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    • 4. 发明公开
    • 레지스트 박리액 조성물 및 이를 이용한 레지스트의박리방법
    • 耐腐蚀组合物和剥离方法
    • KR1020080066322A
    • 2008-07-16
    • KR1020070003593
    • 2007-01-12
    • 동우 화인켐 주식회사
    • 윤효중김태희박면규
    • G03F7/42
    • G03F7/425C11D3/2068C11D3/26G03F7/34G03F7/422G03F7/423G03F7/426
    • A composition for stripping a resist, and a method for stripping a resist by using the composition are provided to improve the removing power or a cured resist and dry and wet etching residue on a substrate and the corrosion resistance of aluminum or aluminum alloy wiring on a substrate. A composition for stripping a resist comprises 5-30 wt% of an alkanolamine compound; 50-90 wt% of a glycol ether compound; and 0.1-10 wt% of a corrosion inhibitor selected from gallic acid and a gallate compound. Also the composition for stripping a resist comprises 5-30 wt% of an alkanolamine compound; 50-90 wt% of a glycol ether compound; 0.1-10 wt% of a corrosion inhibitor selected from gallic acid and a gallate compound; and water in an amount less than 10 wt%. Preferably the gallate compound is at least one selected from the group consisting of methyl gallate, ethyl gallate, n-propyl gallate, isopropyl gallate and n-butyl gallate.
    • 提供用于剥离抗蚀剂的组合物和通过使用该组合物剥离抗蚀剂的方法,以提高除去功率或固化的抗蚀剂,以及基板上的干和湿蚀刻残留物以及铝或铝合金布线的耐腐蚀性 基质。 用于剥离抗蚀剂的组合物包含5-30重量%的烷醇胺化合物; 50-90重量%的二醇醚化合物; 和0.1-10重量%的选自没食子酸和没食子酸酯化合物的腐蚀抑制剂。 用于剥离抗蚀剂的组合物还包含5-30重量%的链烷醇胺化合物; 50-90重量%的二醇醚化合物; 0.1-10wt%的选自没食子酸和没食子酸酯化合物的腐蚀抑制剂; 和小于10重量%的水。 优选地,没食子酸酯化合物是选自没食子酸甲酯,没食子酸乙酯,没食子酸正丙酯,没食子酸异丙酯和没食子酸正丁酯中的至少一种。