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    • 2. 发明公开
    • 급액 장치
    • 급액장치
    • KR1020130116281A
    • 2013-10-23
    • KR1020137014835
    • 2011-09-05
    • 히타치 어플라이언스 가부시키가이샤
    • 다카기준이치오소도마사노리무라이시도루나카자와다케시
    • F24D17/00F24H1/18
    • F24H4/04F24D17/02F24D19/1054F24D2200/123F24D2200/32F25B2339/047F25B2600/02F25B2600/112F25B2600/13F25B2600/2513F25B2700/2117F28D2020/0082
    • The objective of the present invention is to provide a liquid supply device with which it is possible to quickly and precisely adjust the amount of a liquid supplied from various liquid supply units to a liquid supply port. This liquid supply device supplies a liquid to a common liquid supply location from multiple liquid supply units connected in parallel, and is equipped with a supply amount detection means that detects the amount of liquid supplied to a liquid supply port from each liquid supply unit, and a flow volume adjustment means that adjusts the amount of liquid supplied from each liquid supply unit. The liquid supply device has a normal operational control whereby liquid is supplied from each liquid supply unit to the liquid supply location, and an upper limit supply amount-setting control, which is executed before the normal operation control, whereby the upper limit liquid supply amount is set separately for each liquid supply unit. With the upper limit supply amount-setting control, the liquid is supplied in a state wherein the hypothetical supply amounts for the liquid supply units are aligned, and the actual supply amount for each liquid supply unit is detected, and the upper limit supply amount for each liquid supply unit during normal operation control is set on the basis of the actual supply amount that has been detected for each liquid supply unit.
    • 本发明的目的是提供一种液体供应装置,利用该液体供应装置可以快速且精确地调节从各种液体供应单元供应到液体供应端口的液体的量。 该液体供应装置从并联连接的多个液体供应单元向公共液体供应位置供应液体,并且配备有检测从每个液体供应单元供应到液体供应端口的液体量的供应量检测装置,以及 流量调节装置,其调节从每个液体供应单元供应的液体的量。 液体供应装置具有从各液体供应单元向液体供应位置供应液体的正常操作控制以及在正常操作控制之前执行的上限供应量设定控制,由此上限液体供应量 分别为每个液体供应单元设置。 通过上限供给量设定控制,在液体供给单元的假想供给量一致的状态下供给液体,检测各液体供给单元的实际供给量,并且将上限供给量 在正常操作控制期间的每个液体供应单元基于针对每个液体供应单元检测到的实际供应量来设定。