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    • 4. 发明公开
    • 리드프레임을 이용한 팬-아웃 반도체 패키지 제조방법, 이에 의한 반도체 패키지 및 패키지 온 패키지
    • 使用引线框架制造散热半导体封装的方法,其半导体封装及其包装上的封装
    • KR1020130048810A
    • 2013-05-13
    • KR1020110113649
    • 2011-11-03
    • 주식회사 네패스
    • 소흐세이헤안시에우유엔지엔권용태
    • H01L23/48H01L23/12H01L21/78
    • H01L24/96H01L21/568H01L23/49816H01L23/49861H01L23/5389H01L24/19H01L24/24H01L24/82H01L24/97H01L25/105H01L2224/12105H01L2224/24175H01L2224/73267H01L2225/1035H01L2225/1041H01L2225/1058H01L2924/181H01L2924/18162H01L2924/00
    • PURPOSE: A method for manufacturing a fan-out semiconductor package using a lead frame, the semiconductor package, and a package-on-package thereof are provided to simplify a semiconductor package fabrication process by using a signal lead of the lead frame as a flat type or a vertical type connection path. CONSTITUTION: A lead frame having an opening part is prepared(S100). The lead frame is adhered onto a first base(S102). A semiconductor chip is adhered onto the first base through the opening part of the lead frame(S104). An encapsulant for sealing the lead frame and the semiconductor chip is formed on the first base(S106). The first base used for forming the encapsulant is removed(S108). The bond pad of the semiconductor chip and the signal lead of the lead frame are exposed to the outside(S110). The bond pad is connected to the signal lead to form a redistribution metal pattern(S112). A redistribution metal pad for exposing a part of the redistribution metal pattern is exposed(S114). A conductive connection terminal is adhered to the exposed redistribution metal pad(S116). A singulation process for separating the signal line of the lead frame is performed(S118). [Reference numerals] (AA) Start; (BB) End; (S100) Prepare a lead frame having an opening part in which a semiconductor chip is placed; (S102) Adhere the lead frame on a first base; (S104) Adhere the semiconductor chip onto the first base through the opening part; (S106) Form an encapsulant for sealing the lead frame and the semiconductor chip on the first base; (S108) Remove the first base; (S110) Expose a bond pad of the semiconductor chip and a lead frame signal lead by forming and patterning an insulation layer; (S112) Connect the bond pad and the signal lead by a redistribution metal pattern; (S114) From an insulation layer pattern and expose the redistribution metal pad; (S116) Adhere the exposed redistribution metal pad to a conductive connection terminal; (S118) Perform a singulation process for separating a signal line of the lead frame
    • 目的:提供一种使用引线框,半导体封装和封装封装件制造扇出半导体封装的方法,以通过使用引线框架的信号引线作为平面来简化半导体封装制造工艺 类型或垂直类型的连接路径。 构成:准备具有开口部的引线框架(S100)。 引线框架粘附到第一基座上(S102)。 半导体芯片通过引线框架的开口部分附着到第一基座上(S104)。 在第一基座上形成用于密封引线框和半导体芯片的密封剂(S106)。 去除用于形成密封剂的第一基底(S108)。 半导体芯片的接合焊盘和引线框架的信号引线暴露在外部(S110)。 接合焊盘连接到信号引线以形成再分布金属图案(S112)。 暴露再分布金属图案的一部分的再分布金属焊盘露出(S114)。 导电连接端子被粘附到暴露的再分布金属垫(S116)上。 执行用于分离引线框架的信号线的分离处理(S118)。 (附图标记)(AA)开始; (BB)结束; (S100)准备具有放置半导体芯片的开口部的引线框架; (S102)将引线框架固定在第一基座上; (S104)通过开口部将半导体芯片固定在第一基板上; (S106)形成用于将引线框架和半导体芯片密封在第一基座上的密封剂; (S108)拆下第一个底座; (S110)通过形成和图案化绝缘层来露出半导体芯片的接合焊盘和引线框信号引线; (S112)通过再分布金属图案连接接合焊盘和信号引线; (S114)从绝缘层图案露出再分布金属垫; (S116)将暴露的再分布金属焊盘固定到导电连接端子; (S118)进行用于分离引线框的信号线的分割处理