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    • 3. 发明授权
    • Acceleration sensor
    • 加速度传感器
    • US08368387B2
    • 2013-02-05
    • US12920682
    • 2008-10-28
    • Nobuaki Konno
    • Nobuaki Konno
    • G01P15/00G01P15/08
    • G01P15/0802B81B7/0048B81B2201/0235B81B2201/0242G01C19/5719G01P3/22G01P15/0888G01P15/125G01P15/14G01P15/18G01P2015/0831H01L29/84
    • An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.
    • 加速度传感器包括基板,第一和第二扭转梁,第一和第二检测框架,第一和第二检测电极,第一和第二连杆梁以及惯性质量体。 第一和第二扭转梁围绕第一和第二扭转轴线变形。 第一和第二检测框围绕第一和第二扭转轴线旋转。 第一和第二检测电极检测基板与第一和第二检测框架中的每一个之间形成的角度。 第一连杆梁位于沿着与第一扭转轴相交叉的方向位于从第一扭转轴位置到第一检测框架的一端侧的位置的第一轴上。 第二连杆梁位于从与第一扭转轴的位置相同的方向与第二扭转轴的位置偏移的位置的第二轴上。
    • 4. 发明申请
    • ACCELERATION SENSOR
    • 加速传感器
    • US20110203373A1
    • 2011-08-25
    • US13127172
    • 2009-08-13
    • Nobuaki Konno
    • Nobuaki Konno
    • G01P15/125
    • G01P15/125G01P15/0802G01P2015/0831G01P2015/0837
    • An acceleration sensor includes a substrate, and a plurality of acceleration detection units supported by the substrate. Each of the plurality of acceleration detection units has a torsion beam supported by the substrate and distorted about a torsion axis line; a detection frame supported by the torsion beam so as to be rotatable about the torsion axis line; a detection electrode formed on the substrate so as to face the detection frame; a link beam supported by the detection frame at a position on an axis line deviated from the torsion axis line when seen in plane; and an inertia mass body supported by the link beam so as to be displaceable in a thickness direction of the substrate. The plurality of acceleration detection units include first and second acceleration detection units. The first and second acceleration detection units are disposed side by side along a direction of the first torsion axis line. Thereby, a highly accurate acceleration sensor that suppresses a vibration with a high frequency and a high acceleration can be obtained.
    • 加速度传感器包括基板和由基板支撑的多个加速度检测单元。 多个加速度检测单元中的每一个具有由基板支撑的扭转梁,并且围绕扭转轴线变形; 所述检测框架由所述扭转梁支撑,以便能够围绕所述扭转轴线旋转; 检测电极,形成在所述基板上以面对所述检测框架; 在平面内观察时,在与所述扭转轴线偏离的轴线上的位置处由所述检测框架支撑的连杆梁; 以及由所述连杆梁支撑以便能够在所述基板的厚度方向上移位的惯性质量体。 多个加速度检测单元包括第一和第二加速度检测单元。 第一和第二加速度检测单元沿着第一扭转轴线的方向并排布置。 因此,可以获得抑制高频和高加速度的振动的高精度的加速度传感器。
    • 5. 发明申请
    • ACCELERATION SENSOR
    • 加速传感器
    • US20110031959A1
    • 2011-02-10
    • US12920682
    • 2008-10-28
    • Nobuaki Konno
    • Nobuaki Konno
    • G01P15/00
    • G01P15/0802B81B7/0048B81B2201/0235B81B2201/0242G01C19/5719G01P3/22G01P15/0888G01P15/125G01P15/14G01P15/18G01P2015/0831H01L29/84
    • An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.
    • 加速度传感器包括基板,第一和第二扭转梁,第一和第二检测框架,第一和第二检测电极,第一和第二连杆梁以及惯性质量体。 第一和第二扭转梁围绕第一和第二扭转轴线变形。 第一和第二检测框围绕第一和第二扭转轴线旋转。 第一和第二检测电极检测基板与第一和第二检测框架中的每一个之间形成的角度。 第一连杆梁位于沿着与第一扭转轴相交叉的方向位于从第一扭转轴位置到第一检测框架的一端侧的位置的第一轴上。 第二连杆梁位于从与第一扭转轴的位置相同的方向与第二扭转轴的位置偏移的位置的第二轴上。
    • 6. 发明授权
    • Angular rate sensor
    • 角速度传感器
    • US06494094B1
    • 2002-12-17
    • US09562288
    • 2000-05-01
    • Masahiro TsugaiNobuaki KonnoHiroyuki Fujita
    • Masahiro TsugaiNobuaki KonnoHiroyuki Fujita
    • G01P904
    • G01C19/5719
    • A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to drive electrodes, thereby decreasing its sensor sensitivity. In an angular rate sensor, a drive frame and a driven frame are separately provided. A bending oscillation of the drive frame is transmitted to the driven frame through link beams, causing the rotational oscillation of the driven frame. The displacement amplitude of a rotational oscillation of the driven frame is not limited to provide high sensor sensitivity.
    • 传统的角速度传感器存在由于驱动万向架结合到驱动电极上的拉入现象而导致驱动万向架的位移幅度受到限制的问题,从而降低了传感器灵敏度。 在角速率传感器中,分别提供驱动框架和从动框架。 驱动框架的弯曲振动通过连接梁传递到从动框架,导致从动框架的旋转振动。 驱动框架的旋转振荡的位移幅度不限于提供高传感器灵敏度。
    • 7. 发明申请
    • VIBRATORY GYROSCOPE
    • 振动陀螺仪
    • US20060283245A1
    • 2006-12-21
    • US11423281
    • 2006-06-09
    • Nobuaki KONNOMasahiro TsugaiJun Fujita
    • Nobuaki KONNOMasahiro TsugaiJun Fujita
    • G01P15/08
    • G01C19/5719
    • According to one of the aspects of the present invention, a vibratory gyroscope includes a pair of proof masses having the same inertia mass, each of the proof masses having a first axis. The proof masses are arranged symmetrically in relation to a second axis. Also, the vibratory gyroscope includes a pair of drive elements, each of which has a driving axis extending in parallel to the second axis and supports respective one of the proof masses to allow oscillation thereof about the first axis. Further, the vibratory gyroscope includes a supporting element with an anchor element for supporting the drive elements to allow oscillation thereof about the driving axes. Finally, the vibratory gyroscope includes a main body having an inner space for receiving the supporting element, in which the main body is in contact with the anchor element of the supporting element and spaced away from the proof masses and the drive elements.
    • 根据本发明的一个方面,振动陀螺仪包括具有相同惯性质量的一对校验块,每个校验块具有第一轴。 证明质量体相对于第二轴对称地布置。 此外,振动陀螺仪还包括一对驱动元件,每一个驱动元件具有平行于第二轴线延伸的驱动轴,并支撑相应的一个检验质量块,以允许围绕第一轴线的振荡。 此外,振动陀螺仪包括支撑元件,该支撑元件具有用于支撑驱动元件的锚定元件,以允许绕驱动轴线的摆动。 最后,振动陀螺仪包括主体,其具有用于接收支撑元件的内部空间,主体与支撑元件的锚定元件接触并与检测块和驱动元件隔开。
    • 8. 发明授权
    • Acceleration sensor
    • 加速度传感器
    • US06955086B2
    • 2005-10-18
    • US10739069
    • 2003-12-19
    • Eiji YoshikawaMasahiro TsugaiNobuaki KonnoYoshiaki Hirata
    • Eiji YoshikawaMasahiro TsugaiNobuaki KonnoYoshiaki Hirata
    • G01P15/125
    • G01P15/125
    • An acceleration sensor includes first and second fixed electrodes on a substrate, and a movable electrode located above the first and second fixed electrodes, with respect to the substrate, and facing them. The movable electrode is elastically supported on the substrate by a first elastic supporting body and is movable. A mass, which is elastically supported on the substrate by a second elastic supporting body, moves in response to an acceleration in a direction perpendicular to the substrate. A linking portion links the movable electrode and the mass at a position spaced from an axis of movement of the movable electrode by a distance. Acceleration is measured based on changes in a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the second fixed electrode and the movable electrode. Thus, a highly impact resistant and highly reliable acceleration sensor is obtained.
    • 加速度传感器包括基板上的第一固定电极和第二固定电极以及相对于基板位于第一和第二固定电极上方并面向它们的可动电极。 可移动电极通过第一弹性支撑体弹性支撑在基板上并且可移动。 通过第二弹性支撑体弹性地支撑在基板上的质量响应于垂直于基板的方向的加速度而移动。 连接部分在与可移动电极的运动轴线间隔一定距离的位置处连接可移动电极和质量块。 基于第一固定电极和可动电极之间的第一电容的变化和第二固定电极与可动电极之间的第二电容来测量加速度。 因此,获得了高度耐冲击和高度可靠的加速度传感器。
    • 9. 发明授权
    • Electrostatic capacitance type acceleration sensor
    • 静电电容型加速度传感器
    • US07624638B2
    • 2009-12-01
    • US11933685
    • 2007-11-01
    • Nobuaki KonnoYoshiaki Hirata
    • Nobuaki KonnoYoshiaki Hirata
    • G01P15/125G01P15/08
    • G01P15/125
    • First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.
    • 第一和第二检测框架由基板支撑以能够围绕第一和第二扭转轴线旋转。 第一连接梁在位于从第一扭转轴的位置在与第一扭转轴相交的第一方向上移动并且指向第一检测框的一端侧的位置处的轴上连接到第一检测框。 第二连杆梁在位于从第二扭转轴的位置偏离与第一方向相反的第二方向的位置的轴上的第二检测框架上连接。 通过分别通过第一和第二连杆梁与第一和第二检测框架链接,惯性质量体可在基板的厚度方向上移动。 这种构造使得可以获得几乎不受扰动影响的高精度加速度传感器。
    • 10. 发明申请
    • ACCELERATION SENSOR
    • 加速传感器
    • US20080110260A1
    • 2008-05-15
    • US11933685
    • 2007-11-01
    • Nobuaki KONNOYoshiaki Hirata
    • Nobuaki KONNOYoshiaki Hirata
    • G01P15/125
    • G01P15/125
    • First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.
    • 第一和第二检测框架由基板支撑以能够围绕第一和第二扭转轴线旋转。 第一连接梁在位于从第一扭转轴的位置在与第一扭转轴相交的第一方向上移动并且指向第一检测框的一端侧的位置处的轴上连接到第一检测框。 第二连杆梁在位于从第二扭转轴的位置偏离与第一方向相反的第二方向的位置的轴上的第二检测框架上连接。 通过分别通过第一和第二连杆梁与第一和第二检测框架链接,惯性质量体可在基板的厚度方向上移动。 这种构造使得可以获得几乎不受扰动影响的高精度加速度传感器。