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    • 5. 发明公开
    • 방전램프, 접속용 케이블, 광원장치 및 노광장치
    • 放电灯,连接用电缆,光源装置和曝光装置
    • KR1020100014217A
    • 2010-02-10
    • KR1020097000774
    • 2008-04-03
    • 가부시키가이샤 니콘
    • 기쿠치다카유키기타노히로시
    • H01J61/52H01J5/50F21V29/00
    • H01J5/62H01J5/54H01J61/523
    • A light source device having a large cooling action on the ferrule member of a discharge lamp. A connector (41) on the sides of the power supply (32) and the air blower (34) and the ferrule side connector (52) of a discharge lamp (1) are connected to each other through a connection cable (57) having a power cable (33A) in which an air blow pipe (35A) is contained. An electric power is supplied from the power supply (32) to a ferrule part (28) through the power cable (33A) of the connection cable (57), the ferrule side connector (52) and a flow passage-bending member (51). The cool air from the air blower (34)is supplied to the groove part (28b) of the ferrule part (28) through the air blow pipe (35A) of the connection cable (57), the ferrule side connector (52) and an air blow passage in the flow passage-bending member (51).
    • 一种在放电灯的套圈构件上具有大的冷却作用的光源装置。 电源(32)和鼓风机(34)以及放电灯(1)的套圈侧连接器(52)的侧面上的连接器(41)通过连接电缆(57)彼此连接,连接电缆(57) 其中容纳吹气管(35A)的电力电缆(33A)。 通过连接电缆(57)的电源电缆(33A),套圈侧连接器(52)和流路弯曲部件(51)将电力从电源(32)供给到套圈部(28) )。 通过连接电缆(57)的吹气管(35A),套圈侧连接器(52)和套圈侧连接器(52)将来自鼓风机(34)的冷空气供给到套圈部(28)的槽部(28b) 在流路弯曲构件(51)中的吹气通道。
    • 6. 发明公开
    • 방전램프, 접속용 케이블, 광원장치 및 노광장치
    • 放电灯,连接用电缆,光源装置和曝光装置
    • KR1020100014216A
    • 2010-02-10
    • KR1020097000773
    • 2008-04-03
    • 가부시키가이샤 니콘
    • 기쿠치다카유키
    • H01J61/52H01J5/50F21V29/00
    • H01J5/54F21V29/58F21V29/83H01J5/62H01J61/523
    • A light source device having a large cooling action on the ferrule member of a discharge lamp. The light source device comprises the discharge lamp having a glass tube (25) in which an electrode for discharging is contained and a ferrule part (28) connected to the glass tube (25), and a connection cable (72). The ring-like member (74A) of the connection cable (72) is connected to the ferrule part (28) of the discharge lamp. A cool air blow passage (74Ac) is formed in the ring member (74A). An electric power is supplied from a power supply (32) to the ferrule part (28) through the power cable (33D) of the connection cable (72) and the ring-like member (74A). Cool air is supplied from an air blower (34) to the ferrule part (28) through the air blow pipe (35D) of the connection cable (72) and the ring-like member (74A).
    • 一种在放电灯的套圈构件上具有大的冷却作用的光源装置。 光源装置包括具有玻璃管(25)的放电灯,其中容纳有用于放电的电极和连接到玻璃管(25)的套圈部分(28)和连接电缆(72)。 连接电缆(72)的环状部件(74A)与放电灯的套圈部(28)连接。 在环形构件(74A)中形成有冷空气吹出通道(74Ac)。 通过连接电缆(72)和环状部件(74A)的电力电缆(33D)从电源(32)向套圈部(28)供给电力。 冷气通过连接电缆(72)的鼓风管(35D)和环状部件(74A)从鼓风机(34)供给到套圈部(28)。