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    • 4. 发明公开
    • 투영 광학계, 노광 장치, 노광 시스템 및 노광 방법
    • 投影光学系统,曝光装置,曝光系统和曝光方法
    • KR1020070088467A
    • 2007-08-29
    • KR1020077002501
    • 2005-12-09
    • 가부시키가이샤 니콘
    • 오무라야스히로
    • H01L21/027
    • G02B26/0891G02B13/24G02B27/0068G03F7/70308G02B5/04
    • A projection optical system (PL) where an image on a first surface (M) is formed on a second surface (P). The projection optical system (PL) has at least one first wedge prism (4) where an incident surface and an exit surface have flat surfaces, the flat surface of the incident surface and the flat surface of the exit surface having a predetermined first wedge angle. The first wedge prism (4) is rotatable substantially about Y-axis, where Z-axis is in the direction normal to the first surface (M), X-axis is in the direction of a line at which the flat surface of the incident surface and the flat surface of the exit surface cross, and Y-axis is in the direction orthogonal to Z-axis and X-axis.
    • 投影光学系统(PL),其中第一表面(M)上的图像形成在第二表面(P)上。 投影光学系统(PL)具有至少一个第一楔形棱镜(4),其中入射表面和出射表面具有平坦表面,入射表面的平坦表面和出射表面的平坦表面具有预定的第一楔形角 。 第一楔形棱镜(4)可以基本上围绕Y轴旋转,其中Z轴在垂直于第一表面(M)的方向上,X轴沿着入射平面的线的方向 表面和出射表面的平坦表面交叉,并且Y轴在与Z轴和X轴正交的方向上。
    • 5. 发明公开
    • 결정화 장비용 광학 시스템
    • 用于结晶装置的光学系统
    • KR1020010064139A
    • 2001-07-09
    • KR1019990062273
    • 1999-12-24
    • 한국전자통신연구원
    • 이각현김도훈최상수정해빈김대용
    • H01L21/20
    • H01L21/02686G02B5/3083G02B7/04G02B13/143G02B26/0891G02B27/28H01L21/2026
    • PURPOSE: An optical system for a crystallization apparatus is provided to enable a large area LCD fabrication by growing a uniform crystal having an equal grain size by performing a projection exposure as to micro stripe patterns by a projection optical system and by scanning gradually them. CONSTITUTION: The optical system makes an amorphous silicon thin film as a silicon thin film crystallized by an exposure of a micro stripe pattern using an eximer laser as a light source. The system includes the first lens-the tenth lens arranged along an optical axis from the eximer laser. The first lens(300) is a both convex lens, and the second lens(310) is a convex concave lens convex toward the light source, and the third lens(320) is a convex concave lens convex toward the light source, and the fourth lens(330) is a both concave lens. The fifth lens(340) is a both convex lens, and the sixth lens(350) is a concave convex lens concave toward the light source and the seventh lens(360) is a convex concave lens convex toward the light source. The eighth lens(370) is a both convex lens, the ninth lens(380) is a convex concave lens convex toward the light source, and the tenth lens(390) is a both convex lens. At least one of the ten lenses includes a CaF2 to improve an efficiency of a light intensity and to reduce a color aberration. The system further includes an optical component(200) made with a birefringent material to control a depth of focus of a light transmitted the tenth lens.
    • 目的:提供一种用于结晶装置的光学系统,通过用投影光学系统对投影光学系统进行投影曝光,并逐渐扫描,通过生长具有相同晶粒尺寸的均匀晶体来实现大面积的LCD制造。 构成:光学系统通过使用准分子激光器作为光源通过微条纹图案的曝光而使非晶硅薄膜作为硅薄膜结晶。 该系统包括第一透镜 - 沿着来自准分子激光器的光轴布置的第十透镜。 第一透镜(300)是双凸透镜,第二透镜(310)是朝向光源凸出的凸凹透镜,第三透镜​​(320)是朝向光源凸起的凸凹透镜, 第四透镜(330)是两个凹透镜。 第五透镜(340)是双凸透镜,第六透镜(350)是朝向光源凹入的凹凸透镜,第七透镜(360)是朝向光源凸出的凸凹透镜。 第八透镜(370)是双凸透镜,第九透镜(380)是朝向光源凸出的凸凹透镜,第十透镜(390)是双凸透镜。 十个透镜中的至少一个透镜包括CaF2以提高光强度的效率并减少色差。 该系统还包括用双折射材料制成的光学部件(200),以控制透射第十透镜的光的焦深。
    • 6. 发明公开
    • 광 경로 조정 유닛 및 디스플레이 디바이스
    • 光路调整单元和显示设备
    • KR1020160145106A
    • 2016-12-19
    • KR1020167031503
    • 2015-06-18
    • 보에 테크놀로지 그룹 컴퍼니 리미티드
    • 쑨,옌류
    • G02B19/00G02B26/08
    • F21V13/14G02B3/08G02B5/0278G02B5/0294G02B5/09G02B17/086G02B19/0023G02B19/0047G02B27/1066G02F1/13336G06F3/1446H01L27/3293H01L51/5262G02B26/0891
    • 광경로조정유닛및 이를채택한디스플레이디바이스. 상기광 경로조정유닛은, 서로다른방향들로부터입사한광을조정하여대략동일한방향으로방출하기위해사용되며, 집광부분(11), 반사부분(12) 및광 확산부분(13)을포함한다. 상기집광부분(11) 및상기광 확산부분(13)은빈 공간을에워싸고, 상기반사부분(12)은상기빈 공간내부에배치되고, 상기집광부분(11)의중간및 상기광 확산부분(13)의중간에각각접속되어상기빈 공간을이등분한다. 상기집광부분(11)은서로다른방향들로부터입사한광을모으기위해사용되고, 상기반사부분(12)은상기집광부분(11)에의해모아진광을상기광 확산부분(13)으로반사시키기위해사용되고, 상기광 확산부분(13)은상기반사부분(12)에의해그것에반사된광을대략동일한방향으로방출하기위해사용된다. 상기광 경로조정유닛은서로다른방향들로부터입사한광을조정하여대략동일한방향으로방출할수 있다.
    • 本发明提供一种光路调整单元和显示装置。 用于调节来自不同方向的光线在大致相同的方向上透射的光路调整单元包括聚光部分,反射部分和光散射部分。 聚光部分和光散射部分形成中空空间,反射部分设置在中空空间内并连接到光聚焦部分和光散射部分的中间,以将中空空间分成两部分 。 聚光部分用于会聚来自不同方向的光线; 反射部分用于将会聚的光线反射到光散射部分上,并且光散射部分用于将反射部分反射的光线沿大致相同的方向透射。