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1. 发明申请

US20130012027A1 Method for the supply of fluorine 有权
标题翻译：供应氟的方法
公开(公告)号：US20130012027A1
公开(公告)日：2013-01-10
申请号：US13636595
申请日：2011-03-22
申请人： Maurizio Paganin
发明人： Maurizio Paganin
IPC分类号： H01L21/3065
CPC分类号： C25B1/245 , C01B7/20 , C23C16/4405 , C25B15/02 , Y02E60/321
摘要： Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process wherein the contamination of the elemental fluorine with gaseous impurities, such as air or moisture, is prevented by producing it on site and delivering it to the point of use under a pressure higher than ambient pressure.
摘要翻译：元素氟用作制造电子器件，特别是半导体器件，微机电器件，薄膜晶体管，平板显示器和太阳能电池板的蚀刻剂，以及主要用于等离子体增强气相沉积（PECVD）设备的腔室清洁剂。为此，氟通常在现场生产。本发明提供了一种方法，其中通过在现场生产元素氟并将其在高于环境压力的压力下将其输送到使用点来防止元素氟与气态杂质如空气或水分的污染。

2. 发明授权

US08871174B2 Method for the supply of fluorine 有权
标题翻译：供应氟的方法
公开(公告)号：US08871174B2
公开(公告)日：2014-10-28
申请号：US13636595
申请日：2011-03-22
申请人： Maurizio Paganin
发明人： Maurizio Paganin
IPC分类号： C01B7/00 , C01B7/20 , C23C16/44 , C25B15/02 , C25B1/24
CPC分类号： C25B1/245 , C01B7/20 , C23C16/4405 , C25B15/02 , Y02E60/321
摘要： Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process wherein the contamination of the elemental fluorine with gaseous impurities, such as air or moisture, is prevented by producing it on site and delivering it to the point of use under a pressure higher than ambient pressure.
摘要翻译：元素氟用作制造电子器件，特别是半导体器件，微机电器件，薄膜晶体管，平板显示器和太阳能电池板的蚀刻剂，以及主要用于等离子体增强气相沉积（PECVD）设备的室清洁剂。为此，氟通常在现场生产。本发明提供了一种方法，其中通过在现场生产元素氟并将其在高于环境压力的压力下将其输送到使用点来防止元素氟与气态杂质如空气或水分的污染。

3. 发明申请

US20130175161A1 Plant for fluorine production and a process using it 审中-公开
标题翻译：氟生产厂和使用它的工艺
公开(公告)号：US20130175161A1
公开(公告)日：2013-07-11
申请号：US13822455
申请日：2011-09-12
申请人： Philippe Morelle , Oliviero Diana , Peter M. Predikant , Joachim Lange , Holger Pernice , Francis Feys , Alain Fobelets , Maurizio Paganin
发明人： Philippe Morelle , Oliviero Diana , Peter M. Predikant , Joachim Lange , Holger Pernice , Francis Feys , Alain Fobelets , Maurizio Paganin
IPC分类号： C25B1/24
CPC分类号： C25B1/245 , B01D53/68 , C01B7/20 , C25B15/02 , C25B15/08 , Y02C20/30
摘要： A fluorine gas manufacturing plant wherein F2 is manufactured by the electrolysis of KF/HF compositions. The plant comprises skid modules for: HF storage, the electrolytic cells, storage and purification of the manufactured F2 raw gas, for fluorine gas delivery including a single buffer tank or multiple storage units, scrubbers to provide purified waste gas, for providing cooling water circuits, analysis, electrical rectifiers, an electrical sub-station with transformers and emergency supply, and for utilities including a control room with laboratory and a rest room for the personnel. The advantage of the skids is that they can be separately manufactured in workshops, tested, transported to the facility and assembled there. A great advantage is the safety aspect, a reliable F2 production for 24 hours and 7 days a week of high purity F2.
摘要翻译：其中F2是通过电解KF / HF组合物制造的氟气制造厂。该设备包括用于：HF储存，电解池，制造的F2原料气体的储存和净化，用于包括单个缓冲罐或多个存储单元的氟气输送的擦拭模块，用于提供净化废气的洗涤器，用于提供冷却水回路分析电气整流器，带有变压器和应急供电的电气分站，以及包括实验室控制室和人员休息室的公用事业。滑板的优点是可以在车间分开制造，测试，运输到设施并组装在那里。一个很大的优势是安全性方面，F2高效生产每周24小时和7天可靠的F2。

4. 发明申请

US20130180609A1 Hydrogen fluoride supply unit 有权
标题翻译：氟化氢供应单位
公开(公告)号：US20130180609A1
公开(公告)日：2013-07-18
申请号：US13822501
申请日：2011-09-12
申请人： Alain Fobelets , Philippe Morelle , Oliviero Diana , Peter M. Predikant , Maurizio Paganin
发明人： Alain Fobelets , Philippe Morelle , Oliviero Diana , Peter M. Predikant , Maurizio Paganin
IPC分类号： F17C3/00
CPC分类号： C25B1/245 , B65D90/24 , C25B15/08 , F17C3/00 , F17C2201/054 , F17C2205/0111 , F17C2205/013 , F17C2205/0142 , F17C2205/0146 , F17C2205/0157 , F17C2205/0161 , F17C2205/0326 , F17C2221/037 , F17C2223/0153 , F17C2223/03 , F17C2223/033 , F17C2225/0123 , F17C2225/033 , F17C2227/0135 , F17C2227/0192 , F17C2227/042 , F17C2227/044 , F17C2250/0408 , F17C2250/0421 , F17C2260/044 , F17C2270/0171 , F17C2270/0518 , Y02E60/321 , Y10T137/479 , Y10T137/4807 , Y10T137/4857 , Y10T137/4874 , Y10T137/5762 , Y10T137/86196 , Y10T137/87571
摘要： A hydrogen fluoride supply unit which comprises a plurality of transportable hydrogen fluoride storage containers connected to a hydrogen fluoride supply line and a chemical plant comprising the hydrogen fluoride supply unit. Such chemical plant may be for the manufacture of fluorine, wherein the hydrogen fluoride supply line is connected to an electrolysis cell for producing fluorine by HF electrolysis of a molten salt electrolyte. A process for the manufacture of a chemical comprising using such chemical plant. Also a method for supply of hydrogen fluoride to a chemical plant, which comprises: (a) filling at least one transportable hydrogen fluoride storage container with hydrogen fluoride, (b) transporting the hydrogen fluoride storage container to the hydrogen fluoride supply unit, (c) connecting the hydrogen fluoride storage container to the hydrogen fluoride supply line, and (d) supplying hydrogen fluoride from the hydrogen fluoride storage container to the hydrogen fluoride supply line.
摘要翻译：氟化氢供应单元，其包括连接到氟化氢供应管线的多个可输送氟化氢储存容器和包含氟化氢供应单元的化学设备。这种化学设备可以用于氟的制造，其中氟化氢供应管线通过熔融盐电解质的HF电解连接到用于生产氟的电解池中。一种制造化学品的方法，包括使用这种化学植物。还有一种向化学工厂供应氟化氢的方法，其包括：（a）用氟化氢填充至少一个可运输的氟化氢储存容器，（b）将氟化氢储存容器运送到氟化氢供应单元，（c ）将氟化氢储存容器连接到氟化氢供应管线，以及（d）从氟化氢储存容器向氟化氢供应管线供应氟化氢。

5. 发明申请

US20130130505A1 Method for the purification of fluorine 有权
标题翻译：纯化氟的方法
公开(公告)号：US20130130505A1
公开(公告)日：2013-05-23
申请号：US13814033
申请日：2011-08-03
申请人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
发明人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
IPC分类号： C01B7/20 , H01L21/02 , H01L21/306
CPC分类号： C01B7/20 , C01B7/197 , H01L21/02057 , H01L21/30604
摘要： Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems (“MEMS”).
摘要翻译：元素氟通常由KF在氟化氢中的溶液电化学制造，并且含有不同量的作为杂质的固体形式的夹带电解质盐。本发明涉及通过与液体氟化氢接触来净化这种不纯的元素氟的方法，例如在喷气气体洗涤器中或通过使氟氟化钠通过液体氟化氢鼓泡。在该纯化步骤之后，通过吸附除去夹带的氟化氢，将其冷凝出来或者两者。在通过具有非常小的孔的过滤器之后，纯化的氟特别适合作为半导体，TFT和太阳能电池的制造中的蚀刻气体或室清洁气体的半导体工业，或者用于制造微机电系统（“ MEMS“）。

6. 发明申请

US20100105964A1 Process for the manufacture of dichloropropanol 失效
标题翻译：制备二氯丙醇的方法
公开(公告)号：US20100105964A1
公开(公告)日：2010-04-29
申请号：US12529778
申请日：2008-03-13
申请人： Philippe Krafft , Patrick Gilbeau , Dominique Balthasart , Maurizio Paganin
发明人： Philippe Krafft , Patrick Gilbeau , Dominique Balthasart , Maurizio Paganin
IPC分类号： C07C29/62 , C07C31/36 , B01J8/00
CPC分类号： C07C29/62 , C07C29/82 , C07C29/86 , C07C31/36
摘要： Process for manufacturing dichloropropanol according to which, a) in a liquid reaction medium containing water, which is in contact with a gaseous phase, glycerol is reacted with hydrogen chloride under a partial pressure of hydrogen chloride in the gaseous phase greater than 0.2 bar absolute, and b) at least part of the liquid reaction medium and optionally part of the gaseous phase from step a) is (are) subjected to at least one separation operation and, prior to said separation operation, the part of the liquid reaction medium and the part of the gaseous phase from step a) is (are) subjected to bi) at least one treatment for reducing the weight ratio between the hydrogen chloride and the water in the part of the liquid reaction medium so as to attain a ratio less than or equal to the weight ratio between the hydrogen chloride and the water in the binary azeotropic hydrogen chloride/water composition at total pressure of the separation operation, and/or bii) at least one treatment for reducing the weight ratio between the water and the dichloropropanol in the part of the liquid reaction medium so as to attain a ratio less than or equal to the weight ratio between the water and the dichloropropanol in the ternary water/dichloropropanol/hydrogen chloride azeotrope at total pressure of the separation operation.
摘要翻译：制备二氯丙醇的方法，其中a）在含有与气相接触的水的液体反应介质中，丙三醇在大于0.2巴绝对压力的气相中在氯化氢的分压下与氯化氢反应，和b）至少部分液体反应介质和任选地来自步骤a）的气相的一部分进行至少一个分离操作，并且在所述分离操作之前，将部分液体反应介质和来自步骤a）的气相的一部分被进行至少一种处理以减少液体反应介质的部分中的氯化氢和水之间的重量比，以获得小于或等于等于在分离操作的总压力下的二元共沸氯化氢/水组合物中的氯化氢和水之间的重量比，和/或bii）至少一种处理 r减少液体反应介质部分的水和二氯丙醇之间的重量比，以获得小于或等于三元水/二氯丙醇/氯化氢共沸物中水和二氯丙醇之间的重量比的比例分离操作的总压力。

7. 发明授权

US09334574B2 Hydrogen fluoride supply unit 有权
公开(公告)号：US09334574B2
公开(公告)日：2016-05-10
申请号：US13822501
申请日：2011-09-12
申请人： Alain Fobelets , Philippe Morelle , Oliviero Diana , Peter M. Predikant , Maurizio Paganin
发明人： Alain Fobelets , Philippe Morelle , Oliviero Diana , Peter M. Predikant , Maurizio Paganin
IPC分类号： C25B15/08 , B65D90/24 , F17C13/00 , C25B1/24 , F17C3/00
CPC分类号： C25B1/245 , B65D90/24 , C25B15/08 , F17C3/00 , F17C2201/054 , F17C2205/0111 , F17C2205/013 , F17C2205/0142 , F17C2205/0146 , F17C2205/0157 , F17C2205/0161 , F17C2205/0326 , F17C2221/037 , F17C2223/0153 , F17C2223/03 , F17C2223/033 , F17C2225/0123 , F17C2225/033 , F17C2227/0135 , F17C2227/0192 , F17C2227/042 , F17C2227/044 , F17C2250/0408 , F17C2250/0421 , F17C2260/044 , F17C2270/0171 , F17C2270/0518 , Y02E60/321 , Y10T137/479 , Y10T137/4807 , Y10T137/4857 , Y10T137/4874 , Y10T137/5762 , Y10T137/86196 , Y10T137/87571
摘要： A hydrogen fluoride supply unit which comprises a plurality of transportable hydrogen fluoride storage containers connected to a hydrogen fluoride supply line and a chemical plant comprising the hydrogen fluoride supply unit. Such chemical plant may be for the manufacture of fluorine, wherein the hydrogen fluoride supply line is connected to an electrolysis cell for producing fluorine by HF electrolysis of a molten salt electrolyte. A process for the manufacture of a chemical comprising using such chemical plant. Also a method for supply of hydrogen fluoride to a chemical plant, which comprises: (a) filling at least one transportable hydrogen fluoride storage container with hydrogen fluoride, (b) transporting the hydrogen fluoride storage container to the hydrogen fluoride supply unit, (c) connecting the hydrogen fluoride storage container to the hydrogen fluoride supply line, and (d) supplying hydrogen fluoride from the hydrogen fluoride storage container to the hydrogen fluoride supply line.

8. 发明授权

US08471074B2 Process for the manufacture of dichloropropanol 失效
标题翻译：制备二氯丙醇的方法
公开(公告)号：US08471074B2
公开(公告)日：2013-06-25
申请号：US12529778
申请日：2008-03-13
申请人： Philippe Krafft , Patrick Gilbeau , Dominique Balthasart , Maurizio Paganin
发明人： Philippe Krafft , Patrick Gilbeau , Dominique Balthasart , Maurizio Paganin
IPC分类号： C07C31/36
CPC分类号： C07C29/62 , C07C29/82 , C07C29/86 , C07C31/36
摘要： Process for manufacturing dichloropropanol according to which, a) in a liquid reaction medium containing water, which is in contact with a gaseous phase, glycerol is reacted with hydrogen chloride under a partial pressure of hydrogen chloride in the gaseous phase greater than 0.2 bar absolute, and b) at least part of the liquid reaction medium and optionally part of the gaseous phase from step a) is (are) subjected to at least one separation operation and, prior to said separation operation, the part of the liquid reaction medium and the part of the gaseous phase from step a) is (are) subjected to bi) at least one treatment for reducing the weight ratio between the hydrogen chloride and the water in the part of the liquid reaction medium so as to attain a ratio less than or equal to the weight ratio between the hydrogen chloride and the water in the binary azeotropic hydrogen chloride/water composition at total pressure of the separation operation, and/or bii) at least one treatment for reducing the weight ratio between the water and the dichloropropanol in the part of the liquid reaction medium so as to attain a ratio less than or equal to the weight ratio between the water and the dichloropropanol in the ternary water/dichloropropanol/hydrogen chloride azeotrope at total pressure of the separation operation.
摘要翻译：制备二氯丙醇的方法，其中a）在含有与气相接触的水的液体反应介质中，丙三醇在大于0.2巴绝对压力的气相中在氯化氢的分压下与氯化氢反应，和b）至少部分液体反应介质和任选地来自步骤a）的气相的一部分进行至少一个分离操作，并且在所述分离操作之前，将部分液体反应介质和来自步骤a）的气相的一部分被进行至少一种处理以减少液体反应介质的部分中的氯化氢和水之间的重量比，以获得小于或等于等于在分离操作的总压力下的二元共沸氯化氢/水组合物中的氯化氢和水之间的重量比，和/或bii）至少一种处理 r减少液体反应介质部分的水和二氯丙醇之间的重量比，以获得小于或等于三元水/二氯丙醇/氯化氢共沸物中水和二氯丙醇之间的重量比的比例分离操作的总压力。

9. 发明授权

US5488181A Process for preparing perfluoropolyethers 失效
标题翻译：制备全氟聚醚的方法
公开(公告)号：US5488181A
公开(公告)日：1996-01-30
申请号：US341150
申请日：1994-11-16
申请人： Giuseppe Marchionni , Pier A. Guarda , Maurizio Paganin
发明人： Giuseppe Marchionni , Pier A. Guarda , Maurizio Paganin
IPC分类号： C07C409/20 , C07C407/00 , C08G65/00 , C07C43/30
CPC分类号： C08G65/007
摘要： Process for preparing peroxidic perfluoropolyethers by oxidation of tetrafluoroethylene with oxygen, in liquid phase comprising a solvent and in the presence of a chemical initiator, at a pressure between 2 and 15 absolute atm and operating with a molar ratio of the tetrafluoroethylene to the chemical initiator higher than 35. The process allows to increase the molecular weight of the perfluoropolyethers at the same content of peroxidic oxygen.
摘要翻译：通过用氧气在包含溶剂的液相中并且在化学引发剂存在下，在2至15绝对大气压的压力下氧化四氟乙烯并以四氟乙烯与化学引发剂的摩尔比更高的方式制备过氧化全氟聚醚的方法该方法允许以相同的过氧化氧含量增加全氟聚醚的分子量。

10. 发明授权

US08821821B2 Method for the purification of fluorine 有权
标题翻译：纯化氟的方法
公开(公告)号：US08821821B2
公开(公告)日：2014-09-02
申请号：US13814033
申请日：2011-08-03
申请人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
发明人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
IPC分类号： B01D53/56 , C01B7/00 , C01B7/19 , H01L21/306 , C01B7/20 , H01L21/02
CPC分类号： C01B7/20 , C01B7/197 , H01L21/02057 , H01L21/30604
摘要： Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems (“MEMS”).
摘要翻译：元素氟通常由KF在氟化氢中的溶液电化学制造，并且含有不同量的作为杂质的固体形式的夹带电解质盐。本发明涉及通过与液体氟化氢接触来净化这种不纯的元素氟的方法，例如在喷气气体洗涤器中或通过使氟氟化钠通过液体氟化氢鼓泡。在该纯化步骤之后，通过吸附除去夹带的氟化氢，将其冷凝出来或者两者。在通过具有非常小的孔的过滤器之后，纯化的氟特别适合作为半导体，TFT和太阳能电池的制造中的蚀刻气体或室清洁气体的半导体工业，或者用于制造微机电系统（“ MEMS“）。

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