a tensile ribbon layer completely covering the area of the channel; providing a conductive layer patterned in the form of a grating; transferring the conductive layer pattern to the ribbon layer and etching entirely through the ribbon layer; and removing entirely the sacrificial layer from the channel.
摘要翻译：提出了一种制造机械光栅装置的方法。该装置由多个平行悬挂的带组成，其使用例如静电力来变形以致动交替色带。致动是由施加的电压产生的带状物的变形，以影响衬底上方的带的高度。用于制造机械门控装置的方法包括以下步骤：在覆盖衬底的保护层的顶部上设置间隔层;通过间隔层整体蚀刻通道;沉积至少与间隔层一样厚的牺牲层; 通过化学机械抛光使沉积的牺牲层光学共面;提供完全覆盖通道区域的拉伸带层;提供以光栅形式图案化的导电层;将导电层图案转移到带层并完全蚀刻色带层; 并从通道中完全移除牺牲层。

2. 发明授权

US06450619B1 CMOS/MEMS integrated ink jet print head with heater elements formed during CMOS processing and method of forming same 有权
公开(公告)号：US06450619B1
公开(公告)日：2002-09-17
申请号：US09792188
申请日：2001-02-22
申请人： Constantine N. Anagnostopoulos , John A. Lebens , Gilbert A. Hawkins , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
发明人： Constantine N. Anagnostopoulos , John A. Lebens , Gilbert A. Hawkins , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
IPC分类号： B41S205
CPC分类号： B41J2/02 , B41J2/03 , B41J2002/032 , B41J2202/13 , B41J2202/16
摘要： A continuous ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. An insulating layer or layers overlies the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening is formed in a recess in the insulating layer or layers by a material depletion process such as etching. The process of etching defines the nozzle openings at locations where heater elements are formed in the insulating layer or layers during a conventional CMOS processing of the integrated circuits. The print head structure thereby provides for minimal post processing of the print head after the completion of the CMOS processing.

3. 发明授权

US06491376B2 Continuous ink jet printhead with thin membrane nozzle plate 失效
标题翻译：连续喷墨打印头带薄膜喷嘴板
公开(公告)号：US06491376B2
公开(公告)日：2002-12-10
申请号：US09862953
申请日：2001-05-22
申请人： David P. Trauernicht , Constantine N. Anagnostopoulos , James M. Chwalek , Christopher N. Delametter , Gilbert A. Hawkins , John A. Lebens
发明人： David P. Trauernicht , Constantine N. Anagnostopoulos , James M. Chwalek , Christopher N. Delametter , Gilbert A. Hawkins , John A. Lebens
IPC分类号： B41J214
CPC分类号： B41J2/03 , B41J2/105 , B41J2002/032 , B41J2202/13 , B41J2202/16 , B41J2202/22
摘要： A continuous ink jet printhead has a nozzle bore formed from a thin membrane that comprises an overhang from a relief portion of the substrate. The thin membrane of thickness t overhangs a relief portion of the substrate with a dimension OH. The nozzle bore has a respective diameter dimension D. The dimensions are characterized in that OH>=½ D; and wherein t
摘要翻译：连续的喷墨打印头具有由薄膜形成的喷嘴孔，该薄膜包括从基板的浮雕部分伸出的突出部。厚度为薄的薄膜以尺寸OH突出到衬底的浮雕部分。喷嘴孔具有相应的直径尺寸D.尺寸的特征在于OH> =½D; 并且其中t <= 0.33D。

4. 发明授权

US06474794B1 Incorporation of silicon bridges in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same 有权
标题翻译：在CMOS / MEMS集成喷墨打印头的墨水通道中并入硅桥及其形成方法
公开(公告)号：US06474794B1
公开(公告)日：2002-11-05
申请号：US09751726
申请日：2000-12-29
申请人： Constantine N. Anagnostopoulos , Gilbert A. Hawkins , John A. Lebens , James M. Chwalek
发明人： Constantine N. Anagnostopoulos , Gilbert A. Hawkins , John A. Lebens , James M. Chwalek
IPC分类号： B41J202
CPC分类号： B41J2/03 , B41J2002/032 , B41J2202/13 , B41J2202/16 , B41J2202/22
摘要： An ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. The silicon substrate has a series of ink channels formed therein along the longitudinal direction of the nozzle array. An insulating layer or layers overlying the silicon substrate has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening communicates with a respective ink channel. A series of rib structures is formed in the silicon substrate transverse to the longitudinal direction of the nozzle array for providing strength to the final silicon ship comprising the print head.
摘要翻译：喷墨打印头由硅基板形成，该硅基板包括形成在其中的集成电路，用于控制打印头的操作。硅衬底沿着喷嘴阵列的纵向方向形成有一系列油墨通道。覆盖硅衬底的绝缘层或层沿着衬底的长度形成有一系列或一组喷嘴孔或孔，并且每个喷嘴开口与相应的油墨通道连通。在硅基板中横向于喷嘴阵列的纵向方向形成一系列肋结构，以为包括打印头的最终硅船提供强度。

5. 发明授权

US06252697B1 Mechanical grating device 有权
标题翻译：机械光栅装置
公开(公告)号：US06252697B1
公开(公告)日：2001-06-26
申请号：US09216289
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz
IPC分类号： G02B2600
CPC分类号： G02B5/1828 , G02B26/0808
摘要： A mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer, said channel having a first and second opposing side walls and a bottom. The side walls are substantially vertically disposed with respect to the bottom, and said channel having a constant cross section along the entire length of the mechanical grating device. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel.
摘要翻译：用于衍射入射光束的机械光栅装置具有限定表面的基部。间隔层设置在基底之上，所述间隔层限定所述间隔层的上表面。在所述间隔层中形成纵向通道，所述通道具有第一和第二相对的侧壁和底部。侧壁相对于底部基本上垂直设置，并且所述通道沿着机械光栅装置的整个长度具有恒定的横截面。多个间隔开的可变形的带状元件彼此平行设置并跨越通道。可变形的带状元件固定在通道的每一侧上的隔离层的上表面。

6. 发明授权

US06233087B1 Electro-mechanical grating device 有权
标题翻译：机电光栅装置
公开(公告)号：US06233087B1
公开(公告)日：2001-05-15
申请号：US09216374
申请日：1998-12-18
申请人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz , Marek W. Kowarz
发明人： Gilbert A. Hawkins , John A. Lebens , Constantine N. Anagnostopoulos , John C. Brazas, Jr. , Brian E. Kruschwitz , Marek W. Kowarz
IPC分类号： G02B2600
CPC分类号： G02B26/0808 , G02B5/1828
摘要： An electro-mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements define a ribbon structure which comprises at least one layer of a single material. The ribbon elements and the electro-mechanical grating device are formed so that charge build-up in layers of the electro-mechanical grating device can be avoided during operation of the device.
摘要翻译：用于衍射入射光束的机电光栅装置具有限定表面的基部。间隔层设置在基底之上，所述间隔层限定所述间隔层的上表面。在所述间隔层中形成纵向通道。多个间隔开的可变形的带状元件彼此平行设置并跨越通道。可变形的带元件限定了包括至少一层单一材料的带状结构。形成带状元件和电 - 机械光栅装置，使得可以在器件的操作期间避免电 - 机械光栅装置的层中的电荷积聚。

7. 发明授权

US06536882B1 Inkjet printhead having substrate feedthroughs for accommodating conductors 有权
标题翻译：喷墨打印头具有用于容纳导体的基板馈通
公开(公告)号：US06536882B1
公开(公告)日：2003-03-25
申请号：US09625536
申请日：2000-07-26
申请人： Gilbert A. Hawkins , Constantine N. Anagnostopoulos , John A. Lebens
发明人： Gilbert A. Hawkins , Constantine N. Anagnostopoulos , John A. Lebens
IPC分类号： B41J2105
CPC分类号： B41J2/03 , B41J2002/032 , B41J2202/18
摘要： An inkjet printhead for printing an image on a printing medium is provided that includes a substrate having an interior and a nozzle face, a plurality of nozzles having outlets in the nozzle face, an electronically-operated droplet deflector disposed adjacent to each of the nozzle outlets, and feedthroughs for connecting the droplet deflector to power and image data circuits through the substrate interior. The feedthroughs include bores disposed through the substrate for accommodating conductors connected between the droplet deflectors and power and image data control circuits of the printer. The feedthroughs may take the form of bores either coated or filled with electrically-conductive material. The use of feedthroughs through the printhead substrate avoids the manufacture of an undesirably high density of connectors and conductors on the nozzle face and facilitates the manufacture of smooth and flat nozzle faces which are easily cleaned during the printing operation by wiping mechanisms. The power feedthroughs may be easily manufactured via MEMS bulk micromachining technology at the same time the substrate ink channels are formed.
摘要翻译：提供一种用于在打印介质上打印图像的喷墨打印头，其包括具有内部和喷嘴面的基板，在喷嘴面中具有出口的多个喷嘴，与每个喷嘴出口相邻设置的电子操作的液滴偏转器以及用于通过衬底内部将液滴偏转器连接到功率和图像数据电路的馈通。馈通包括穿过基板布置的孔，用于容纳连接在液滴偏转器和打印机的电源和图像数据控制电路之间的导体。馈通可以采用涂覆或填充有导电材料的孔的形式。使用穿过打印头基板的穿通件避免了在喷嘴面上制造不希望的高密度的连接器和导体，并且有利于制造平滑和扁平的喷嘴面，这些喷嘴面在打印操作期间通过擦拭机构容易地清洁。电源馈通可以通过MEMS体积微加工技术容易地制造，同时形成衬底油墨通道。

8. 发明授权

US06491385B2 CMOS/MEMS integrated ink jet print head with elongated bore and method of forming same 有权
标题翻译：具有长孔的CMOS / MEMS集成喷墨打印头及其形成方法
公开(公告)号：US06491385B2
公开(公告)日：2002-12-10
申请号：US09791315
申请日：2001-02-22
申请人： Constantine N. Anagnostopoulos , Gilbert A. Hawkins , John A. Lebens
发明人： Constantine N. Anagnostopoulos , Gilbert A. Hawkins , John A. Lebens
IPC分类号： B41J202
CPC分类号： B41J2/03 , B41J2/09 , B41J2002/032 , B41J2202/22
摘要： A continuous ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. An insulating layer or layers overlies the silicon substrate includes conductors at various levels to provide conductive paths for transmitting control signals for controlling the print head. The insulating layer or layers also has a series or an array of nozzle openings or bores formed therein along the length of the substrate to provide a substantially planar surface to facilitate cleaning of the printhead. Each nozzle opening is formed as an elongated bore that extends through the insulating layer or layers to the silicon substrate. A heater element is formed adjacent each nozzle opening and in proximity to the planar surface to provide asymmetric heating of the ink stream as it leaves the nozzle opening.
摘要翻译：连续的喷墨打印头由硅衬底形成，该衬底包括形成在其中的集成电路，用于控制打印头的操作。覆盖在硅衬底上的绝缘层包括各种级别的导体，以提供用于传输用于控制打印头的控制信号的导电路径。绝缘层或层还具有沿着衬底的长度形成在其中的喷嘴开口或孔的一系列或阵列，以提供基本平坦的表面以便于清洁打印头。每个喷嘴开口形成为延伸穿过绝缘层或硅层到硅衬底的细长孔。在每个喷嘴开口附近并且靠近平面表面形成加热元件，以在油墨流离开喷嘴开口时提供油墨流的不对称加热。

9. 发明授权

US06702209B2 Electrostatic fluid ejector with dynamic valve control 失效
标题翻译：具有动态阀门控制功能的静电喷射器
公开(公告)号：US06702209B2
公开(公告)日：2004-03-09
申请号：US10138908
申请日：2002-05-03
申请人： Edward P. Furlani , Michael J. Debar , Christopher N. Delametter , Gilbert A. Hawkins , Constantine N. Anagnostopoulos
发明人： Edward P. Furlani , Michael J. Debar , Christopher N. Delametter , Gilbert A. Hawkins , Constantine N. Anagnostopoulos
IPC分类号： B05B300
CPC分类号： B41J2/14314
摘要： A drop-on-demand liquid emission device, such as for example an ink jet printer, includes a member movable through a path for driving liquid from the device, wherein the speed at which the member moves is reduced over the time period that liquid is being expelled. During that time period, a portion of the liquid flows through a passage away from the nozzle orifice. According to a feature of the present invention, a variable flow restrictor increases the resistance to flow through the passage during the time period that liquid is being expelled; thereby tending to compensate for the reduction of the liquid-expulsion force over the time period. The result is a reduction of undesirable satellite droplets following a main drop.
摘要翻译：液滴喷射装置例如喷墨打印机包括可移动通过用于从装置驱动液体的路径的构件，其中构件移动的速度在液体为被驱逐在该时间段期间，一部分液体流过远离喷嘴孔的通道。根据本发明的特征，可变流量限制器在液体被排出的时间段内增加了通过通道的流动阻力; 从而有助于补偿在该时间段内液体排出力的减少。结果是在主下降之后减少不期望的卫星液滴。

10. 发明授权

US06213595B1 Continuous ink jet print head having power-adjustable segmented heaters 有权
标题翻译：连续喷墨打印头，具有功率可调分段加热器
公开(公告)号：US06213595B1
公开(公告)日：2001-04-10
申请号：US09221256
申请日：1998-12-28
申请人： Constantine N. Anagnostopoulos , James M. Chwalek , Gilbert A. Hawkins
发明人： Constantine N. Anagnostopoulos , James M. Chwalek , Gilbert A. Hawkins
IPC分类号： B41J2105
CPC分类号： B41J2/03 , B41J2002/032 , B41J2202/16
摘要： Apparatus for controlling ink in a continuous ink jet printer in which a continuous stream of ink is emitted from a nozzle includes a nozzle bore to establish a continuous stream of ink; a heater having a plurality of selectively independently actuated sections which are positioned along respectively different portions of the nozzle bore; a variable power source for the heater sections; and an actuator adapted to selectively activate none, one, or a plurality of said heater sections with an adjustable amount of power such that actuation of heater sections associated with only a portion of the entire nozzle bore perimeter produces an asymmetric application of heat to the stream to control the direction and the amount of deflection of the stream as a function of the amount of power of the activated heater sections.
摘要翻译：用于控制连续喷墨打印机中的油墨的装置，其中从喷嘴喷射连续的墨水流包括喷嘴孔，以建立连续的墨水流; 加热器，具有多个选择性地独立地致动的部分，其沿喷嘴孔的不同部分定位; 用于加热器部分的可变电源; 以及致动器，适于以可调整的功率选择性地激活所述加热器部分中的一个，一个或多个加热器部分，使得仅与整个喷嘴孔周边部分相关联的加热器部分的致动产生热量对流的不对称施加以根据活化的加热器部分的功率量来控制流的方向和偏转量。

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