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1. 发明授权

US08597528B1 Method and system for defining a read sensor using an ion mill planarization 有权
标题翻译：使用离子磨机平面化定义读取传感器的方法和系统
公开(公告)号：US08597528B1
公开(公告)日：2013-12-03
申请号：US13076103
申请日：2011-03-30
申请人： Anup G. Roy , Ming Mao
发明人： Anup G. Roy , Ming Mao
IPC分类号： B44C1/22
CPC分类号： H01L43/12 , G01R33/093 , G01R33/098 , G11B5/3163 , G11B5/3932
摘要： A method and system for fabricating a magnetic transducer is described. A magnetic junction is defined from the magnetoresistive stack. The magnetic junction has a top and a plurality of sides. The step of defining the magnetic junction redeposits a portion of the magnetoresistive stack and forms fencing adjacent to the top of the magnetic junction. At least one hard bias structure is provided after the magnetic junction is defined. A first portion of the at least one hard bias structure is substantially adjacent to the magnetoresistive junction in a track-width direction. The magnetic junction is ion beam planarized, thereby substantially removing the fencing.
摘要翻译：描述了用于制造磁换能器的方法和系统。从磁阻叠层定义磁结。磁性接头具有顶部和多个侧面。限定磁结的步骤重新沉积磁阻堆叠的一部分并且形成与磁结的顶部相邻的围栏。在确定了磁结后，提供了至少一个硬偏置结构。至少一个硬偏压结构的第一部分基本上与轨道宽度方向上的磁阻结相邻。磁结是离子束平坦化的，从而基本上除去围栏。

2. 发明授权

US08611054B1 Antiferromagnetically-coupled soft bias magnetoresistive read head, and fabrication method therefore 有权
标题翻译：反铁磁耦合软偏置磁阻读头，因此制造方法
公开(公告)号：US08611054B1
公开(公告)日：2013-12-17
申请号：US13444723
申请日：2012-04-11
申请人： Changhe Shang , Daniele Mauri , Kuok San Ho , Anup G. Roy , Ming Mao
发明人： Changhe Shang , Daniele Mauri , Kuok San Ho , Anup G. Roy , Ming Mao
IPC分类号： G11B5/39
CPC分类号： G11B5/3932 , G01R33/093 , G11B5/3909 , G11B2005/3996 , H01F10/3218 , H01F10/3254
摘要： A magnetic read transducer is described with a magnetoresistive sensor that has a free layer, and an antiferromagnetically-coupled (AFC) soft bias layer for magnetically biasing the free layer. The free layer has a first edge in a track width direction along an air-bearing surface (ABS). At least a portion of the AFC soft bias layer is conformal to at least a portion of a second edge of the free layer, and situated to form a magnetic moment at an angle with respect to a center line of the free layer. The center line of the free layer extends in the same direction as the free layer first edge that is in the track width direction along the ABS.
摘要翻译：用具有自由层的磁阻传感器和用于磁偏置自由层的反铁磁耦合（AFC）软偏置层来描述磁读取传感器。自由层具有沿空气轴承表面（ABS）的轨道宽度方向上的第一边缘。 AFC柔性偏置层的至少一部分与自由层的第二边缘的至少一部分共形，并且位于相对于自由层的中心线形成一个角度的磁矩。自由层的中心线沿与ABS沿轨道宽度方向的自由层第一边缘相同的方向延伸。

3. 发明授权

US08607438B1 Method for fabricating a read sensor for a read transducer 失效
标题翻译：读取传感器的读取传感器的制造方法
公开(公告)号：US08607438B1
公开(公告)日：2013-12-17
申请号：US13309357
申请日：2011-12-01
申请人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
发明人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3903 , G01R33/093 , G11B5/3163
摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
摘要翻译：制造用于换能器的读取传感器。传感器具有对应于传感器的场区域和传感器区域。传感器堆叠被沉积。提供了包括硬掩模和磁场掩模的混合掩模。硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。场掩模覆盖硬掩模的场部分。场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。传感器从传感器堆叠在轨道宽度方向上定义。硬偏置层被沉积。硬偏置层的一部分位于场掩模上。邻近传感器区域的一部分硬偏压层被密封。场地面罩被提起。传感器平坦化。

4. 发明授权

US08760823B1 Method and system for providing a read transducer having soft and hard magnetic bias structures 有权
标题翻译：用于提供具有软和硬磁偏置结构的读取换能器的方法和系统
公开(公告)号：US08760823B1
公开(公告)日：2014-06-24
申请号：US13332313
申请日：2011-12-20
申请人： Laurence L. Chen , Anup G. Roy , Yunfei Ding , Ming Mao , Amritpal S. Rana , Daniele Mauri
发明人： Laurence L. Chen , Anup G. Roy , Yunfei Ding , Ming Mao , Amritpal S. Rana , Daniele Mauri
IPC分类号： G11B5/39
CPC分类号： G11B5/3903 , G11B5/3912 , G11B5/3932 , G11B5/398
摘要： A method and system provide a magnetic transducer having an air-bearing surface (ABS). The magnetic transducer includes a first shield, a read sensor, at least one soft magnetic bias structure and at least one hard bias structure. The read sensor includes a sensor layer that has at least one edge in the track width direction along the ABS. The soft magnetic bias structure(s) are adjacent to the edge(s) of the sensor layer. The soft magnetic bias structure has a first permeability. The soft bias structure(s) are between the read sensor and the hard bias structure(s). The hard bias structure(s) are adjacent to a portion of the soft bias structure(s) and have a second permeability. The first permeability is at least ten multiplied by the second permeability.
摘要翻译：一种方法和系统提供具有空气轴承表面（ABS）的磁换能器。磁换能器包括第一屏蔽，读取传感器，至少一个软磁偏置结构和至少一个硬偏压结构。读取传感器包括沿ABS沿轨道宽度方向具有至少一个边缘的传感器层。软磁偏置结构与传感器层的边缘相邻。软磁偏置结构具有第一磁导率。柔性偏置结构位于读取传感器和硬偏置结构之间。硬偏压结构与软偏压结构的一部分相邻并且具有第二磁导率。第一渗透率至少为乘以第二渗透率的十倍。

5. 发明申请

US20070045102A1 Method of sputter depositing an alloy on a substrate 审中-公开
标题翻译：将合金溅射沉积在基底上的方法
公开(公告)号：US20070045102A1
公开(公告)日：2007-03-01
申请号：US11209907
申请日：2005-08-23
申请人： Chih-Ling Lee , Adrian Devasahayam , Ming Mao , Chih-Ching Hu , Vincent Ip , Piero Sferlazzo
发明人： Chih-Ling Lee , Adrian Devasahayam , Ming Mao , Chih-Ching Hu , Vincent Ip , Piero Sferlazzo
IPC分类号： C23C14/00
CPC分类号： C23C14/352 , C23C14/165
摘要： An improved planetary sputter deposition method for sputter depositing an alloy on a substrate wherein the sputter deposited amount, or thickness, of a specific material of the alloy can be controlled so that different substrates can be provided with an alloy having a different composition, i.e. having different percentages of the same materials, thus, reducing the costs of stockpiling multiple alloy targets. The method generally includes providing a substrate and a plurality of targets with each of the plurality of targets being composed of one or more magnetic materials. The targets are sputtered, in sequence, to deposit each of the materials of the plurality of targets on the substrate to provide at least one laminate defining an alloy.
摘要翻译：一种用于在基板上溅射沉积合金的改进的行星溅射沉积方法，其中可以控制合金的特定材料的溅射沉积量或厚度，使得可以提供具有不同组成的合金，即具有不同百分比的相同材料，从而降低储存多种合金靶材的成本。该方法通常包括提供基底和多个靶，其中多个靶中的每一个由一个或多个磁性材料构成。按顺序溅射靶，以将多个靶材的每种材料沉积在基底上，以提供限定合金的至少一个层压板。

6. 发明申请

US20060292705A1 Method and process for fabricating read sensors for read-write heads in mass storage devices 审中-公开
标题翻译：在大容量存储设备中制造用于读写头的读取传感器的方法和过程
公开(公告)号：US20060292705A1
公开(公告)日：2006-12-28
申请号：US11166322
申请日：2005-06-24
申请人： Hariharakeshave Hegde , Ming Mao , Boris Druz , Adrian Devasahayam
发明人： Hariharakeshave Hegde , Ming Mao , Boris Druz , Adrian Devasahayam
IPC分类号： H01L21/00
CPC分类号： H01L43/12 , G11B5/3163 , G11B5/3169 , G11B5/3903 , G11B5/3929
摘要： Method and process for fabricating a device structure for a read head of a mass storage device. A polish stop layer formed of a relatively hard material, such as diamond-like carbon, is positioned between a layer stack and a resist mask used to mask regions of the layer stack during ion milling that removes portions of the layer stack to define a read sensor. The resist mask is removed, after the read sensor is defined, by a planarization process, which eliminates the need to lift-off the resist mask with a conventional chemical-based process. An electrical isolation layer of a material, such as Al2O3, is formed on the masked read sensor. In addition or alternatively, the electrical isolation layer may be formed using an atomic layer deposition (ALD) process performed at an elevated temperature that would otherwise hard bake the resist mask.
摘要翻译：制造用于大容量存储装置的读取头的装置结构的方法和工艺。由相对硬的材料（例如类金刚石碳）形成的抛光停止层位于层叠和抗蚀剂掩模之间，用于在离子铣削期间掩蔽层堆叠的区域，其移除层堆叠的部分以限定读取传感器。在通过平坦化处理定义读取传感器之后，去除抗蚀剂掩模，这消除了用常规的基于化学的方法剥离抗蚀剂掩模的需要。在掩蔽的读取传感器上形成诸如Al 2 O 3 3的材料的电隔离层。另外或替代地，电隔离层可以使用在否则将硬烘烤抗蚀剂掩模的升高的温度下进行的原子层沉积（ALD）工艺来形成。

7. 发明授权

US06934131B2 Spin valve with thermally stable pinned layer structure having ruthenium oxide specular reflecting layer 失效
标题翻译：具有热稳定钉扎层结构的旋转阀具有氧化钌镜面反射层
公开(公告)号：US06934131B2
公开(公告)日：2005-08-23
申请号：US10341281
申请日：2003-01-13
申请人： Ming Mao , Adrian J. Devasahayam , Jacques C. S. Kools , Chih-Ling Lee , Chih-Ching Hu , Patricia L. Cox
发明人： Ming Mao , Adrian J. Devasahayam , Jacques C. S. Kools , Chih-Ling Lee , Chih-Ching Hu , Patricia L. Cox
IPC分类号： G11B5/39
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3906 , G11B2005/3996 , Y10T29/49044
摘要： A thermally stable spin valve sensor having an increased GMR ratio by virtue of an AP pinned layer structure in which the first and second pinned layers are separated by an AP coupling layer having a nano-oxide layer formed as an oxidized surface portion of the AP coupling layer. The nano-oxide layer provides an increase in the specular scattering, and in turn, an increase in the GMR ratio.
摘要翻译：一种热稳定的自旋阀传感器，其具有通过AP钉扎层结构增加的GMR比，其中第一和第二被钉扎层由具有形成为AP耦合器的氧化表面部分的纳米氧化物层的AP耦合层分开层。纳米氧化物层提供了镜面散射的增加，并且进而增加了GMR比。

8. 发明授权

US06800565B2 Method of forming thin oxidation layer by cluster ion beam 失效
公开(公告)号：US06800565B2
公开(公告)日：2004-10-05
申请号：US10341282
申请日：2003-01-13
申请人： Chih-Ching Hu , Adrian J. Devasahayam , Patricia L. Cox , Chih-Ling Lee , Ming Mao , Jacques C. S. Kools
发明人： Chih-Ching Hu , Adrian J. Devasahayam , Patricia L. Cox , Chih-Ling Lee , Ming Mao , Jacques C. S. Kools
IPC分类号： H01L2131
CPC分类号： C23C14/5833 , C23C8/02 , C23C26/00 , C23C28/00 , G11B5/84
摘要： A method of forming a thin-film magnetic element, such as a TMR element or a spin valve element, on a substrate wherein at least a surface portion of a nonmagnetic metal layer is oxidized by cluster ion beam (CIB) oxidation. Specifically, the method comprises depositing a first magnetic layer on a substrate, then depositing a nonmagnetic metal layer on the first magnetic layer. At least a top surface of the nonmagnetic layer is oxidized by CIB oxidation. In one embodiment, only a top surface portion is oxidized such that a nano-oxide layer (NOL) is formed on a nonmagnetic conductive layer. In another embodiment, the nonmagnetic metal layer is oxidized throughout it's thickness such that the layer is converted to a nonmagnetic insulating film. After oxidation, a second magnetic layer is deposited on the oxidized layer. Oxidizing by cluster ion beam oxidation advantageously comprises mixing a pressurized inert carrier gas with oxygen gas to form a gas mixture and passing the gas mixture into a low pressure vacuum to produce a supersonic gas jet, whereby expansion occurs in the jet to cause formation of clusters of inert gas and oxygen atoms and molecules. The clusters are then ionized and focused into a cluster ion beam and accelerated toward the top surface of the nonmagnetic metal layer to bombard the top surface and react the ionized oxygen atoms and molecules with at least the top surface of the nonmagnetic metal layer.

9. 发明授权

US08547667B1 Method and system for providing a hard bias structure in a magnetic recording transducer 有权
标题翻译：在磁记录传感器中提供硬偏置结构的方法和系统
公开(公告)号：US08547667B1
公开(公告)日：2013-10-01
申请号：US12324735
申请日：2008-11-26
申请人： Anup Ghosh Roy , Ming Mao , Mahendra Pakala
发明人： Anup Ghosh Roy , Ming Mao , Mahendra Pakala
IPC分类号： G11B5/127
CPC分类号： G11B5/3932
摘要： A method and system for providing a magnetic transducer is described. The method and system include providing a seed layer and providing at least one adjustment layer on the seed layer. The method and system also include providing a hard bias structure on the at least one adjustment layer. The seed layer has a first template including a first template dimension and a first texture. The at least one adjustment layer has a second template including a second template dimension and a second texture. The hard bias structure has a third template including a third template dimension and a third texture. The second template is between the first template and the third template.
摘要翻译：描述了一种用于提供磁换能器的方法和系统。该方法和系统包括提供种子层并在种子层上提供至少一个调节层。该方法和系统还包括在至少一个调节层上提供硬偏压结构。种子层具有包括第一模板尺寸和第一纹理的第一模板。所述至少一个调整层具有包括第二模板尺寸和第二纹理的第二模板。硬偏置结构具有包括第三模板尺寸和第三纹理的第三模板。第二个模板位于第一个模板和第三个模板之间。

10. 发明授权

US07405085B2 Amorphous soft magnetic shielding and keeper for MRAM devices 失效
标题翻译：用于MRAM器件的无定形软磁屏蔽和保持器
公开(公告)号：US07405085B2
公开(公告)日：2008-07-29
申请号：US10943510
申请日：2004-09-15
申请人： Jacques Constant Stefan Kools , Ming Mao , Thomas Schneider , Jinsong Wang , Michael Gutkin
发明人： Jacques Constant Stefan Kools , Ming Mao , Thomas Schneider , Jinsong Wang , Michael Gutkin
IPC分类号： H01L21/00
CPC分类号： H01L27/222 , H01L43/08 , H01L43/12
摘要： An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.
摘要翻译：用于在MRAM器件中形成屏蔽和保持器应用的无定形软磁薄膜材料。可以在存在磁场的情况下使用物理气相沉积（PVD）沉积非晶软磁材料，以便在多层金属化工艺中形成屏蔽层和保持器。软磁性材料可以是非晶金属合金，例如CoZrX，其中X可以是Ta，Nb，Pd和/或Rh。

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