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1. 发明授权

KR100300285B1 미세 열유속센서 및 그 제조 방법 失效
标题翻译：微型助焊剂传感器及其制造方法
公开(公告)号：KR100300285B1
公开(公告)日：2001-09-22
申请号：KR1019990024371
申请日：1999-06-25
申请人： 학교법인 포항공과대학교
发明人： 전재철 , 이승섭 , 김무환
IPC分类号： G01K17/08 , G01F1/32
摘要： 본발명은멤스(MEMS;Micro Electro Mechanical System) 기술을이용하여낮은열유속범위에서도높은감도와측정정확도를갖는초소형의미세열유속센서 (Micro Heat Flux Sensor) 및그 제조방법을제공한다. 본발명에따른미세열유속센서는실리콘으로형성된몸체와, 몸체를포위하는산화물층과, 금막으로형성되고온도차를발생시키기위하여상기물체로부터의열유속을상방향으로그리고수평방향으로이동시키는열경로와, 열경로의온도차를측정하는서모미터로이루어진다. 열경로는열이상방향으로이동되는수용부와수평방향으로이동되는측정부로구성되며, 측정부의중앙부및 주변부에는온도를측정하기위한측정지점이설정되어있다. 온도차를측정하는서모미터는온도차를증폭시키기위하여열전대열을포함하며, 열전대열은각각의온도측정지점에각각의단부가함께접속되는 2개의금속으로이루어진열전대들을구비한다. 본발명에따라측정부에서측정된온도차가증폭된신호로출력되어낮은열유속범위에서도열유속을정확히측정할수 있다.

2. 发明公开

KR1020010003884A 미세 열유속센서 및 그 제조 방법 失效
标题翻译：微热通量传感器及其制造方法
公开(公告)号：KR1020010003884A
公开(公告)日：2001-01-15
申请号：KR1019990024371
申请日：1999-06-25
申请人： 학교법인 포항공과대학교
发明人： 전재철 , 이승섭 , 김무환
IPC分类号： G01K17/08 , G01F1/32
摘要： PURPOSE: A micro heat flux sensor and a method for manufacturing the same are provided to accurately measure the heat flux with high heat sensitiveness even in a low heat flux limit. CONSTITUTION: A micro heat flux sensor for measuring heat flux of an object includes a main body(12) having a through hole(14); oxide layers(16a,16b,16c) formed in the whole of the upper and lower surfaces and the through hole; a receiving part(18) contacting with the object to receive and move the heat flux from the object and applied in the oxide layers applied in the lower surface and the through hole; a measuring part(20) in which the center is contacted with the receiving part for dispersing the heat flux in a radial manner, which applied in the oxide layer formed in the upper part of the main body, and a first temperature measuring point and a second temperature measuring point separated from the first temperature measuring point toward the outside in the center; and a thermometer(22) measuring the difference in the temperature of the temperature measuring points.
摘要翻译：目的：提供微型热通量传感器及其制造方法，即使在低热通量极限下也能够高精度地测量热通量高的热通量。构成：用于测量物体的热通量的微型热通量传感器包括具有通孔（14）的主体（12）; 形成在整个上下表面和通孔中的氧化物层（16a，16b，16c）接收部件（18），与所述物体接触以接收并移动来自所述物体的热通量并施加在施加在所述下表面和所述通孔中的氧化物层中; 测量部件（20），其中中心与容纳部分接触，用于分散放置在形成在主体上部的氧化物层中的热通量，以及第一温度测量点和第二温度测量点从第一温度测量点向中心向外部分离; 以及测量温度测量点的温度差的温度计（22）。

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