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    • 2. 发明授权
    • 기판을 열처리하기 위한 방법 및 장치
    • KR102296883B1
    • 2021-08-31
    • KR1020197001302
    • 2017-06-14
    • H01L21/67H01J61/16H05B41/32
    • 본발명은기판들을열처리하기위한장치(200)에관한것이다. 이러한경우에, 가스방전램프(110)는대기작동시에소위시머모드로동작한다. 일정전력의전력공급장치(280)는제1 전자스위치(290)를통해가스방전램프에연결될수 있다. 적어도하나의충전식커패시터(120)는제2 전자스위치(170)를통해가스방전램프에연결될수 있다. 예를들어, 20 밀리초(millisecond) 내지 500 밀리초의지속기간으로기판의단부측의열처리는광 흡수에관리되는방식으로장치(200)의보조로가능하다. 이러한시간창은, 특히, 2 내지 200 마이크로미터의두께를가지는코팅들의열처리를위한관심의대상이며, 여기서기판의후방측의온도는단부측의온도미만을유지할수 있다. 또한, 단부측 상의온도는시간창의종료시에제2 전자스위치(170)를통해커패시터(120)에연결되는가스방전램프(110)에의해상당히증가될수 있다.
    • 9. 发明公开
    • 방전관
    • 排放管和冲洗吸收装置
    • KR1020050121210A
    • 2005-12-26
    • KR1020057017791
    • 2004-04-01
    • 오카야 덴기 산교 가부시키가이샤
    • 이마이고이치호리사토시마츠야마요이치하나무라요시카즈
    • H01J61/067H01J61/16H01J61/54H01T4/12
    • H01J17/40H01J17/20H01T4/12
    • A case member (12) composed of an insulating material has openings at both ends. An airtight envelope (16) is formed by hermetically sealing the both end openings of the case member (12) with a pair of cover members (14, 14) which also serve as discharge electrodes. A certain discharge gap (22) is formed between discharge electrode portions (18, 18) of the cover members (14, 14). A plurality of linear trigger discharge films (28) are formed on the inner wall surface (24) of the case member (12) in such a way that both ends of the films face the cover members (14, 14) with very small discharge gaps (26) intervening therebetween. An insulating coating film (30) containing an alkali iodide is formed on the surface of each discharge electrode portion (18). A discharge tube (10) is formed by filling the airtight envelope (16) with a discharge gas containing Kr (krypton).
    • 由绝缘材料构成的壳体构件(12)在两端具有开口。 通过使用也用作放电电极的一对盖构件(14,14)将壳体构件(12)的两端开口气密地密封,形成气密的外壳(16)。 在盖构件(14,14)的放电电极部分(18,18)之间形成一定的放电间隙(22)。 多个线性触发放电膜(28)以这样的方式形成在壳体构件(12)的内壁表面(24)上,使得膜的两端以非常小的放电面向盖构件(14,14) 间隙(26)介于其间。 在每个放电电极部分(18)的表面上形成含有碱金属碘化物的绝缘涂膜(30)。 通过用含有Kr(氪)的放电气体填充气密封套16而形成放电管10。