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    • 2. 发明公开
    • 반도체 소자의 형성 방법
    • 形成半导体器件的方法
    • KR1020130017043A
    • 2013-02-19
    • KR1020110079296
    • 2011-08-09
    • 에스케이하이닉스 주식회사
    • 장동인
    • H01L21/8242H01L27/108H01L21/336H01L29/78
    • H01L29/66007H01L21/02697H01L27/10885H01L27/10894H01L29/66022H01L29/66712
    • PURPOSE: A method for forming a semiconductor device is provided to improve the overlap margin of a semiconductor substrate and a storage electrode by easily forming the lower area of a store electrode region. CONSTITUTION: An interlayer insulating film is formed on a semiconductor substrate including an active area(104) and an element isolation film(102). The interlayer insulating film is etched to expose both ends of the active area and form a preliminary store electrode region. A seed layer is formed in the bottom surface of the preliminary store electrode region. A nano rod is formed on the seed layer. A sacrificial dielectric film and an insulating layer are formed at both sides of the nano rod. The nano rod and the seed layer are removed to expose both ends of the active area and form the store electrode region.
    • 目的:提供一种用于形成半导体器件的方法,通过容易地形成存储电极区域的下部区域来改善半导体衬底和存储电极的重叠余量。 构成:在包括有源区(104)和元件隔离膜(102)的半导体衬底上形成层间绝缘膜。 蚀刻层间绝缘膜以露出有源区的两端并形成初步存储电极区。 种子层形成在预备电极区域的底面。 在种子层上形成纳米棒。 牺牲电介质膜和绝缘层形成在纳米棒的两侧。 去除纳米棒和种子层以暴露有源区的两端并形成存储电极区。