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    • 10. 发明授权
    • 반도체 장치의 유전체 매입형 소자 분리홈의 형성방법
    • 半导体器件的离散层型设备制造孔形成方法
    • KR1019900000067B1
    • 1990-01-19
    • KR1019860008328
    • 1986-10-04
    • 후지쯔 가부시끼가이샤
    • 후꾸시마도시다까
    • H01L29/00
    • H01L21/763H01L21/308
    • The manufacturing method of a semiconductor device having a dielectric-filled groove isolation structure involves the following steps : (a) forming a first silicon oxide layer (4) and then a first silicon nitride layer (5) on the substrate (1) ; (b) selectively removing both layers from above a substrate region in which an isolation groove is to be formed and from above a specified region (11) surrounding the groove region to an extend preventing spread of silicon oxidation in subsequent processes ; (c) forming a second silicon nitride layer (5') on the substrate ; (d) anisotropically etching the second silicon nitride layer to expose the groove region.
    • 具有介电填充沟槽隔离结构的半导体器件的制造方法包括以下步骤:(a)在衬底(1)上形成第一氧化硅层(4),然后形成第一氮化硅层(5); (b)从其上形成隔离槽的衬底区域的上方选择性地去除两层,并且从围绕沟槽区域的规定区域(11)的上方延伸到防止后续工艺中硅氧化的扩散; (c)在所述衬底上形成第二氮化硅层(5'); (d)各向异性蚀刻第二氮化硅层以露出沟槽区域。