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    • 3. 发明授权
    • Semiconductor device capable of preventing moisture-absorption of fuse area thereof
    • 能够防止其保险丝区域的吸湿的半导体装置
    • US06525398B1
    • 2003-02-25
    • US09650967
    • 2000-08-29
    • Byung-yoon KimWon-seong LeeYoung-woo Park
    • Byung-yoon KimWon-seong LeeYoung-woo Park
    • H01L2900
    • H01L23/564H01L21/768H01L23/5258H01L23/585H01L27/10814H01L27/10894H01L27/11H01L2924/0002Y10S257/906Y10S257/907Y10S257/908H01L2924/00
    • A fuse area of a semiconductor device capable of preventing moisture-absorption and a method for manufacturing the fuse area are provided. When forming a guard ring for preventing permeation of moisture through the sidewall of an exposed fuse opening portion, an etch stop layer is formed over a fuse line. A guard ring opening portion is formed using the etch stop layer. The guard ring opening portion is filled with a material for forming the uppermost wiring of multi-level interconnect wirings or the material of a passivation layer, thereby forming the guard ring concurrently with the uppermost interconnect wiring or the passivation layer. Accordingly, permeation of moisture through an interlayer insulating layer or the interface between interlayer insulating layers around the fuse opening portion can be efficiently prevented by a simple process. In addition, the etch stop layer is also formed under the fuse opening portion so that an insulating layer remaining on the fuse line can be controlled to have a predetermined thickness when forming the fuse opening portion, thereby improving the cutting efficiency of fuses.
    • 提供了能够防止吸湿的半导体器件的保险丝区域和制造保险丝区域的方法。 当形成用于防止湿气透过露出的保险丝开口部分的侧壁的保护环时,在熔丝线上形成蚀刻停止层。 使用蚀刻停止层形成防护环开口部。 保护环开口部分填充有用于形成多层互连布线的最上布线或钝化层的材料的材料,从而与最上面的布线或钝化层同时形成保护环。 因此,可以通过简单的工艺有效地防止湿气渗透到层间绝缘层或熔断器开口部周围的层间绝缘层之间的界面。 另外,在保险丝开口部分也形成有蚀刻停止层,使得在形成保险丝开口部分时,保留在熔丝线上的绝缘层可以被控制为具有预定的厚度,从而提高了保险丝的切割效率。
    • 5. 发明授权
    • Semiconductor device capable of preventing moisture-absorption of fuse area thereof and method for manufacturing the fuse area
    • 能够防止保险丝区域吸湿的半导体装置及制造保险丝区域的方法
    • US07517762B2
    • 2009-04-14
    • US11139906
    • 2005-05-26
    • Byung-yoon KimWon-seong LeeYoung-woo Park
    • Byung-yoon KimWon-seong LeeYoung-woo Park
    • H01L23/62H01L21/8242
    • H01L23/564H01L21/768H01L23/5258H01L23/585H01L27/10814H01L27/10894H01L27/11H01L2924/0002Y10S257/906Y10S257/907Y10S257/908H01L2924/00
    • A fuse area of a semiconductor device capable of preventing moisture-absorption and a method for manufacturing the fuse area are provided. When forming a guard ring for preventing permeation of moisture through the sidewall of an exposed fuse opening portion, an etch stop layer is formed over a fuse line. A guard ring opening portion is formed using the etch stop layer. The guard ring opening portion is filled with a material for forming the uppermost wiring of multi-level interconnect wirings or the material of a passivation layer, thereby forming the guard ring concurrently with the uppermost interconnect wiring or the passivation layer. Accordingly, permeation of moisture through an interlayer insulating layer or the interface between interlayer insulating layers around the fuse opening portion can be efficiently prevented by a simple process. In addition, the etch stop layer is also formed under the fuse opening portion so that an insulating layer remaining on the fuse line can be controlled to have a predetermined thickness when forming the fuse opening portion, thereby improving the cutting efficiency of fuses.
    • 提供了能够防止吸湿的半导体器件的保险丝区域和制造保险丝区域的方法。 当形成用于防止湿气透过露出的保险丝开口部分的侧壁的保护环时,在熔丝线上形成蚀刻停止层。 使用蚀刻停止层形成防护环开口部。 保护环开口部分填充有用于形成多层互连布线的最上布线或钝化层的材料的材料,从而与最上面的布线或钝化层同时形成保护环。 因此,可以通过简单的工艺有效地防止湿气渗透到层间绝缘层或熔断器开口部周围的层间绝缘层之间的界面。 另外,在保险丝开口部分也形成有蚀刻停止层,使得在形成保险丝开口部分时,保留在熔丝线上的绝缘层可以被控制为具有预定的厚度,从而提高了保险丝的切割效率。
    • 8. 发明授权
    • Air vent system for door of automobile
    • 汽车门排气系统
    • US06254175B1
    • 2001-07-03
    • US09709681
    • 2000-11-09
    • Byung-Yoon Kim
    • Byung-Yoon Kim
    • B60J504
    • B60H1/3421B60H1/247B60H2001/3478
    • The invention relates to an air vent system for a door of an automobile to allow a passenger to avoid undesired exposure to air by completely blocking an air duct, the system constructed with a door duct installed at a door with an inlet that is to be tightly aligned to a duct of a crush pad when the door is closed and an outlet formed to a predetermined direction of the door and control apparatus installed in the front side of the door duct to control an air exhausting direction, the system comprising: a damper arranged in the center of the door duct for opening and closing the door duct at the time of rotations; a damper knob coupled with a rotary axis at an edge of the door duct to be rotated; and links connecting damper and damper knob which is rotated to allow the damper to open and close the door duct.
    • 本发明涉及一种用于汽车门的排气系统,以允许乘客通过完全阻挡风道来避免不期望的暴露在空气中,该系统由安装在门上的门导管构成,入口必须紧紧 当门关闭时与粉碎垫的管道对准,并且出口形成为门和控制装置的预定方向并且安装在门管道的前侧以控制排气方向,该系统包括:阻尼器,其布置成 在门管的中心,用于在旋转时打开和关闭门导管; 阻尼器旋钮,其与所述门导管的边缘处的旋转轴线相连接以旋转; 以及连接阻尼器和阻尼器旋钮的连杆,其被旋转以允许阻尼器打开和关闭门导管。