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1. 发明授权

US08136925B2 Electrostatic actuator, liquid droplet discharging head, methods for manufacturing them, and liquid droplet discharging apparatus 有权
标题翻译：静电致动器，液滴喷射头，其制造方法和液滴喷射装置
公开(公告)号：US08136925B2
公开(公告)日：2012-03-20
申请号：US12819057
申请日：2010-06-18
申请人： Yoshifumi Hano , Masahiro Fujii
发明人： Yoshifumi Hano , Masahiro Fujii
IPC分类号： B41J2/04
CPC分类号： B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2002/14411 , Y10T29/49002
摘要： To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. An electrostatic actuator including an individual electrode formed on a substrate, a vibration plate arranged opposite to the individual electrode via a predetermined gap and a driving means for causing a displacement of the vibration plate by generating an electrostatic force between the individual electrode and the vibration plate includes an insulation film provided on one or both of opposing surfaces of the fixed electrode and the movable electrode and a surface protection film provided on the insulation film. The surface protection film is made of a hard ceramic film or a hard carbon film.
摘要翻译：为了允许形成即使施加到玻璃基板上的绝缘膜而不依赖于基板材料，从而改善由静电致动器产生的压力，并且可以实现静电致动器的驱动稳定性和驱动耐久性的提高低成本。一种静电致动器，包括形成在基板上的单独电极，经由预定间隙与单独电极相对设置的振动板和驱动装置，用于通过在各个电极和振动板之间产生静电力而引起振动板的位移包括设置在固定电极和可动电极的相对表面的一个或两个上的绝缘膜和设置在绝缘膜上的表面保护膜。表面保护膜由硬质陶瓷膜或硬碳膜制成。

2. 发明授权

US08087754B2 Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator 有权
标题翻译：静电致动器，液滴喷射头，用于驱动液滴喷射头的方法以及用于制造静电致动器的方法
公开(公告)号：US08087754B2
公开(公告)日：2012-01-03
申请号：US12537501
申请日：2009-08-07
申请人： Yoshifumi Hano , Masahiro Fujii
发明人： Yoshifumi Hano , Masahiro Fujii
IPC分类号： B41J2/045 , B41J2/055
CPC分类号： G02B26/001 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2002/14411 , G02B26/0841
摘要： To provide an electrostatic actuator capable of attaining a large diaphragm displacement by low voltage drive. Furthermore, a droplet discharge head provided with this electrostatic actuator, a method for driving a droplet discharge head, and a method for manufacturing an electrostatic actuator are provided. A diaphragm 4, an individual electrode 11 facing the diaphragm 4 with a gap 10 therebetween, while a voltage is applied between the diaphragm 4 and the individual electrode 11, and an insulating film 4a which is disposed on a surface of the diaphragm 4, the surface facing the individual electrode 11, are included, wherein the insulating film 4a is converted to an electret.
摘要翻译：提供能够通过低压驱动获得大的隔膜位移的静电致动器。此外，设置有设置有该静电致动器的液滴喷射头，用于驱动液滴喷射头的方法以及静电致动器的制造方法。隔膜4是隔膜4和独立电极11之间施加电压的隔膜4，面对隔膜4的单独电极11，隔膜4设置在隔膜4的表面上的绝缘膜4a，包括面对单个电极11的表面，其中绝缘膜4a被转换成驻极体。

3. 发明授权

US08083328B2 Electrostatic actuator, droplet discharging head, method of manufacturing thereof and droplet discharging device 有权
标题翻译：静电致动器，液滴喷射头，其制造方法和液滴喷射装置
公开(公告)号：US08083328B2
公开(公告)日：2011-12-27
申请号：US11970186
申请日：2008-01-07
申请人： Koji Kitahara , Motoki Itoda , Masahiro Fujii , Yoshifumi Hano
发明人： Koji Kitahara , Motoki Itoda , Masahiro Fujii , Yoshifumi Hano
IPC分类号： B41J2/045
CPC分类号： B41J2/14314 , B41J2/16 , B41J2/1606 , B41J2/1628 , B41J2002/14411 , B41J2202/03 , C23C16/40 , H02N1/004
摘要： An electrostatic actuator comprises: a fixed electrode formed on a substrate; a movable electrode placed at an position opposing the fixed electrode via a predetermined gap; a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode: and an insulation film made of HfxAlyOz formed on an opposing surface of at least one of the fixed electrode and the movable electrode.
摘要翻译：静电致动器包括：形成在基板上的固定电极; 可动电极经由预定间隙设置在与固定电极相对的位置; 驱动单元，通过在固定电极和可动电极之间产生静电力来给可动电极施加位移;以及由固定电极和可动电极中的至少一个的相对表面上形成的由Hf x Al y O z z构成的绝缘膜。

4. 发明申请

US20100208008A1 DROPLET DISCHARGING HEAD, MANUFACTURING METHOD THEREOF, AND DROPLET DISCHARGING DEVICE 失效
标题翻译：刮水器卸料头及其制造方法及卸料装置
公开(公告)号：US20100208008A1
公开(公告)日：2010-08-19
申请号：US12770053
申请日：2010-04-29
申请人： Masahiro FUJII , Akira SANO
发明人： Masahiro FUJII , Akira SANO
IPC分类号： B41J2/045 , H01L41/22
CPC分类号： B41J2/14314 , B41J2/16 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1634 , B41J2/1642 , B41J2/1645 , B41J2/1646
摘要： A droplet discharging head, includes: a discharging chamber; a plurality of nozzle orifices discharging droplets and each of the plurality of nozzle orifices is communicated with the discharging chamber; an actuator; a vibrating plate provided using a bottom wall of the discharging chamber and displaceably driven by the actuator; and a reservoir commonly communicated with each discharging chamber. The discharging chamber, the actuator, and the reservoir are each segmented on separate planes and stacked in this order in a manner that a projection plane in a direction perpendicular to a formation plane of the reservoir is contained in formation planes of the actuator and the discharging chamber.
摘要翻译：一种液滴排放头，包括：排放室; 排出液滴的多个喷嘴孔和多个喷嘴孔中的每一个与排出室连通; 执行机构使用所述排出室的底壁设置并由所述致动器驱动的振动板; 以及通常与每个排放室连通的储存器。排放室，致动器和储存器各自分段在分开的平面上并且以这样的顺序堆叠，使得垂直于储存器的形成平面的方向上的投影平面包含在致动器的形成平面中并且排出房间。

5. 发明授权

US07658471B2 Droplet jet head and droplet jet apparatus 失效
标题翻译：液滴喷头和液滴喷射装置
公开(公告)号：US07658471B2
公开(公告)日：2010-02-09
申请号：US11354619
申请日：2006-02-15
申请人： Yasushi Matsuno , Masahiro Fujii , Akira Sano
发明人： Yasushi Matsuno , Masahiro Fujii , Akira Sano
IPC分类号： B41J2/14
CPC分类号： B41J2/14314 , B41J2002/14411 , B41J2002/14491
摘要： A droplet jet head includes a nozzle substrate having a plurality of nozzle holes; a cavity substrate having recesses whose bottoms serve as diaphragms, and the recesses serving as ejection chambers; an electrode substrate having separate electrodes opposed to the diaphragms; a reservoir substrate having a recess serving as a common droplet chamber for supplying droplets to the ejection chambers, through holes for transferring the droplets from the common droplet chamber to the ejection chambers, and nozzle communicating holes for transferring the droplets from the ejection chambers to the nozzle holes; and a driver IC that supplies a driving signal to the separate electrodes. The cavity substrate has a first hole, and the reservoir substrate has a second hole. The first hole and the second hole communicate with each other to form a housing. The driver IC is housed in the housing.
摘要翻译：液滴喷头包括具有多个喷嘴孔的喷嘴基板; 具有凹部的空腔基板，其底部用作隔膜，所述凹部用作喷射室; 具有与隔膜相对的分离电极的电极基板; 储存器基板，其具有用作向喷射室供应液滴的共同液滴室的凹槽，通过用于将液滴从共同液滴室传送到喷射室的孔，以及用于将液滴从喷射室传送到喷嘴的喷嘴连通孔喷嘴孔; 以及向单独的电极提供驱动信号的驱动器IC。空腔基板具有第一孔，并且储存器基板具有第二孔。第一孔和第二孔彼此连通以形成壳体。驱动器IC安装在外壳中。

6. 发明授权

US07188932B2 Electrostatic actuator, droplet ejection head and droplet ejection device 有权
标题翻译：静电执行器，液滴喷射头和液滴喷射装置
公开(公告)号：US07188932B2
公开(公告)日：2007-03-13
申请号：US11013102
申请日：2004-12-15
申请人： Akira Sano , Masahiro Fujii
发明人： Akira Sano , Masahiro Fujii
IPC分类号： B41J2/04
CPC分类号： B41J2/14314
摘要： An electrostatic actuator is provided which can increase the amount of displacement of a diaphragm, thereby improving the ejection pressure when employed as a drive mechanism in a droplet ejection head. The electrostatic actuator comprises: a first substrate having a diaphragm functioning as a first electrode; and a second substrate coupled to the first substrate and having a second electrode opposite the first electrode, wherein: the diaphragm is displaced with an electrostatic force generated by applying a voltage between the electrodes; and an insulation film is provided on a coupling surface of the first substrate which couples with the second substrate, and an area of the insulation film corresponding to the diaphragm has a reduced thickness region.
摘要翻译：提供了一种静电致动器，其可以增加隔膜的位移量，从而在用作液滴喷射头中的驱动机构时提高喷射压力。静电致动器包括：具有用作第一电极的隔膜的第一基板; 以及耦合到所述第一基板并且具有与所述第一电极相对的第二电极的第二基板，其中：所述隔膜通过在所述电极之间施加电压而产生的静电力而移位; 并且在与第二基板耦合的第一基板的耦合表面上设置绝缘膜，并且与隔膜对应的绝缘膜的区域具有减小的厚度区域。

7. 发明申请

US20060181594A1 Electrostatic actuator and manufacturing method thereof, droplet discharging head and manufacturing method thereof, droplet discharging apparatus and device 审中-公开
标题翻译：静电致动器及其制造方法，液滴喷射头及其制造方法，液滴喷射装置及装置
公开(公告)号：US20060181594A1
公开(公告)日：2006-08-17
申请号：US11355393
申请日：2006-02-16
申请人： Masahiro Fujii , Yasushi Matsuno , Akira Sano
发明人： Masahiro Fujii , Yasushi Matsuno , Akira Sano
IPC分类号： B41J2/41
CPC分类号： B41J2/1629 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14411
摘要： An electrostatic actuator includes: a diaphragm constituting one electrode; and an electrode substrate on which an opposed electrode opposite to the diaphragm has been formed with a gap, in which the opposed electrode is formed in a grooved portion, having a rectangular shape in plan view, formed on the electrode substrate and is formed in a plurality of steps such that the gap gradually increases stepwise toward a center part in a long edge direction of the grooved portion.
摘要翻译：静电致动器包括：构成一个电极的隔膜; 并且在电极基板上形成有与隔膜相对的相对电极的电极基板，其间形成有在电极基板上形成有在平面图中的矩形形状的沟槽部分中的相对电极，多个台阶使得间隙在带槽部分的长边方向上逐渐向中心部分逐渐增加。

8. 发明申请

US20060125879A1 Electrostatic actuator, droplet discharge head and method for manufacturing the droplet discharge head, droplet discharge apparatus, and device 失效
标题翻译：静电致动器，液滴喷射头和液滴喷射头的制造方法，液滴喷射装置和装置
公开(公告)号：US20060125879A1
公开(公告)日：2006-06-15
申请号：US11295818
申请日：2005-12-07
申请人： Masahiro Fujii , Katsuji Arakawa
发明人： Masahiro Fujii , Katsuji Arakawa
IPC分类号： B41J2/04
CPC分类号： B41J2/14274 , B41J2/1612 , B41J2/1623 , B41J2/1626
摘要： To provide an electrostatic actuator that generates high pressure under a given voltage and includes an insulating film exhibiting excellent insulation resistance, a droplet discharge head that includes the electrostatic actuator and a method for manufacturing the droplet discharge head, a droplet discharge apparatus that includes the droplet discharge head and has excellent printing performance, and a device that includes the electrostatic actuator and has excellent driving performance. A diaphragm 12, a counter electrode 17 opposite to the diaphragm 12 with a gap interposed therebetween, and an insulating film 16 on a surface of the diaphragm 12 opposite to the counter electrode 17 are included. The insulating film 16 includes at least a dielectric film 16a formed of a substance having a higher relative dielectric constant than silicon oxide.
摘要翻译：为了提供在给定电压下产生高压的静电致动器，并且包括具有优异的绝缘电阻的绝缘膜，包括静电致动器的液滴喷射头和用于制造液滴喷射头的方法，包括液滴的液滴喷射装置排出头，具有优异的印刷性能，以及包括静电致动器并且具有优异的驱动性能的装置。膜片12，与隔膜12相对的间隔相对的对置电极17以及与对置电极17相反的隔膜12的表面上的绝缘膜16。绝缘膜16至少包括由具有比氧化硅更高的相对介电常数的物质形成的电介质膜16a。

9. 发明申请

US20060101858A1 Brittle material substrate scribing device and scribing method, and automatic analysis line 失效
标题翻译：脆性材料基材划线装置和划线方法，以及自动分析线
公开(公告)号：US20060101858A1
公开(公告)日：2006-05-18
申请号：US10541965
申请日：2004-01-08
申请人： Masahiro Fujii
发明人： Masahiro Fujii
IPC分类号： C03B33/037
CPC分类号： C03B33/091 , B23K26/40 , B23K2103/50 , B28D5/0011
摘要： Along a region where a scribe line is formed on a surface of a glass substrate 50, a laser spot is continuously applied for heating at a temperature lower than a softening point of the glass substrate 50, and a region in the vicinity of the heated region is cooled. In this manner, a blind crack is formed along a line to be scribed. A detection unit 40 applies light to the blind crack, immediately after formed in the vicinity of to a cooling spot, through an optical fiber 41. When the blind crack has been formed, part of the light is obtained in the optical fiber 41 because of diffuse reflection. Therefore, detection of the level of this reflected light allows checking as to whether the blind crack has been normally formed or not.
摘要翻译：沿着在玻璃基板50的表面上形成刻划线的区域，在低于玻璃基板50的软化点的温度下，连续施加激光点加热，加热区域附近的区域被冷却。以这种方式，沿着要刻划的线形成盲目的裂纹。检测单元40通过光纤41在形成于冷却点附近之后立即向盲孔施加光。当形成盲目的裂纹时，由于光纤41中的一部分光被获得漫反射。因此，检测该反射光的电平允许检查盲孔是否正常形成。

10. 发明授权

US06989513B2 Heat-generating element, heat-generating substrates, heat-generating substrate manufacturing method, microswitch, and flow sensor 失效
标题翻译：发热元件，发热基板，发热基板的制造方法，微动开关和流量传感器
公开(公告)号：US06989513B2
公开(公告)日：2006-01-24
申请号：US10465842
申请日：2003-06-20
申请人： Katsuji Arakawa , Masahiro Fujii , Hiroshi Koeda
发明人： Katsuji Arakawa , Masahiro Fujii , Hiroshi Koeda
IPC分类号： H05B3/10
CPC分类号： H05B3/148
摘要： A stable and durable heat-generating element and substrate, a method of efficient and highly precise manufacture of same, and equipment utilizing same are obtained. Employing as material a silicon substrate into at least a portion of which boron or another impurity is diffused to impart conductivity, a heater portion, in which are provided one or a plurality of slits the corner portions of which are removed or are rounded, is fabricated integrally on the silicon substrate by etching processes. Simultaneously with this, a depression portion provided below to control the heating state of the heater portion is formed integrally.
摘要翻译：获得稳定且耐用的发热元件和基板，其高效且高精度制造的方法以及利用其的设备。将作为材料的硅衬底作为其至少一部分硼或另一杂质扩散以赋予导电性的材料，加热器部分设置有一个或多个切口，其角部被去除或被倒圆形，通过蚀刻工艺一体地在硅衬底上。与此同时，下面设置的用于控制加热器部分的加热状态的凹部形成为一体。

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