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    • 7. 发明授权
    • Resistive-type humidity sensing structure with microbridge and method therefor
    • 具有微桥的电阻式湿度感测结构及其方法
    • US07770449B2
    • 2010-08-10
    • US11808660
    • 2007-06-12
    • Jung-Tai ChenChia-Yen LeeYii-Tay ChiouChun-Hsun Chu
    • Jung-Tai ChenChia-Yen LeeYii-Tay ChiouChun-Hsun Chu
    • G01N27/12
    • G01N27/048Y10T29/49101
    • A resistive-type humidity sensing structure with microbridge includes a substrate, a sensing portion, and two measuring electrodes. An isolated layer and a bridge are respectively formed on the substrate. The sensing portion includes a resistive and humidity sensing layer. Two measuring electrodes are formed on the resistive sensing layer corresponding to the bridge, so as to fix the sensing portion on the first isolated layer for measuring resistance values of the resistive sensing layer. The material of the humidity sensing layer changes its volume according to humidity, the length of the resistive sensing layer covered by the humidity sensing layer is warped, and the changes of the length of the material for the resistive sensing layer causes variations of the resistance value. Finally, two measuring electrodes are used to measure the humidity value.
    • 具有微桥的电阻型湿度检测结构包括基板,感测部分和两个测量电极。 在基板上分别形成隔离层和桥。 感测部分包括电阻和湿度感测层。 在与电桥相对应的电阻感测层上形成两个测量电极,以将感测部分固定在第一隔离层上,以测量电阻感测层的电阻值。 湿度传感层的材料根据湿度改变其体积,由湿度感测层覆盖的电阻感测层的长度变形,并且电阻感测层的材料长度的变化导致电阻值的变化 。 最后,使用两个测量电极来测量湿度值。
    • 8. 发明申请
    • Humidity sensing structure having a cantilever resistor and method for fabricating the same
    • 具有悬臂电阻的湿度传感结构及其制造方法
    • US20070188974A1
    • 2007-08-16
    • US11647216
    • 2006-12-29
    • Jung-Tai ChenChia-Yen LeeYii-Tay ChiouChun-Hsun Chu
    • Jung-Tai ChenChia-Yen LeeYii-Tay ChiouChun-Hsun Chu
    • H01G5/012
    • H01G5/18H01C10/14Y10T29/49099
    • A humidity sensing structure having a cantilever resistor and a method for fabricating the same are disclosed. The method includes providing a substrate having a first surface and a second surface; performing an oxidation process on the first surface and the second surface to form a first oxide layer and a second oxide layer respectively; forming a resistance sensing layer on the first oxide layer; forming a humidity sensing layer on the resistance sensing layer; forming in the substrate a through-hole penetrating the first oxide layer and the second oxide layer; and forming a cantilever in the through-hole such that both the humidity sensing layer and the resistance sensing layer are secured in position on the cantilever. In response to humidity changes, the humidity sensing layer varies in volume and in consequence the resistance sensing layer varies in length, allowing ambient humidity to be measured.
    • 公开了一种具有悬臂电阻的湿度检测结构及其制造方法。 该方法包括提供具有第一表面和第二表面的基底; 在所述第一表面和所述第二表面上进行氧化处理以分别形成第一氧化物层和第二氧化物层; 在所述第一氧化物层上形成电阻感测层; 在电阻感测层上形成湿度感测层; 在基板上形成穿透第一氧化物层和第二氧化物层的通孔; 并且在通孔中形成悬臂,使得湿度感测层和电阻感测层都固定在悬臂上的适当位置。 响应于湿度变化,湿度感测层的体积变化,因此电阻感测层的长度变化,允许测量环境湿度。
    • 10. 发明授权
    • Humidity sensing structure having a cantilever resistor and method for fabricating the same
    • 具有悬臂电阻的湿度传感结构及其制造方法
    • US07523643B2
    • 2009-04-28
    • US11647216
    • 2006-12-29
    • Jung-Tai ChenChia-Yen LeeYii-Tay ChiouChun-Hsun Chu
    • Jung-Tai ChenChia-Yen LeeYii-Tay ChiouChun-Hsun Chu
    • G01N27/12G01N7/00G01N19/10H01C17/06
    • H01G5/18H01C10/14Y10T29/49099
    • A humidity sensing structure having a cantilever resistor and a method for fabricating the same are disclosed. The method includes providing a substrate having a first surface and a second surface; performing an oxidation process on the first surface and the second surface to form a first oxide layer and a second oxide layer respectively; forming a resistance sensing layer on the first oxide layer; forming a humidity sensing layer on the resistance sensing layer; forming in the substrate a through-hole penetrating the first oxide layer and the second oxide layer; and forming a cantilever in the through-hole such that both the humidity sensing layer and the resistance sensing layer are secured in position on the cantilever. In response to humidity changes, the humidity sensing layer varies in volume and in consequence the resistance sensing layer varies in length, allowing ambient humidity to be measured.
    • 公开了一种具有悬臂电阻的湿度检测结构及其制造方法。 该方法包括提供具有第一表面和第二表面的基底; 在所述第一表面和所述第二表面上进行氧化处理以分别形成第一氧化物层和第二氧化物层; 在所述第一氧化物层上形成电阻感测层; 在电阻感测层上形成湿度感测层; 在基板上形成穿透第一氧化物层和第二氧化物层的通孔; 并且在通孔中形成悬臂,使得湿度感测层和电阻感测层都固定在悬臂上的适当位置。 响应于湿度变化,湿度感测层的体积变化,因此电阻感测层的长度变化,允许测量环境湿度。