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1. 发明授权

US07320224B2 Method and apparatus for detecting and measuring state of fullness in cryopumps 有权
标题翻译：用于检测和测量低温泵充满状态的方法和装置
公开(公告)号：US07320224B2
公开(公告)日：2008-01-22
申请号：US10763056
申请日：2004-01-21
申请人： Gary S. Ash , Allen J. Bartlett , James A. O'Neil , Bruce R. Andeen
发明人： Gary S. Ash , Allen J. Bartlett , James A. O'Neil , Bruce R. Andeen
IPC分类号： B01D8/00
CPC分类号： F04B37/08
摘要： The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.
摘要翻译：本系统和方法提供了通过测量低温泵吸附能力来监测低温泵的饱和度的机制。离子计或其他总压力表与泵的冷凝或吸附面板接触。例如，量规传感器可以连接到通向吸附木炭所在的泵的中心芯的管或管道。在泵的这个位置，仪表暴露于低沸点气体，如氢气，氖气和氦气，同时基本上与其他气体如氮气，氩气，氧气或水蒸气相隔离。通过将量规连接到泵的该位置，该量规可用于监测泵的吸收能力。

2. 发明授权

US07127901B2 Helium management control system 有权
公开(公告)号：US07127901B2
公开(公告)日：2006-10-31
申请号：US09909863
申请日：2001-07-20
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce R. Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce R. Andeen , Y. Roberto Than , Joseph Chopy, Jr.
IPC分类号： F25B45/00 , B01D8/00
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

3. 发明授权

US5862671A Purge and rough cryopump regeneration process, cryopump and controller 失效
标题翻译：吹扫和粗略的低温泵再生过程，低温泵和控制器
公开(公告)号：US5862671A
公开(公告)日：1999-01-26
申请号：US848973
申请日：1997-05-02
申请人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
发明人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
IPC分类号： F04B37/16 , F04B37/08 , B01D8/00
CPC分类号： F04B37/085 , Y10S417/901
摘要： A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.
摘要翻译：在清洗过程中，通过对低温泵进行粗加工来再生低温泵。首先在高温模式下进行吹扫和粗加工，然后在较低的环境温度模式下进行。在较低温度模式下，低温冰箱打开。如果系统在较低温度下进行粗加工后未能进行粗糙试验，则会在粗阀打开时重新进行。

4. 发明申请

US20110126554A1 Linear Drive Cryogenic Refrigerator 有权
标题翻译：线性驱动低温冰箱
公开(公告)号：US20110126554A1
公开(公告)日：2011-06-02
申请号：US12950080
申请日：2010-11-19
申请人： Ronald N. Morris , Bruce R. Andeen , Allen J. Bartlett
发明人： Ronald N. Morris , Bruce R. Andeen , Allen J. Bartlett
IPC分类号： F25B9/00
CPC分类号： F04B37/08 , F25B9/10 , F25B9/14 , F25B2400/073
摘要： A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
摘要翻译：低温冰箱具有制冷缸和至少两个置换器。每个置换器在制冷气瓶中往复运动，并使制冷气体通过制冷气瓶。再生器冷却制冷气体，气体控制阀将制冷气瓶内的高压气体和来自制冷气瓶的废气进入。冰箱还具有可操作地连接到置换器的线性电动机，并且线性电动机以往复运动驱动置换器。提供位置传感器以在往复运动期间确定置换器的参数。控制器可操作地连接到线性电动机以控制线性电动机。控制器在往复运动期间控制两个置换器的参数。该参数可以是用于低温冰箱的温度控制的置换器的行程长度，行程速度，冲程相位或另一参数。低温冰箱还可以包括消除振动的装置。

5. 发明授权

US08413452B2 Linear drive cryogenic refrigerator 有权
标题翻译：线性驱动低温冰箱
公开(公告)号：US08413452B2
公开(公告)日：2013-04-09
申请号：US12950080
申请日：2010-11-19
申请人： Ronald N. Morris , Bruce R. Andeen , Allen J. Bartlett
发明人： Ronald N. Morris , Bruce R. Andeen , Allen J. Bartlett
IPC分类号： F25B9/00
CPC分类号： F04B37/08 , F25B9/10 , F25B9/14 , F25B2400/073
摘要： A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
摘要翻译：低温冰箱具有制冷缸和至少两个置换器。每个置换器在制冷气瓶中往复运动，并使制冷气体通过制冷气瓶。再生器冷却制冷气体，气体控制阀将制冷气瓶内的高压气体和来自制冷气瓶的废气进入。冰箱还具有可操作地连接到置换器的线性电动机，并且线性电动机以往复运动驱动置换器。提供位置传感器以在往复运动期间确定置换器的参数。控制器可操作地连接到线性电动机以控制线性电动机。控制器在往复运动期间控制两个置换器的参数。该参数可以是用于低温冰箱的温度控制的置换器的行程长度，行程速度，冲程相位或另一参数。低温冰箱还可以包括消除振动的装置。

6. 发明授权

US5517823A Pressure controlled cryopump regeneration method and system 失效
标题翻译：压力控制低温泵再生方法及系统
公开(公告)号：US5517823A
公开(公告)日：1996-05-21
申请号：US374140
申请日：1995-01-18
申请人： Bruce R. Andeen , Gerald J. Fortier , Allen J. Bartlett , Michael J. Eacobacci , Philip C. Lessard
发明人： Bruce R. Andeen , Gerald J. Fortier , Allen J. Bartlett , Michael J. Eacobacci , Philip C. Lessard
IPC分类号： F04B37/08 , F04B37/16 , B01D8/00
CPC分类号： F04B37/085 , Y10S417/901
摘要： In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a predetermined maximum pressure. The maximum pressure is subatmospheric. The relief valve closes when the cryopump pressure drops below a second cryopump pressure level. Pressure in a line between the relief valve and the roughing pump is monitored to control the opening of the roughing valve to the roughing pump.
摘要翻译：在低于大气压的再生过程中，安全阀和粗加工阀与共同的粗加工泵并联。在再生期间，将低温泵加热以从低温泵阶段释放气体。安全阀在低于预定最大压力的第一低温泵压力水平下打开。最大压力低于大气压。当低温泵压力低于第二低温泵压力水平时，安全阀关闭。监控安全阀和粗加油泵之间管路中的压力，以控制粗加油阀对粗加油泵的打开。

7. 再颁专利

USRE33878E Cryogenic recondenser with remote cold box 失效
公开(公告)号：USRE33878E
公开(公告)日：1992-04-14
申请号：US571870
申请日：1990-08-22
申请人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
发明人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
IPC分类号： F17C3/08 , F25B9/10 , F25J1/00 , H01F6/00
CPC分类号： F25J1/0276 , F17C3/085 , F25B9/10 , H01F6/00 , F17C2203/0629 , F17C2221/017 , F17C2223/0161 , F17C2223/033 , F17C2227/036 , F17C2265/034 , F17C2270/0509 , F17C2270/0536
摘要： A recondenser cycles a working volume of cryogen gas through a remote cold box and a coaxial recondensing, heat exchanger transfer line which is inserted into a cryostat. The working volume of gas is compressed to a high pressure and cooled through cooling means which include a mechanical refrigerator of the regenerator-displacer type. The cooled gas is expanded through a first JT valve to a medium pressure and further cooled. The further cooled medium pressure gas is transferred in a closed coaxial transfer line to a cryostat in which boil-off is recondensed. A second JT valve in the cryostat end of an inner tube coaxially positioned in an outer tube forming the transfer line expands the gas to a lower pressure and forms a liquid-gas mixture. The liquid-gas mixture is passed in heat exchange relation with the boil-off from an inner tube to an outer tube of a coaxial recondensing heat exchanger. The outer surface of the outer tube at the cryostat end of the transfer line has burrs which provide the necessary surface area on which to recondense the boil-off. The gas is transferred back to the cooling means through intermediate channels formed between the outer tube and the coaxially positioned inner tube.

8. 发明授权

US4766741A Cryogenic recondenser with remote cold box 失效
标题翻译：低温冷凝器与遥控冷藏箱
公开(公告)号：US4766741A
公开(公告)日：1988-08-30
申请号：US5082
申请日：1987-01-20
申请人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
发明人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
IPC分类号： F17C3/08 , F25B9/00 , F25B9/10 , F25J1/00 , F25J1/02 , F28F1/42 , H01F6/00 , H01F7/20 , F25B19/00
CPC分类号： H01F6/00 , F17C3/085 , F25B9/00 , F28F1/42 , F17C2205/0326 , F17C2205/0347 , F17C2205/0355 , F17C2221/017 , F17C2223/0161 , F17C2223/033 , F17C2227/0353 , F17C2227/036 , F17C2250/0626 , F17C2250/0636 , F17C2265/012 , F17C2270/0509 , F17C2270/0536
摘要： A recondenser cycles a working volume of cryogen gas through a remote cold box and a coaxial recondensing, heat exchanger transfer line which is inserted into a cryostat. The working volume of gas is compressed to a high pressure and cooled through cooling means which include a mechanical refrigerator of the regenerator-displacer type. The cooled gas is expanded through a first JT valve to a medium pressure and further cooled. The further cooled medium pressure gas is transferred in a closed coaxial transfer line to a cryostat in which boil-off is recondensed. A second JT valve in the cryostat end of an inner tube coaxially positioned in an outer tube forming the transfer line expands the gas to a lower pressure and forms a liquid-gas mixture. The liquid-gas mixture is passed in heat exchange relation with the boil-off from an inner tube to an outer tube of a coaxial recondensing heat exchanger. The outer surface of the outer tube at the cryostat end of the transfer line has burrs which provide the necessary surface area on which to recondense the boil-off. The gas is transferred back to the cooling means through intermediate channels formed between the outer tube and the coaxially positioned inner tube.
摘要翻译：再冷凝器通过远程冷箱和插入低温恒温器的同轴再冷凝换热器输送管线循环冷冻剂气体的工作体积。将气体的工作体积压缩至高压，并通过冷却装置冷却，冷却装置包括再生器置换器型机械式制冷机。冷却的气体通过第一JT阀膨胀至中压并进一步冷却。进一步冷却的中压气体在闭合的同轴输送管线中转移到冷凝器中，在该恒温器中再蒸发。同轴地位于形成输送管的外管的内管的低温恒温器端中的第二JT阀将气体膨胀到较低压力并形成液态气体混合物。液体 - 气体混合物与从内管到同轴再冷凝式热交换器的外管的蒸发热交换。在输送管线的低温恒温器端部的外管的外表面具有毛刺，其提供必要的表面积以重新冷凝该蒸发。通过形成在外管和同轴定位的内管之间的中间通道将气体转移回冷却装置。

9. 发明授权

US07788942B2 Helium management control system 有权
标题翻译：氦管理控制系统
公开(公告)号：US07788942B2
公开(公告)日：2010-09-07
申请号：US11590673
申请日：2006-10-31
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
IPC分类号： F25B45/00 , B01D8/00 , F25J1/00
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译：用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。

10. 发明授权

US08261562B2 Helium management control system 有权
标题翻译：氦管理控制系统
公开(公告)号：US08261562B2
公开(公告)日：2012-09-11
申请号：US12848681
申请日：2010-08-02
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
IPC分类号： F25B5/00 , B01D8/00 , F25B41/00 , F25B49/00
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译：用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。

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