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    • 2. 发明授权
    • 박막 제조용 슬롯 다이 코터
    • 一种用于制造薄膜的槽式涂布机
    • KR101011946B1
    • 2011-01-31
    • KR1020100039760
    • 2010-04-29
    • 한국기계연구원
    • 정국채정태정최규채이정구김영국최철진
    • B05C5/02H01L21/027B05C11/10
    • B05C5/0204B05C5/0208B05C11/1002B05C11/1005G03F7/2041H01L21/0274
    • PURPOSE: A slot die coater for manufacturing thin films is provided to enable the formation of uniform coating layer and the formation of a wide coating layer, and to form various thin films with nm thickness through chemical coating. CONSTITUTION: A slot die coater(100) for manufacturing thin films includes: an upper body(120) and a lower body(140) in which a buffer dam is depressed and formed thereinside; a coating layer which is deposited on the upper side of the lower body and guides the flow of a coating solution; and a guide film(160) which is formed by physical or chemical coating and is communicated with the outside. The guide film and coating layer forms a coating channel(146) by spacing the upper body and the lower body.
    • 目的:提供用于制造薄膜的槽模涂布机,以形成均匀的涂层和形成宽的涂层,并通过化学涂层形成具有nm厚度的各种薄膜。 构成:用于制造薄膜的槽模涂布机(100)包括:上体(120)和下体(140),其中缓冲坝被压下并形成在其下; 涂层,其沉积在下体的上侧并引导涂布溶液的流动; 以及通过物理或化学涂覆形成并与外部连通的引导膜(160)。 引导膜和涂层通过间隔上体和下体形成涂布通道(146)。