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    • 4. 发明授权
    • Method for manufacturing a micromechanical sensor element
    • 微机械传感器元件的制造方法
    • US07572661B2
    • 2009-08-11
    • US11223637
    • 2005-09-08
    • Hubert BenzelStefan FinkbeinerMatthias IllingFrank SchaeferSimon ArmbrusterGerhard LammelChristoph SchellingJoerg Brasas
    • Hubert BenzelStefan FinkbeinerMatthias IllingFrank SchaeferSimon ArmbrusterGerhard LammelChristoph SchellingJoerg Brasas
    • H01L21/00
    • B81C1/00047B81B2203/0109B81C2201/0115B81C2201/0116G01L9/0045
    • Described is a method for manufacturing a micromechanical sensor element and a micromechanical sensor element manufactured in particular using such a method which has a hollow space or a cavity and a membrane for detecting a physical variable. Different method steps are performed for manufacturing the sensor element, among other things, a structured etch mask having a plurality of holes or apertures being applied on a semiconductor substrate. Moreover, an etch process is used to create depressions in the semiconductor substrate beneath the holes in the structured etch mask. Anodization of the semiconductor material is subsequently carried out, the anodization taking place preferably starting from the created depressions in the semiconductor substrate. Due to this process, porous areas are created beneath the depressions, a lattice-like structure made of untreated, i.e., non-anodized, substrate material remaining between the porous areas and the depressions. This lattice-like structure extends preferably from the surface of the semiconductor into the depth. The etch mask for creating the depressions may be removed, optionally prior to or subsequent to the anodization. A temperature treatment is carried out for creating the hollow space and the membrane in the semiconductor substrate which forms the sensor element. During this process, the hollow space is created from the at least one area that has been rendered porous beneath a depression and the membrane above the hollow space is created from the lattice-like structure by rearranging the semiconductor material.
    • 描述了一种用于制造微机械传感器元件和微机械传感器元件的方法,特别是使用具有中空空间或空腔和用于检测物理变量的膜的方法制造的微机械传感器元件。 执行用于制造传感器元件的不同的方法步骤,其中包括施加在半导体衬底上的多个孔或孔的结构化蚀刻掩模。 此外,蚀刻工艺用于在结构化蚀刻掩模中的孔下面的半导体衬底中产生凹陷。 随后进行半导体材料的阳极氧化,阳极氧化发生优选从半导体衬底中产生的凹陷开始。 由于该过程,在凹陷下方产生多孔区域,由未处理的,即非阳极氧化的衬底材料制成的格状结构保留在多孔区域和凹陷之间。 这种格子状结构优选地从半导体的表面延伸到深度。 用于产生凹陷的蚀刻掩模可以任选地在阳极氧化之前或之后被去除。 进行温度处理,以形成形成传感器元件的半导体衬底中的中空空间和膜。 在该过程中,中空空间是从至少一个已经在凹陷下方多孔的区域产生的,并且通过重新排列半导体材料,从网格状结构产生中空空间之上的膜。
    • 10. 发明申请
    • Micromechanical sensor element
    • 微机械传感器元件
    • US20060063293A1
    • 2006-03-23
    • US11223637
    • 2005-09-08
    • Hubert BenzelStefan FinkbeinerMatthias IllingFrank SchaeferSimon ArmbrusterGerhard LammelChristoph SchellingJoerg Brasas
    • Hubert BenzelStefan FinkbeinerMatthias IllingFrank SchaeferSimon ArmbrusterGerhard LammelChristoph SchellingJoerg Brasas
    • H01L21/00
    • B81C1/00047B81B2203/0109B81C2201/0115B81C2201/0116G01L9/0045
    • Described is a method for manufacturing a micromechanical sensor element and a micromechanical sensor element manufactured in particular using such a method which has a hollow space or a cavity and a membrane for detecting a physical variable. Different method steps are performed for manufacturing the sensor element, among other things, a structured etch mask having a plurality of holes or apertures being applied on a semiconductor substrate. Moreover, an etch process is used to create depressions in the semiconductor substrate beneath the holes in the structured etch mask. Anodization of the semiconductor material is subsequently carried out, the anodization taking place preferably starting from the created depressions in the semiconductor substrate. Due to this process, porous areas are created beneath the depressions, a lattice-like structure made of untreated, i.e., non-anodized, substrate material remaining between the porous areas and the depressions. This lattice-like structure extends preferably from the surface of the semiconductor into the depth. The etch mask for creating the depressions may be removed, optionally prior to or subsequent to the anodization. A temperature treatment is carried out for creating the hollow space and the membrane in the semiconductor substrate which forms the sensor element. During this process, the hollow space is created from the at least one area that has been rendered porous beneath a depression and the membrane above the hollow space is created from the lattice-like structure by rearranging the semiconductor material.
    • 描述了一种用于制造微机械传感器元件和微机械传感器元件的方法,特别是使用具有中空空间或空腔和用于检测物理变量的膜的方法制造的微机械传感器元件。 执行用于制造传感器元件的不同的方法步骤,其中包括施加在半导体衬底上的多个孔或孔的结构化蚀刻掩模。 此外,蚀刻工艺用于在结构化蚀刻掩模中的孔下面的半导体衬底中产生凹陷。 随后进行半导体材料的阳极氧化,阳极氧化发生优选从半导体衬底中产生的凹陷开始。 由于该过程,在凹陷下方产生多孔区域,由未处理的,即非阳极氧化的衬底材料制成的格状结构保留在多孔区域和凹陷之间。 这种格子状结构优选地从半导体的表面延伸到深度。 用于产生凹陷的蚀刻掩模可以任选地在阳极氧化之前或之后被去除。 进行温度处理,以形成形成传感器元件的半导体衬底中的中空空间和膜。 在该过程中,中空空间是从至少一个已经在凹陷下方多孔的区域产生的,并且通过重新排列半导体材料,从网格状结构产生中空空间之上的膜。