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    • 7. 发明申请
    • APPARATUS FOR CHECKING DIMENSIONS AND/OR SHAPE OF A MECHANICAL PART
    • 检查机械尺寸和/或形状的装置
    • US20160102959A1
    • 2016-04-14
    • US14895057
    • 2014-06-17
    • MARPOSS SOCIETA' PER AZIONI
    • Enrico Graziani
    • G01B3/46
    • G01B3/46
    • An apparatus for checking dimensions and/or shape includes one or more feelers (7,8;9;67,68), three for preference, adapted to touch the surface of a mechanical part (2;61) to be checked, a transducer and/or display device (33;78) with a movable part (34;77), and a mechanical transmission assembly (20) to transmit to the movable part of the transducer and/or display device the displacements of the feeler/s. The mechanical transmission assembly includes a shaft (22) defining an axis (A) and a guiding element (30) adapted to house a guide portion (25) of the shaft. The shaft includes a resiliently deformable portion (26), that is preferably a reduced diameter portion having axial symmetry, in an intermediate position between the guide portion and an abutment portion (27).
    • 用于检查尺寸和/或形状的装置包括一个或多个触针(7,8; 9; 67,68),其优选地适于触摸待检查的机械部件(2; 61)的表面,换能器 和/或具有可移动部分(34; 77)的显示装置(33; 78)以及机械传动组件(20),用于将传感器和/或显示装置的可移动部分传递到探测器的位移。 机械传动组件包括限定轴线(A)的轴(22)和适于容纳轴的引导部分(25)的引导元件(30)。 该轴包括弹性变形部分(26),该部分优选地是具有轴向对称性的直径减小的部分,位于引导部分和邻接部分(27)之间的中间位置。
    • 8. 发明申请
    • SYSTEM AND METHOD FOR CHECKING DIMENSIONS AND/OR POSITION OF AN EDGE OF A WORKPIECE
    • 用于检查工件边缘尺寸和/或位置的系统和方法
    • US20150369581A1
    • 2015-12-24
    • US14650477
    • 2013-12-20
    • MARPOSS SOCIETA' PER AZIONI
    • Roberto Toso
    • G01B3/46G01B5/12
    • G01B3/46G01B3/26G01B5/0032G01B5/12
    • A system for checking size and/or position of an edge (5, R, T) of a workpiece (1, 1R, 1T) comprises two checking elements including matching elements (6, 7; 16, 17) which comprise respective surfaces having tapered matching zones (8, 9) adapted to cooperate with the edge (5, R, T) of the workpiece (1, 1R, 1T) along a longitudinal direction, and a transducer element (11) that provides electrical signals (M, M6, M7) indicative of the cooperation between the matching zones and the edge. The matching zones define slope angles (α, β) with respect to the longitudinal direction that are different from each other. A method that uses such a system for checking includes bringing the matching elements in a checking condition in which the respective matching zone cooperates with the edge to be checked, detecting the electrical signals provided by the transducer element, and processing such signals with reference signals indicative of the cooperation between each matching zone and a reference edge. System and method can be advantageously applied in checking the diameter of an edge of a valve seat (2).
    • 用于检查工件(1,1R,1T)的边缘(5,R,T)的尺寸和/或位置的系统包括两个检查元件,包括匹配元件(6,7; 16,17),其包括各自的表面, 适于与沿着纵向的工件(1,1R,1T)的边缘(5,R,T)配合的锥形匹配区域(8,9)和提供电信号(M, M6,M7),指示匹配区域和边缘之间的协作。 匹配区域相对于彼此不同的纵向方向定义倾斜角(α,&Bgr)。 使用这种系统进行检查的方法包括使匹配元件进入检查条件,其中各个匹配区域与待检查的边缘配合,检测由换能器元件提供的电信号,并用参考信号指示处理这些信号 每个匹配区域与参考边缘之间的协作。 系统和方法可以有利地用于检查阀座(2)的边缘的直径。
    • 9. 发明授权
    • Method and apparatus for measuring a manufacturing deviation in an external gear
    • 测量外齿轮制造偏差的方法和装置
    • US09146089B2
    • 2015-09-29
    • US14123591
    • 2012-06-19
    • Roberto BaruchelloMarco Brevigliero
    • Roberto BaruchelloMarco Brevigliero
    • G01B5/14G01B5/02G01M13/02G01B5/20
    • G01B5/02G01B5/202G01M13/021
    • Method and apparatus (1) for measuring a manufacturing deviation in an external gear (2). The gear is arranged onto a stationary central pin (3), the external diameter of which is smaller than the internal diameter of the gear so that a relative movement between the gear and the pin is allowed; a coupling member (5), preferably including a head (17) that does not rotate and is adapted to fit into the teeth of the gear, is urged with a predetermined strength against the teeth of the gear in order to mesh with the teeth and concurrently bring an internal lateral surface of the gear into engagement with an external lateral surface of the pin. The position of the central axis (A) of the gear is determined and the manufacturing deviation of the gear is determined as a function of said position. The deviation so determined can be corrected as a function of a reference distance (D) indicative of the radial dimensions of the gear.
    • 用于测量外齿轮(2)的制造偏差的方法和装置(1)。 齿轮设置在固定的中心销(3)上,其外径小于齿轮的内径,使得允许齿轮和销之间的相对移动; 优选地包括不旋转并适于装配到齿轮的齿中的头部(17)的联接构件(5)以与齿轮啮合的预定强度被推压到齿轮的齿上, 同时使齿轮的内侧表面与销的外侧表面接合。 确定齿轮的中心轴线(A)的位置,并根据所述位置确定齿轮的制造偏差。 可以根据指示齿轮的径向尺寸的参考距离(D)来校正如此确定的偏差。
    • 10. 发明授权
    • Method and apparatus for optically measuring by interferometry the thickness of an object
    • 用于通过干涉测量物体的厚度进行光学测量的方法和装置
    • US09079283B2
    • 2015-07-14
    • US13643518
    • 2011-05-17
    • Dino GallettiDomenico Malpezzi
    • Dino GallettiDomenico Malpezzi
    • B24B1/00B24B7/22B24B37/013B24B49/12G01B11/06
    • B24B7/228B24B37/013B24B49/12G01B11/0675G01B11/0683
    • Methods and apparatuses are used for optically measuring by interferometry the thickness (T) of an object (2) such as a slice of semiconductor material. Readings of the object thickness by optical interferometry are carried out, rough thickness values (RTW) are obtained and frequencies, indicating how often the rough thickness values occur, are evaluated. A limited set of adjacent rough thickness values whose frequency integration or summation represents an absolute maximum is identified, and the actual value of the thickness of the object is determined as a function of the rough thickness values belonging to said limited set of values. The rough thickness values can be divided up into classes (C) with corresponding frequencies (F), and in this case, a preponderant group (Gmax) of thickness classes is identified as the above-mentioned limited set of adjacent rough thickness. A lower reject threshold (Rmin) and a higher reject threshold (Rmax) that define a searching interval including the actual value of the object thickness are also determined, and all the rough thickness values that are outside the searching interval are eliminated from further processing. When measuring the object during a surface machining, the reject thresholds are progressively and automatically updated as a function of a gradual thickness reduction that the object undergoes.
    • 方法和装置用于通过干涉测量诸如半导体材料片的物体(2)的厚度(T)进行光学测量。 通过光学干涉测量读取物体厚度,获得粗糙厚度值(RTW),并且评估表示粗糙厚度值出现频率的频率。 识别频率积分或求和表示绝对最大值的有限的相邻粗糙厚度值集,并且确定物体的厚度的实际值作为属于所述有限值集合的粗糙厚度值的函数。 粗糙度值可以分为具有相应频率(F)的类别(C),在这种情况下,厚度等级的优势组(Gmax)被识别为上述有限的相邻粗糙厚度集合。 还确定定义包括对象厚度的实际值的搜索间隔的较低拒绝阈值(Rmin)和较高拒绝阈值(Rmax),并且从进一步处理中消除在搜索间隔之外的所有粗糙厚度值。 当在表面加工期间测量物体时,拒绝阈值将随着物体经历的逐渐减小厚度而逐渐自动更新。