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1. 发明申请

US20090091758A1 Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation 有权
标题翻译：构造偏移角自补偿基本消色差延迟器以补偿光束扫描的方法
公开(公告)号：US20090091758A1
公开(公告)日：2009-04-09
申请号：US12290787
申请日：2008-11-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统补偿光谱椭偏仪和/或偏振计系统。

2. 发明授权

US07450231B2 Deviation angle self compensating substantially achromatic retarder 有权
标题翻译：偏差角自补偿基本上消色差延迟器
公开(公告)号：US07450231B2
公开(公告)日：2008-11-11
申请号：US11633138
申请日：2006-12-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B5/3083 , G01J1/0407 , G01N21/211 , G01N2021/213 , G02B26/06
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译：用于宽光谱范围（例如，190-1700nm）旋转补偿光谱椭偏仪和/或偏振计系统的基本上无色多元素补偿器系统。多个全内反射进入进入的电磁辐射束的延迟，并且这些元件被定向成使得由延迟元件的位置和/或旋转的变化而导致的净延迟与输入光束角的变化最小化。

3. 发明授权

US07304737B1 Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence 有权
标题翻译：旋转或可旋转的补偿器系统以多个入射角对样品上的斑点提供畸变校正的电磁辐射
公开(公告)号：US07304737B1
公开(公告)日：2007-12-04
申请号：US11497920
申请日：2006-08-03
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/212 , G01N2021/213 , G01N2021/215
摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
摘要翻译：光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。

4. 发明授权

US6100981A Dual horizontally oriented triangle shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：双水平取向三角形光学延迟元件，用于光谱椭偏仪和偏振计系统
公开(公告)号：US6100981A
公开(公告)日：2000-08-08
申请号：US225371
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G01J4/00 , G02B5/30
CPC分类号： G01J4/00 , G02B5/3083 , G01J2003/2866
摘要： A retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second triangular shaped elements arranged so that the first triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and downward from an upper point, with a third side which is oriented essentially horizontally and is continuous with, and present below the first and second sides; and so that the second triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and upward from a lower point, with a third side which is oriented essentially horizontally and is continuous with, and present above the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
摘要翻译：一种延迟器系统，用于在电磁辐射束的正交分量之间输入延迟，具有第一和第二三角形元件，其布置成使得如在侧视图中看到的第一三角形元件呈现向左突出的第一和第二侧并且从上点向下和向下，第三侧基本上水平地定向并且与第一和第二侧连续并存在下方; 并且使得从侧视图看出的第二三角形元件呈现出从第一和第二侧面向下突出的第一和第二侧面，其中第三侧面基本上水平地定向并与之连续，并且目前在第一和第二边。在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转电磁辐射束。

5. 发明授权

US6084674A Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭偏仪和偏振计系统的平行四边形光学延迟器元件
公开(公告)号：US6084674A
公开(公告)日：2000-07-04
申请号：US225118
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G02B5/30 , G01J4/00
CPC分类号： G02B5/3083 , G01J2003/2866
摘要： A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides which are parallel to one another, with both the right and left sides being oriented at an angle to the top and bottom sides. The retarder system is made of a material with an index of refraction greater than that of a surrounding ambient. In use an input beam of electromagnetic radiation is caused to enter the right or left side of the retarder system, is diffracted inside the retarder system, and follows a locus which causes it to essentially totally internally reflect from internal interfaces of both the top and bottom sides, then emerge from the retarder system at the opposite, left or right respectively, side in a direction which is essentially undeviated and undisplaced from the locus of the input beam of electromagnetic radiation, even when the retarder system is caused to rotate about an axis coincident with the locus of the electromagentic beam.
摘要翻译：公开了一种用于椭偏仪和偏振计的延迟器系统及其方法。延迟器系统是平行四边形元件，从侧视图看，具有彼此平行的顶侧和底侧。缓速器系统还具有彼此平行的左右两侧，左右两侧与顶侧和底侧成一定角度。缓速器系统由折射率大于周围环境的材料制成。在使用中，导致电磁辐射的输入束进入延迟器系统的右侧或左侧，在延迟器系统内部衍射，并且跟随一个轨迹，使得其基本上完全内部从顶部和底部的内部接口反射侧面，然后即使当延迟器系统绕轴线旋转时，从相对的左侧或右侧的延迟器系统以从电磁辐射的输入光束的轨迹基本上未变形和未放置的方向出现与电磁光束的轨迹一致。

6. 发明授权

US07907280B2 Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation 有权
标题翻译：构造偏移角自补偿基本消色差延迟器以补偿光束扫描的方法
公开(公告)号：US07907280B2
公开(公告)日：2011-03-15
申请号：US12290787
申请日：2008-11-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统补偿光谱椭偏仪和/或偏振计系统。

7. 发明授权

US6141102A Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭偏仪和偏光计系统的单三角形光学延迟器元件
公开(公告)号：US6141102A
公开(公告)日：2000-10-31
申请号：US232257
申请日：1999-01-19
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G01J4/00
CPC分类号： G01J4/00 , G01J2003/2866
摘要： Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
摘要翻译：公开了一种用于在电磁辐射束的正交分量之间输入延迟的三角形延迟器系统。从侧视图看，三角形元件具有从上部向左和向右突出的第一和第二侧面。第三面基本上水平地定向并且与第一和第二面连续并存在于第一和第二面之下。在分光椭偏仪/偏振计系统中使用时，输入的电磁辐射束在传播方向上离开，即传播方向基本上未发生变化，并且从其入射方向未脱离，即使延迟器系统围绕光束电磁辐射。

8. 发明授权

US5956145A System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems 失效
公开(公告)号：US5956145A
公开(公告)日：1999-09-21
申请号：US17423
申请日：1998-02-02
申请人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
发明人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
IPC分类号： G01J3/28 , G01J4/00 , G01N21/21
CPC分类号： G01N21/211 , G01J4/00 , G01J2003/2866
摘要： Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system. The present invention also improves the ability of an ellipsometer or polarimeter and the like system fitted with present invention components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterizing PSI and DELTA determining data values, wherein a sample system per se. investigating polarized beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. Practice of the present invention also allows determination of the "Handedness" of a polarized beam of light, and of sample system Jones or Mueller Matrix component values. As well, the present invention provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter system.

9. 发明授权

US5757494A System and method for improving data acquisition capability in spectroscopic ellipsometers 失效
标题翻译：用于提高光谱椭偏仪数据采集能力的系统和方法
公开(公告)号：US5757494A
公开(公告)日：1998-05-26
申请号：US422346
申请日：1995-04-14
申请人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam
发明人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam
IPC分类号： C23C14/54 , G01J3/447 , G01J4/00 , G01N21/21 , G01N23/20
CPC分类号： C23C14/54 , G01J3/447 , G01J4/00 , G01N21/211 , G01N23/20058
摘要： The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible. The present invention allows obtaining accurate and precise sample system PSI and DELTA Values from an Ellipsometer System in which a polarized beam of light is oriented at other than a Principal of Brewster Angle of Incidence to a sample system, allows determination of DELTA values in ranges otherwise not impossible, allows determination of the "Handedness" of a polarized beam of light, and provides means for determining all of Stokes Vector and Mueller Matrix component values. The present invention also provides means for making all system components added to a conventional ellipsometer system essentially end user transparent when desired, without removal thereof from said ellipsometer system.
摘要翻译：本发明一般适用于使用相对较大波长范围的光谱可旋转和旋转元件椭偏仪。公开了一种用于控制偏振光束的偏振状态的系统和方法，使得其处于用于测量由与样品系统相互作用产生的所述偏振光束的变化的极化状态检测器的灵敏度，降噪，测量误差等。举例说明的是一种系统和使用方法，用于在范围内同时设置测量的椭圆偏振ALPHA和椭圆偏振BETA参数值（或等价物），其范围内的传递函数的灵敏度和使用所述椭圆偏振ALPHA的数学回归和发现表征PSI和DELTA常数值的样本系统的计算中的椭偏测量值BETA值，测量噪声和误差等都是可忽略的。本发明允许从椭圆偏振仪系统获得精确和精确的样本系统PSI和DELTA值，其中偏振光束定向在除了布鲁斯特发生角度的主体之外的样本系统，允许以其它方式确定范围的DELTA值不是不可能的，允许确定偏振光束的“携带”，并且提供用于确定所有斯托克斯矢量和米勒矩阵分量值的装置。本发明还提供了用于使得添加到常规椭偏仪系统的所有系统部件基本上使终端用户在需要时不透明的装置，而不从所述椭偏仪系统中移除。

10. 发明申请

US20110188040A1 Mounting for deviation angle self compensating substantially achromatic retarder 有权
标题翻译：安装偏移角自补偿基本上消色差延迟器
公开(公告)号：US20110188040A1
公开(公告)日：2011-08-04
申请号：US13065090
申请日：2011-03-14
申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00 , G01J4/04
CPC分类号： G01J4/00 , G01J4/04
摘要： A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种用于配置和应用用于将相对相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中所述系统包括用于宽光谱范围的基本上无色的多元件延迟器系统（例如，190 -1700nm）旋转补偿光谱椭偏仪和/或偏振计系统。

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