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1. 发明授权

US4647782A Charged particle beam exposure apparatus 失效
标题翻译：带电粒子束曝光装置
公开(公告)号：US4647782A
公开(公告)日：1987-03-03
申请号：US800918
申请日：1985-11-25
申请人： Hirotsugu Wada , Shunichi Sano , Mamoru Nakasuji , Ryoichi Yoshikawa
发明人： Hirotsugu Wada , Shunichi Sano , Mamoru Nakasuji , Ryoichi Yoshikawa
IPC分类号： H01L21/027 , H01J37/30 , H01J37/304 , H01J37/317 , H01L21/30
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3007 , H01J37/304 , H01J37/3174 , H01L21/30 , H01J2237/15 , H01J2237/30455 , H01J2237/31776
摘要： The dimensions of the cross section of an electron beam emitted from a beam source are changed by deflectors interposed between a pair of aperture masks and are position-corrected by beam position correction deflectors. The electron beam is then irradiated onto a wafer. In accordance with beam dimension signals from a CPU, a correction signal generating circuit supplies correction signals to a beam position correction circuit. The circuit supplies beam position correction signals to the deflectors.
摘要翻译：从光束源发射的电子束的横截面的尺寸由插入在一对孔径掩模之间的偏转器改变，并且由光束位置校正偏转器进行位置校正。然后将电子束照射到晶片上。根据来自CPU的光束尺寸信号，校正信号发生电路向光束位置校正电路提供校正信号。电路将光束位置校正信号提供给偏转器。

2. 发明授权

US4480284A Electrostatic chuck plate 失效
标题翻译：静电吸盘
公开(公告)号：US4480284A
公开(公告)日：1984-10-30
申请号：US428341
申请日：1982-09-29
申请人： Toru Tojo , Ichiro Mori , Shunichi Sano
发明人： Toru Tojo , Ichiro Mori , Shunichi Sano
IPC分类号： B23Q3/15 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6831 , H01L21/6833
摘要： An electrostatic chuck plate comprises an electrode plate made of electrically conductive material and a dielectric layer formed on one surface of the electrode plate by flame-spraying dielectric material. The surface region of the dielectric layer is impregnated with plastic material, and the surface of the dielectric layer is smooth and flat. A sample is electrostatically attracted toward the electrode plate and is thus held on the smooth and flat surface of the dielectric layer.
摘要翻译：静电卡盘包括由导电材料制成的电极板和通过火焰喷涂介电材料形成在电极板的一个表面上的电介质层。电介质层的表面区域用塑料材料浸渍，电介质层的表面光滑平坦。样品被静电吸引到电极板上，因此被保持在电介质层的光滑平坦的表面上。

3. 发明授权

US4116658A Method of coating substrate for liquid crystal display device 失效
标题翻译：涂布液晶显示装置的方法
公开(公告)号：US4116658A
公开(公告)日：1978-09-26
申请号：US863048
申请日：1977-12-21
申请人： Shunichi Sano
发明人： Shunichi Sano
IPC分类号： C03C17/34 , G02F1/1337 , C03C17/02 , C03C17/30
CPC分类号： G02F1/133784 , C03C17/3411 , C03C17/3417
摘要： A method of treating the substrate for a liquid crystal display device to permit unidirectional alignment of the liquid crystal molecules, comprising the steps of forming a silicon dioxide film on the electrode-bearing surface of a substrate, laminating a silicon film on the silicon dioxide film, rubbing the surface of the silicon film in a predetermined direction, and subjecting the substrate a heat treatment.
摘要翻译：一种处理液晶显示装置的基板以允许液晶分子的单向排列的方法，包括以下步骤：在基板的电极承载表面上形成二氧化硅膜，在二氧化硅膜上层压硅膜在规定的方向上摩擦硅膜的表面，对基板进行热处理。

4. 发明授权

US4048633A Liquid crystal driving system 失效
标题翻译：液晶驱动系统
公开(公告)号：US4048633A
公开(公告)日：1977-09-13
申请号：US557883
申请日：1975-03-12
申请人： Shunichi Sano
发明人： Shunichi Sano
IPC分类号： G09G3/36 , G06F3/14
CPC分类号： G09G3/3622
摘要： Disclosed is a system for driving a liquid crystal provided between electrodes disposed within a transparent receptacle in a manner spaced from each other. In order to drive the liquid crystal the electrodes are applied with a square-shaped pulse voltage in which the absolute value of the ratio of the third harmonics wave component amplitude to the fundamental wave component amplitude is below 1/3.

5. 发明授权

US4810293A Anti-corrosive paint composition 失效
标题翻译：防腐涂料组成
公开(公告)号：US4810293A
公开(公告)日：1989-03-07
申请号：US52110
申请日：1987-05-19
申请人： Shunichi Sano
发明人： Shunichi Sano
IPC分类号： C09D5/08 , B23K35/22 , C09D5/10 , C09D183/00 , C09D183/02 , C04B9/02 , C09K3/00
CPC分类号： C09D5/106 , B23K35/226 , C09D183/02
摘要： An anti-corrosive paint composition, which contains a hydrolyzed condensate of tetraalkoxy silicate having an alkyl group where carbon number is 1 to 5 as vehicle, thereby adding zinc dust and titanium oxide which extensively improves the heat resistance while holding basic conditions required for the primary anti-corrosive paint for steel, i.e., exposure anti-corrosive property, compatibility to top coat, welding and gas cutting properties and adhesion to steel plate.
摘要翻译：一种防腐涂料组合物，其含有碳数为1〜5的烷基的四烷氧基硅酸酯的水解缩合物作为载体，从而添加锌粉和氧化钛，其广泛地提高耐热性，同时保持初级钢的防腐蚀涂料，即暴露防腐蚀性能，与面漆的兼容性，焊接和气体切割性能以及对钢板的粘合性。

6. 发明授权

US4366383A Electron beam type pattern transfer apparatus 失效
标题翻译：电子束式图案转印装置
公开(公告)号：US4366383A
公开(公告)日：1982-12-28
申请号：US165618
申请日：1980-07-03
申请人： Shunichi Sano , Toshiaki Shinozaki , Ichiro Mori
发明人： Shunichi Sano , Toshiaki Shinozaki , Ichiro Mori
IPC分类号： H01L21/027 , H01J37/317 , H01L21/30 , A61K27/02 , G01N21/64
CPC分类号： H01J37/3175 , B82Y10/00 , B82Y40/00 , H01L21/30 , H01J2237/04735 , H01J2237/04922 , H01J2237/142 , H01J2237/31779 , Y10S505/879
摘要： An electron beam type pattern transfer apparatus has a photoelectric mask and a sample in a vacuum container made of non-magnetic material. The photoelectric mask is adapted to receive an ultraviolet ray from a light source and emit photoelectrons corresponding to a predetermined transfer pattern and the sample is disposed in parallel with the photoelectric mask with a predetermined distance left therebetween and illuminated with the photoelectrons to form a resist image thereon which corresponds to the transfer pattern. A power source for applying a voltage for accelerating the photoelectrons emitted is connected between the photoelectric mask and the sample. A pair of focusing magnets are disposed around the axis of the vacuum container such that they are located one at one outer side and one in an opposite outer side of the vacuum container to permit a vertical magnetic field to be created between the photoelectric mask and the sample. The focusing magnets have superconductive coils and are driven in a persistent mode.
摘要翻译：电子束型图案转印装置在由非磁性材料制成的真空容器中具有光电掩模和样品。光电掩模适于从光源接收紫外线并发射对应于预定转印图案的光电子，并且将样品与光电掩模平行放置并保持在预定距离处并用光电子照射以形成抗蚀剂图像对应于转印图案。用于施加用于加速发射的光电子的电压的电源连接在光电掩模和样品之间。一对聚焦磁铁设置在真空容器的轴线周围，使得它们位于真空容器的一个外侧和一个在相对的外侧中，从而允许在光电面罩和样品。聚焦磁体具有超导线圈并以持续模式驱动。

7. 发明授权

US3975766A Color television receiver 失效
标题翻译：彩色电视接收机
公开(公告)号：US3975766A
公开(公告)日：1976-08-17
申请号：US572645
申请日：1975-04-29
申请人： Shunichi Sano , Kohichi Kasahara
发明人： Shunichi Sano , Kohichi Kasahara
IPC分类号： H04N9/18 , H04N9/28 , H01J29/50 , H01J31/00
CPC分类号： H04N9/28
摘要： A color television receiver comprising a color television receiving tube which is provided with three horizontally arranged electron guns so designed as to emit three electron beams and cause said beams to be converged at a point outside of the fluorescent screen of the color television receiving tube; a deflection yoke fitted to the color television receiving tube and so constructed as to cause a horizontal deflection magnetic field created by said yoke to display a pincushion-shaped intensity distribution and a vertical deflection magnetic field produced thereby to present a barrel-shaped intensity distribution; and a delay circuit for causing at least two of the three primary color signals of color television which modulate the three electron beams to be successively delayed from the foremost one at the rate of a prescribed length of time corresponding to the intervening spacing of the three electron beams impinging on the fluorescent screen of the color television receiving tube.
摘要翻译：一种彩色电视接收机，包括彩色电视接收管，该彩色电视接收管设置有三个水平布置的电子枪，设计成发射三束电子束，并使所述光束在彩色电视接收管的荧光屏外侧点聚焦; 安装在彩色电视接收管上的偏转线圈构造成使得由所述磁轭产生的水平偏转磁场显示出由此产生的枕形强度分布和垂直偏转磁场，以呈现桶形强度分布; 以及延迟电路，用于使彩色电视的三个原色信号中的至少两个调制三个电子束，以与三个电子的中间间隔相对应的规定时间长度的速率从最前面的一个连续延迟撞击在彩色电视接收管的荧光屏上的光束。

8. 发明授权

US4621371A Method of forming by projection an integrated circuit pattern on a semiconductor wafer 失效
标题翻译：通过在半导体晶片上投影集成电路图案来形成方法
公开(公告)号：US4621371A
公开(公告)日：1986-11-04
申请号：US594731
申请日：1984-03-29
申请人： Mineo Gotou , Shunichi Sano
发明人： Mineo Gotou , Shunichi Sano
IPC分类号： G03F7/20 , H01J37/304 , H01J37/317 , G21K5/04
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/70433 , G03F7/7045 , G03F7/706 , H01J37/3045 , H01J37/3174 , H01J2237/30433
摘要： A method of forming by projection an integrated circuit pattern on a first semiconductor wafer, wherein a plurality of reference marks are projected onto a second semiconductor wafer by the irradiation of radiant rays from a projector apparatus used to form the integrated circuit pattern onto the first semiconductor wafer. The positions of the reference marks projected onto the second semiconductor wafer are measured, thereby measuring the projection distortion peculiar to the projector apparatus. As the next step, a projection mask used to form the integrated circuit pattern is produced with the use of the measured projection distortions which has a distortion opposite that of the projector so as to offset its projection distortion. The mark is mounted in the projector apparatus, and the radiant rays are irradiated onto the mask thus projecting the integrated circuit pattern onto the first semiconductor wafer.
摘要翻译：一种通过将集成电路图案投影在第一半导体晶片上而形成的方法，其中多个参考标记通过从用于形成集成电路图案的投影仪设备的辐射线照射到第一半导体晶片上而投影到第二半导体晶片上晶圆。测量投射到第二半导体晶片上的参考标记的位置，从而测量投影仪设备特有的投影失真。作为下一步骤，通过使用具有与投影仪相反的失真的测量的投影失真来产生用于形成集成电路图案的投影掩模，以抵消其投影失真。标记安装在投影仪设备中，并且将辐射线照射到掩模上，从而将集成电路图案投影到第一半导体晶片上。

9. 发明授权

US4034324A Deflection device for use in color television receiver 失效
标题翻译：用于彩色电视接收机的偏转装置
公开(公告)号：US4034324A
公开(公告)日：1977-07-05
申请号：US613957
申请日：1975-09-16
申请人： Shunichi Sano , Youji Ogawa
发明人： Shunichi Sano , Youji Ogawa
IPC分类号： H01J29/76 , H01J29/70 , H01F1/00
CPC分类号： H01J29/705 , H01J2229/5637
摘要： A deflection device for use in a color television receiver comprises a deflection yoke fitted to a neck portion of the color television receiver having three horizontally arranged electron guns so designed as to emit three electron beams, for deflecting horizontally and vertically said three electron beams emitted onto a fluorescent screen from the electron guns of the color television receiver, and soft magnetic material pieces fitted to an end portion of the deflection yoke nearer to the screen, for locally varying the distribution of a deflection field generated by the yoke so as to correct mis-convergence of said three electron beams occurring at the peripheral portion of the screen.
摘要翻译：用于彩色电视接收机的偏转装置包括安装在彩色电视接收机的颈部的偏转线圈，其具有三个水平布置的电子枪，被设计成发射三个电子束，用于水平和垂直偏转所发射的三个电子束来自彩色电视接收机的电子枪的荧光屏和安装在更接近屏幕的偏转线圈的端部的软磁性材料片，用于局部地改变由磁轭产生的偏转磁场的分布，从而校正误差在屏幕的周边部分发生的所述三个电子束的会聚。

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