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1. 发明公开

US20240310159A1 DEVICE AND METHOD FOR MEASURING WAFERS 审中-公开
公开(公告)号：US20240310159A1
公开(公告)日：2024-09-19
申请号：US18673052
申请日：2024-05-23
申请人： PRECITEC OPTRONIK GMBH
发明人： Stephan Weiß , Simon Mieth , Corinna Weigelt , Tobias Beck
IPC分类号： G01B9/02091 , G01B9/02055 , G01B11/06
CPC分类号： G01B9/02091 , G01B9/02072 , G01B11/06
摘要： A device for measuring wafers includes an optical coherence tomograph and a scanning device that scans the surface of the wafer successively at a plurality of measuring points. Two measuring points have a distance dmax of 140 mm≤dmax≤600 mm. An evaluation unit calculates distance values and/or thickness values from the interference signals provided by the optical coherence tomograph.

2. 发明授权

US10725178B2 Optical measuring device 有权
公开(公告)号：US10725178B2
公开(公告)日：2020-07-28
申请号：US16550708
申请日：2019-08-26
申请人： Precitec Optronik GmbH
发明人： Christoph Dietz
IPC分类号： G01S17/46 , G01B11/06
摘要： A measuring device includes a light source that emits light of a plurality of wavelengths, in particular a continuous spectrum, a first confocal diaphragm, through which light from the light source passes, and an optical illuminating/imaging system having a first splitting optical element designed as a prism or grating. The optical illuminating/imaging system, which is designed such that the light enters the first splitting optical element collimated, includes a first lens system having at least one first lens that is spatially separated from the first splitting optical element, the effective focal length of the first lens system being significantly different for different wavelengths, and the optical illuminating/imaging system being designed such that focus points of different wavelengths are formed at different locations along a line segment. The measuring device is configured to measure an object that intersects with the line segment and reflects at least a part of the light.

3. 发明申请

US20190091798A1 METHOD AND DEVICE FOR MEASURING THE DEPTH OF THE VAPOR CAPILLARY DURING A MACHINING PROCESS WITH A HIGH-ENERGY BEAM 审中-公开
公开(公告)号：US20190091798A1
公开(公告)日：2019-03-28
申请号：US16095299
申请日：2016-10-19
申请人： PRECITEC OPTRONIK GMBH
发明人： Martin Schönleber , Christoph Dietz
IPC分类号： B23K26/03 , B23K26/04 , B23K26/08 , B23K26/21 , B23K26/06 , G01B11/22 , G01B9/02
摘要： A method for measuring the depth of the vapour cavity during an industrial machining process employs a high-energy beam. An optical measuring beam is directed towards the base of a vapour cavity. An optical coherence tomograph generates interference factors or other raw measurement data from reflections of the measurement beam. An evaluation device generates interference-suppressed measurement data, wherein raw measurement data that is generated at different times is processed together in the course of a mathematical operation. This operation can be a subtraction or a division. Slowly changing interference factors can thus be eliminated. An end value for the distance to the base of the vapour cavity is calculated from the interference-suppressed measurement data using a filter. As a result, the depth of the vapour cavity can be determined, in the knowledge of the distance at a part of the surface of the work piece that is not exposed to the high-energy beam.

4. 发明申请

US20160059350A1 Method for Measuring the Distance Between a Workpiece and a Machining Head of a Laser Machining Apparatus 有权
标题翻译：用于测量激光加工设备的工件和加工头之间的距离的方法
公开(公告)号：US20160059350A1
公开(公告)日：2016-03-03
申请号：US14814892
申请日：2015-07-31
申请人： Precitec Optronik GmbH
发明人： Martin Schoenleber , Markus Kogel-Hollacher , Thibault Bautze
IPC分类号： B23K26/08 , B23K26/04 , G01B11/14
CPC分类号： B23K26/0892 , B23K26/04 , B23K26/048 , B23K26/0884 , G01B9/02091 , G01B11/14
摘要： According to a method for measuring the distance between a workpiece and a machining head of a laser machining apparatus, a machining head is provided, which has a housing that has an interior and an opening for emergence of the laser radiation from the machining head. The laser radiation is directed on to the workpiece, after it has passed through the interior and the opening. An object beam is directed on to the workpiece by a light source of an optical coherence tomograph in such a manner that the object beam passes through the interior and the opening before being incident upon the workpiece. In addition to the object beam, a measuring beam passes through the interior. The measuring beam is used to compensate falsifications of the measured distance that have been caused by pressure fluctuations in the interior. The measuring beam in this case may be reflected at a reflective face that is formed on an inner face of an outlet nozzle that comprises the opening, which inner face delimits the interior.
摘要翻译：根据用于测量激光加工装置的工件和加工头之间的距离的方法，提供了一种加工头，其具有壳体，该壳体具有用于从加工头出射激光辐射的内部和开口。在穿过内部和开口之后，激光辐射被引导到工件上。物镜光束通过光学相干断层摄影机的光源被引导到工件上，使得物体光束在入射到工件之前穿过内部和开口。除了物体光束之外，测量光束通过内部。测量光束用于补偿由内部压力波动引起的测量距离的伪造。在这种情况下的测量光束可以在形成在包括开口的出口喷嘴的内表面上的反射面上反射，该内表面限定在内部。

5. 发明申请

US20150260504A1 OPTICAL MEASURING METHOD AND MEASURING DEVICE HAVING A MEASURING HEAD FOR CAPTURING A SURFACE TOPOGRAPHY BY CALIBRATING THE ORIENTATION OF THE MEASURING HEAD 有权
标题翻译：具有测量头的光学测量方法和测量装置，用于通过校准测量头的方位来获取表面形貌
公开(公告)号：US20150260504A1
公开(公告)日：2015-09-17
申请号：US14713150
申请日：2015-05-15
申请人： Precitec Optronik GmbH
发明人： Martin Schönleber , Berthold Michelt , Matthias Kunkel
IPC分类号： G01B9/02
CPC分类号： G01B11/2441 , G01B9/02027 , G01B9/02091 , G01B11/026 , G01B11/14 , G01B11/24 , G01B2210/50
摘要： The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fibre array with i fibres of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.
摘要翻译：本发明涉及一种用于获取测量对象的表面形貌的光学测量过程。为此，提供了一种在测量头引导装置中具有测量头的测量装置，用于对表面形貌进行彩色共焦获取或用于对表面形貌的距离进行光谱干涉OCT采集。首先，来自具有i个测量点的i光纤的光纤阵列的光源的光谱宽带光通过公共测量头光学器件引导到测量对象上，形成i个测量点的点阵列。 i i测量通道的反射光谱然后被采集和数字化。最后，通过去除测量头引导装置的系统测量误差和时间相关偏差运动的时间变化来评估数字化反射光谱。

6. 发明申请

US20200174127A1 OPTICAL MEASURING DEVICE 审中-公开
公开(公告)号：US20200174127A1
公开(公告)日：2020-06-04
申请号：US16550708
申请日：2019-08-26
申请人： Precitec Optronik GmbH
发明人： Christoph Dietz
IPC分类号： G01S17/46 , G01B11/06
摘要： A measuring device includes a light source that emits light of a plurality of wavelengths, in particular a continuous spectrum, a first confocal diaphragm, through which light from the light source passes, and an optical illuminating/imaging system having a first splitting optical element designed as a prism or grating. The optical illuminating/imaging system, which is designed such that the light enters the first splitting optical element collimated, includes a first lens system having at least one first lens that is spatially separated from the first splitting optical element, the effective focal length of the first lens system being significantly different for different wavelengths, and the optical illuminating/imaging system being designed such that focus points of different wavelengths are formed at different locations along a line segment. The measuring device is configured to measure an object that intersects with the line segment and reflects at least a part of the light.

7. 发明申请

US20190137626A1 DISTANCE MEASURING DEVICE 审中-公开
公开(公告)号：US20190137626A1
公开(公告)日：2019-05-09
申请号：US16184222
申请日：2018-11-08
申请人： Precitec Optronik GmbH
发明人： Christoph Dietz
IPC分类号： G01S17/48 , B24B7/22 , B24B49/12 , G01B11/06
摘要： A distance measuring device comprises a measuring head, the measuring head having an optical measuring system for carrying out an optical measurement process on a measurement object by means of at least one measuring light beam formed from a broad-band measuring light. The measuring head further has a liquid guide with a liquid inlet and a liquid outlet for producing a jet of liquid directed at the measurement object, the liquid guide being designed such that in certain sections at least the measuring light beam runs essentially along the jet of liquid. The measuring head further has a flow element with a laminar flow channel, the flow element being designed such that the at least one measuring light beam is able to reach the measurement object by passing through the laminar flow channel.

8. 发明授权

US10228551B1 Device and method for optically measuring a measurement object 有权
公开(公告)号：US10228551B1
公开(公告)日：2019-03-12
申请号：US16056928
申请日：2018-08-07
申请人： Precitec Optronik GmbH
发明人： Christoph Dietz , Martin Schönleber , Jean-Francois Pichot
IPC分类号： G02B21/00 , G01B11/24 , G01B11/06
摘要： A chromatic confocal measuring device includes a light source, which emits light of a plurality of wavelengths, and a first beam splitter, via which the light from the light source into an imaging optical unit having chromatic aberration on. Light reflected from the measurement object is imaged by the imaging optical unit and the first beam splitter onto a first confocal detection stop arrangement, such that the first confocal detection stop arrangement functions as a confocal aperture. Light incident through the first detection stop arrangement is detected and evaluated by a first detection device. The measuring device has a first slit stop, which functions as a confocal aperture of the measuring device. The measuring device additionally includes a second detection device and a second beam splitter, wherein the second beam splitter splits the light reflected from the measurement object into a first and a second partial beam, which image the same spatial region of the measurement object. The first detection device detects light of the first partial beam by a linear detector and evaluates total intensities over all wavelengths in order to create a total intensity profile and/or a total intensity image therefrom. The second detection device at the same time spectrally splits light of the second partial beam and evaluates intensities of the light of a plurality of individual wavelengths.

9. 发明授权

US09770783B2 Method for measuring the distance between a workpiece and a machining head of a laser machining apparatus 有权
公开(公告)号：US09770783B2
公开(公告)日：2017-09-26
申请号：US14814892
申请日：2015-07-31
申请人： Precitec Optronik GmbH
发明人： Martin Schoenleber , Markus Kogel-Hollacher , Thibault Bautze
IPC分类号： B23K26/08 , B23K26/04 , G01B11/14 , G01B9/02
CPC分类号： B23K26/0892 , B23K26/04 , B23K26/048 , B23K26/0884 , G01B9/02091 , G01B11/14
摘要： According to a method for measuring the distance between a workpiece and a machining head of a laser machining apparatus, a machining head is provided, which has a housing that has an interior and an opening for emergence of the laser radiation from the machining head. The laser radiation is directed on to the workpiece, after it has passed through the interior and the opening. An object beam is directed on to the workpiece by a light source of an optical coherence tomograph in such a manner that the object beam passes through the interior and the opening before being incident upon the workpiece. In addition to the object beam, a measuring beam passes through the interior. The measuring beam is used to compensate falsifications of the measured distance that have been caused by pressure fluctuations in the interior. The measuring beam in this case may be reflected at a reflective face that is formed on an inner face of an outlet nozzle that comprises the opening, which inner face delimits the interior.

10. 发明授权

US09677871B2 Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head 有权
公开(公告)号：US09677871B2
公开(公告)日：2017-06-13
申请号：US14713150
申请日：2015-05-15
申请人： Precitec Optronik Gmbh
发明人： Martin Schönleber , Berthold Michelt , Matthias Kunkel
IPC分类号： G01B9/02 , G01B11/02 , G01B11/24
CPC分类号： G01B11/2441 , G01B9/02027 , G01B9/02091 , G01B11/026 , G01B11/14 , G01B11/24 , G01B2210/50
摘要： The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fiber array with i fibers of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.

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