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1. 发明授权

KR101634305B1 탄소계 나노 물질을 이용한 공진기 및 그 제조 방법 有权
标题翻译：使用碳纳米材料的谐振器及其制造方法
公开(公告)号：KR101634305B1
公开(公告)日：2016-06-29
申请号：KR1020100044062
申请日：2010-05-11
申请人： 삼성전자주식회사 , 연세대학교 산학협력단
发明人： 신제식 , 전성찬 , 박윤권 , 송인상 , 김영일 , 김덕환 , 김철수
IPC分类号： H03H9/24 , B82Y30/00 , B82B3/00 , H03H9/02
CPC分类号： H03H9/2463 , B82Y30/00 , H03H2009/02322
摘要： 탄소계나노물질을이용한공진기가개시된다. 제안되는공진기는, 희생층이형성된기판및 희생층상에형성되고적어도하나의탄소계나노물질층및 적어도하나의실리콘카바이드(SiC)층을포함하는공진구조체를포함한다.

2. 发明公开

KR1020100042443A 주름진 다결정 탄화규소 마이크로 공진기 无效
标题翻译：具有校正功能的多晶3C-SIC谐振器
公开(公告)号：KR1020100042443A
公开(公告)日：2010-04-26
申请号：KR1020080101593
申请日：2008-10-16
申请人： 울산대학교 산학협력단
发明人： 정귀상
IPC分类号： H01P7/10
CPC分类号： H01P7/10 , H03H2009/02322
摘要： PURPOSE: A corrugated poly-crystal silicon carbide micro resonator is provided to improve the resonant frequency as much as 60% than a flat type resonator by enabling the center part of a micro resonator formed by a poly-crystal silicon carbide film to be projected to the upper part and to be corrugated. CONSTITUTION: A corrugated structure is formed by enabling the central part of a micro resonator to be projected to the upper part and to be corrugated. The length(L) of the poly-crystal silicon carbide micro resonator is 34-38um. The width(W) of a beam of the poly-crystal silicon carbide micro resonator is 11-13um. The width(C) of the corrugated part which is projected to the upper part of the poly-crystal silicon carbide micro resonator is 5-7um. The depth(d) of the poly-crystal silicon carbide micro resonator is 0.4um.
摘要翻译：目的：提供一种波纹状多晶碳化硅微型谐振器，通过使由多晶硅碳化硅膜形成的微谐振器的中心部分能够投影到平面型谐振器，可提高谐振频率高达60％上部和波纹状。构成：通过使微型谐振器的中心部分能够突出到上部并形成波纹形成波纹结构。多晶碳化硅微型谐振器的长度（L）为34-38um。多晶碳化硅微型谐振器的光束的宽度（W）为11-13μm。投影到多晶硅碳化硅微型谐振器的上部的波纹状部的宽度（C）为5-7um。多晶碳化硅微型谐振器的深度（d）为0.4um。

3. 发明公开

KR1020110124590A 탄소계 나노 물질을 이용한 공진기 및 그 제조 방법 有权
标题翻译：使用碳纳米材料的谐振器及其制造方法
公开(公告)号：KR1020110124590A
公开(公告)日：2011-11-17
申请号：KR1020100044062
申请日：2010-05-11
申请人： 삼성전자주식회사 , 연세대학교 산학협력단
发明人： 신제식 , 전성찬 , 박윤권 , 송인상 , 김영일 , 김덕환 , 김철수
IPC分类号： H03H9/24 , B82Y30/00 , B82B3/00 , H03H9/02
CPC分类号： H03H9/2463 , B82Y30/00 , H03H2009/02322 , B82B3/0004
摘要： PURPOSE: A resonator which uses carbon based nano materials and a manufacturing method thereof are provided to include a silicon carbide layer and a carbon based nano material layer, thereby reducing energy loss with high rigidity compared to density. CONSTITUTION: A sacrificial layer(120) is arranged on a substrate(110). A resonance structure(130) is arranged on the sacrificial layer. The sacrificial layer supports both sides of the resonance structure of a dual fixing beam type. The resonance structure comprises a carbon based nano material layer(132) and a silicon carbide layer(131). The carbon based nano material layer includes one of materials among graphene, graphite, and CNT(Carbon Nano Tube).
摘要翻译：目的：提供一种使用碳纳米材料的谐振器及其制造方法，其包括碳化硅层和碳基纳米材料层，从而与密度相比，具有高刚性的能量损失。构成：牺牲层（120）布置在基底（110）上。谐振结构（130）布置在牺牲层上。牺牲层支撑双重固定梁类型的共振结构的两侧。谐振结构包括碳基纳米材料层（132）和碳化硅层（131）。碳纳米材料层包括石墨烯，石墨和CNT（碳纳米管）之一的材料之一。

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