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1. 发明授权

US06775429B2 Dynamic gain equalization system design with adaptive spectrum decomposition methodology 失效
标题翻译：具有自适应频谱分解方法的动态增益均衡系统设计
公开(公告)号：US06775429B2
公开(公告)日：2004-08-10
申请号：US10177505
申请日：2002-06-19
申请人： Gaofeng Wang , Naiqian Han , Liji Huang
发明人： Gaofeng Wang , Naiqian Han , Liji Huang
IPC分类号： G02B626
CPC分类号： G02B6/12021 , G02B6/12033 , G02B6/266 , G02B6/293 , G02B6/29391 , G02B6/29395
摘要： The present invention discloses an optical gain equalization system for receiving and equalizing a multiple-channel input optical signal. The optical gain equalization system includes a cascaded array of tunable optical filters filtering the multiple-channel input optical signal and generating a plurality of sub-signals and a residual signal and each of the sub-signals transmitted over a mutually exclusive filter-specific spectrum-range while a combination of all the filter-specific spectrums dynamically covering the spectral portions of said multi-channel input optical signal where power equalizations are required, and all said filter-specific spectrums together with the residual signal spectrum substantially covering an entire spectral range of the multi-channel input optical signal. The gain equalization system further includes a corresponding array of variable optical attenuators (VOAs) each connected to one of a corresponding tunable optical filter for attenuating the sub-signal transmitted over the filter-specific spectrum range for generating an equalized sub-signal. And, the gain equalization system further includes a multiplexing means for receiving and multiplexing the equalized sub-signals generated by the array of variable optical attenuators (VOAs) and the residual signal for generating an equalized output optical signal.
摘要翻译：本发明公开了一种用于接收和均衡多通道输入光信号的光增益均衡系统。光学增益均衡系统包括可调谐滤光器的级联阵列，其对多通道输入光信号进行滤波，并产生多个子信号和残留信号，并且每个子信号通过互斥滤波器特定频谱 - 范围，同时所有滤波器特定频谱的组合动态地覆盖需要功率均衡的所述多信道输入光信号的频谱部分，并且所有所述滤波器特定频谱与残留信号频谱一起基本上覆盖整个频谱范围多通道输入光信号。增益均衡系统还包括相应的可变光衰减器阵列（VOA），每个可变光衰减器连接到相应的可调光滤波器之一，用于衰减通过滤波器专用频谱范围传输的子信号，用于产生均衡的子信号。并且，增益均衡系统还包括多路复用装置，用于接收和复用由可变光衰减器阵列产生的均衡的子信号和用于产生均衡的输出光信号的残余信号。

2. 发明授权

US06724516B2 Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices 失效
标题翻译：用于微机电系统（MEMS）光子器件的稳健的多层薄膜膜
公开(公告)号：US06724516B2
公开(公告)日：2004-04-20
申请号：US10062774
申请日：2002-02-01
申请人： Gaofeng Wang , Naiqian Han , Liji Huang
发明人： Gaofeng Wang , Naiqian Han , Liji Huang
IPC分类号： G02B2600
CPC分类号： G02B26/0833 , G02B6/122 , G02B26/001 , G02B2006/12104
摘要： This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . , etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.
摘要翻译：本发明公开了薄膜的结构。该薄膜是独立的，可移动的，并且由多层不同的材料制成，例如氮化硅，多晶硅或这两者的组合。该薄膜可以通过诸如静电力的外部控制力来致动。该薄膜膜由奇数层组成，例如1层，3层，5层。。。此外，该膜的层轮廓是对称的，例如，最底层与最顶层相同，下一个最下层被制成与下一个最上层相同，等等。

3. 发明授权

US06620712B2 Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications 失效
标题翻译：通过离子注入为微光电机械系统（MOEMS）应用定义了牺牲区域
公开(公告)号：US06620712B2
公开(公告)日：2003-09-16
申请号：US10011350
申请日：2001-11-12
申请人： Liji Huang , Naiqian Han , Yahong Yao , Gaofeng Wang
发明人： Liji Huang , Naiqian Han , Yahong Yao , Gaofeng Wang
IPC分类号： H01L2100
CPC分类号： B81C1/00047 , B81B2201/047 , B81B2203/0127 , B81B2203/0315 , B81C1/00571 , B81C2201/0109 , B81C2201/0136
摘要： The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes a sacrificial layer disposed on the substrate having a chamber-wall region surrounding and defining an optical chamber. The electro-optical device further includes a membrane layer disposed on top of the sacrificial layer having a chamber-removal opening surrounding and defining an electric tunable membrane for transmitting an optical signal therethrough. The electrically tunable membrane disposed on top of the optical chamber surrounded by the chamber wall regions. The chamber-wall region is doped with ion-dopants for maintaining the chamber-wall region for removal-resistance under a chamber-forming process performed through the chamber-removal opening. In a preferred embodiment, the chamber-wall region is a doped silicon dioxide region with carbon or nitrogen. In another preferred embodiment, the chamber-wall region is a nitrogen ion-doped SiNxOy region. In another preferred embodiment, the optical chamber is an etched chamber formed by etching through the chamber removal opening for etching off an etch-enhanced region surrounded by an etch-resistant region constituting the chamber wall.
摘要翻译：本发明公开了一种在基片上的电光装置支架。电光装置包括设置在基板上的牺牲层，其具有围绕并限定光学室的室壁区域。电光装置还包括设置在牺牲层顶部的膜层，其具有围绕并限定用于透射光信号的电可调膜的室去除开口。设置在由室壁区域围绕的光学室的顶部上的电可调膜。室壁区域掺杂有离子掺杂剂，用于在通过室去除开口进行的室形成过程中维持室壁区域以用于去除电阻。在优选实施例中，室壁区域是具有碳或氮的掺杂二氧化硅区域。在另一个优选的实施方案中，室壁区域是氮离子掺杂的SiN x O y区域。在另一个优选实施例中，光学室是通过蚀刻通过室去除开口形成的蚀刻室，用于蚀刻由构成室壁的耐蚀刻区域围绕的蚀刻增强区域。

4. 发明授权

US06781735B2 Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate 失效
标题翻译：用散装微加工工艺制造的法布里 - 珀罗腔体应用在支撑基板上
公开(公告)号：US06781735B2
公开(公告)日：2004-08-24
申请号：US10053328
申请日：2002-01-16
申请人： Liji Huang , Yahong Yao , Naiqian Han , Gaofeng Wang
发明人： Liji Huang , Yahong Yao , Naiqian Han , Gaofeng Wang
IPC分类号： G02F103
CPC分类号： G02B26/02 , G02B6/122 , G02B26/001 , G02B2006/12104 , G02B2006/12109 , G02B2006/12159 , G02B2006/12176
摘要： The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes two face-to-face freestanding membranes each supported near a top surface on one of two bonded substrates for defining a resonant cavity between the two membranes. Each of the substrates having an entire bulk-portion opposite the cavity etched off as a bulk micro-machining opening extended from each of the membranes through a bottom surface of the substrates.
摘要翻译：本发明公开了一种在基片上的电光装置支架。电光装置包括两个面对面独立的膜，每个膜分别支撑在两个键合衬底中的一个上的顶表面附近，用于限定两个膜之间的谐振腔。每个衬底具有与腔体相对的整个体积部分的整个部分，作为从每个膜通过衬底的底表面延伸的大块微加工开口。

5. 发明授权

US06727562B2 Basic common optical cell configuration of dual cavities for optical tunable devices 失效
公开(公告)号：US06727562B2
公开(公告)日：2004-04-27
申请号：US10165490
申请日：2002-06-07
申请人： Naiqian Han , Jidong Hou , Xiaoping Zhang , Liji Huang , Gaofeng Wang
发明人： Naiqian Han , Jidong Hou , Xiaoping Zhang , Liji Huang , Gaofeng Wang
IPC分类号： H01L2982
CPC分类号： H01S5/18366 , H01S5/0207
摘要： The present invention discloses a tunable optical device. The tunable optical device includes a tuning cavity having a tuning means provided for alternately bonding to at least two different tunable optical cells each comprising a tuning membrane wherein the tuning cavity disposed near the tuning membrane for moving the tuning membrane for tuning one of the at least two tunable optical cells bonded thereon. In a preferred embodiment, the tuning cavity further includes a first electrode disposed on the tuning membrane and a second electrode disposed on a substrate supporting the tuning cavity for applying a voltage to move the tuning membrane. In a preferred embodiment, the optical device further includes an optical device control circuit connected to the tuning means for controlling and moving the tuning membrane. In a preferred embodiment, the tuning cavity further includes through hole along an optical path for an optical transmission passing through the tunable membrane for providing an interface-free and ripple-free optical path for the optical transmission. In a preferred embodiment, the tunable optical cells constitute an optical filter for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical attenuator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical switch for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical dispersion compensator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the optical device constitutes a micro-electro-mechanical system (MEMS) optical device manufactured by applying a micro-electro-mechanical system (MEMS) technology.

6. 发明授权

US06509998B2 Tunable multi-channel optical attenuator (TMCOA) 失效
标题翻译：可调谐多通道光衰减器（TMCOA）
公开(公告)号：US06509998B2
公开(公告)日：2003-01-21
申请号：US09877367
申请日：2001-06-07
申请人： Liji Huang , Jian Li , Naiqian Han , James Yang
发明人： Liji Huang , Jian Li , Naiqian Han , James Yang
IPC分类号： G02F103
CPC分类号： G02B26/02 , G02B26/001
摘要： A conductive substrate supports an array of multi-channel optical attenuating devices. Each attenuating device includes a membrane with an optically transparent portion And a flexible support for positioning the optically transparent portion of the membrane spaced from the substrate for defining an air gap. The air gap constitutes a cross-shaped gap-chamber having a horizontally and vertically elongated chambers extended from a central intersection area functioning as an optical active area. A voltage bias circuit applies an electrical bias between the conductive substrate and the membrane to adjust and control an air-gap thickness at the optical active area between the conductive substrate and the membrane. Each of the devices can be manufactured on the same silicon wafer using the same process and can be individually controlled to accommodate different wavelength attenuation at each channel. Production costs, and time and efforts required for aligning the array to optical fibers are also reduced.
摘要翻译：导电衬底支持多通道光衰减器件的阵列。每个衰减装置包括具有光学透明部分的膜和柔性支撑件，用于将膜的光学透明部分与衬底间隔开以限定气隙。气隙构成十字形间隙室，其具有从用作光学有源区域的中心交叉区域延伸的水平和垂直细长室。电压偏置电路在导电基板和膜之间施加电偏压，以调节和控制导电基板和膜之间的光学有效面积处的气隙厚度。每个器件可以使用相同的工艺在相同的硅晶片上制造，并且可以单独控制以适应每个通道的不同波长衰减。生产成本以及将阵列对准光纤所需的时间和努力也减少了。

7. 发明授权

US06556338B2 MEMS based variable optical attenuator (MBVOA) 失效
标题翻译：基于MEMS的可变光衰减器（MBVOA）
公开(公告)号：US06556338B2
公开(公告)日：2003-04-29
申请号：US10003811
申请日：2001-11-02
申请人： Naiqian Han , Liji Huang
发明人： Naiqian Han , Liji Huang
IPC分类号： G02B2608
CPC分类号： G02B26/02 , G02B6/266
摘要： The present invention discloses an optimized optical attenuator device. It includes the design of resonator formed by two identical mirrors, which are made by MEMS process. The structure realizes the minimum insertion loss. The two membranes are chosen to be with high reflection rate. Multiple layer or metal layer or mixture of them can produce membrane of high reflection rate. High reflection rate causes low tuning voltage for one certain attenuation range.
摘要翻译：本发明公开了一种优化的光衰减器件。它包括由两个相同的反射镜形成的谐振器的设计，它们是由MEMS工艺制成的。该结构实现了最小的插入损耗。选择两种膜具有高反射率。多层或金属层或它们的混合物可产生高反射率的膜。高反射率导致一定衰减范围内的低调谐电压。

8. 发明授权

US07752910B2 Micromachined mass flow sensor and methods of making the same 有权
标题翻译：微加工质量流量传感器及其制造方法
公开(公告)号：US07752910B2
公开(公告)日：2010-07-13
申请号：US11985879
申请日：2008-04-03
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F1/68
CPC分类号： G03H1/0891 , G03H1/0244 , G03H1/08 , G03H2001/0858 , G03H2210/30 , G03H2210/454 , G03H2223/12 , G03H2240/13 , G03H2240/23
摘要： A mass flow sensor is supported on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range.
摘要翻译：质量流量传感器支撑在取向<100>的N或P型硅衬底上。该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。

9. 发明申请

US20070017285A1 Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods 有权
标题翻译：微加工热质量流量传感器和插入式流量计及其制造方法
公开(公告)号：US20070017285A1
公开(公告)日：2007-01-25
申请号：US11157604
申请日：2005-06-21
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane. This mass flow sensor is operated with two sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates and a second circuit for measuring a flow rate in a second range of flow rates, to significantly increase range of flow rate measurements, while maintains a high degree of measurement accuracy.
摘要翻译：通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成直到底部介电薄膜层暴露。在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。该质量流量传感器用两组电路操作，第一电路用于测量第一流量范围内的流量，以及用于测量在第二流量范围内的流量的第二电路，以显着增加流量范围速率测量，同时保持高度的测量精度。

10. 发明申请

US20090158859A1 Micromachined Thermal Mass Flow Sensor With Self-Cleaning Capability And Methods Of Making the Same 有权
标题翻译：具有自清洁能力的微加工热质量流量传感器及其制作方法
公开(公告)号：US20090158859A1
公开(公告)日：2009-06-25
申请号：US11960261
申请日：2007-12-19
申请人： Liji Huang , Chih-Chang Chen , Yahong Yao , Gaofeng Wang
发明人： Liji Huang , Chih-Chang Chen , Yahong Yao , Gaofeng Wang
IPC分类号： G01F1/78 , B05D1/00
CPC分类号： G01F1/6845 , G01F1/6888 , G01F15/006
摘要： The current invention generally relates to Micro Electro Mechanical Systems (MEMS) thermal mass flow sensors for measuring the flow rate of a flowing fluid (gas/liquid) and the methods of manufacturing on single crystal silicon wafers. The said mass flow sensors have self-cleaning capability that is achieved via the modulation of the cavity of which the sensing elements locate on the top of the cavity that is made of a silicon nitride film; alternatively the sensing elements are fabricated on top of a binary silicon nitride/conductive polycrystalline silicon film under which is a porous silicon layer selective formed in a silicon substrate. Using polycrystalline silicon or the sensing elements as electrodes, an acoustic wave can be generated across the porous silicon layer which is also used for the thermal isolation of the sensing elements. The vibration or acoustic energy is effective to remove foreign materials deposited on top surface of the sensing elements that ensure the accuracy and enhance repeatability of the thermal mass flow sensing.
摘要翻译：本发明通常涉及用于测量流动流体（气体/液体）的流量的微机电系统（MEMS）热质量流量传感器以及在单晶硅晶片上的制造方法。所述质量流量传感器具有自清洁能力，其通过其感测元件位于由氮化硅膜制成的空腔顶部上的空腔的调制而实现; 或者，感测元件制造在二元氮化硅/导电多晶硅膜的顶部，在二元氮化硅/导电多晶硅膜的下方是选择性地形成在硅衬底中的多孔硅层。使用多晶硅或感测元件作为电极，可以跨多孔硅层产生声波，其也用于感测元件的热隔离。振动或声能有效地去除沉积在感测元件的顶表面上的异物，以确保精确度并增强热质量流量感测的重复性。

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