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    • 2. 发明公开
    • 레이저를 이용한 초미세 위치제어기술
    • 使用激光的超精密位置控制方法
    • KR1020030033744A
    • 2003-05-01
    • KR1020010065854
    • 2001-10-25
    • 학교법인조선대학교
    • 김재열곽이구한재호
    • G05D3/12B82Y15/00
    • PURPOSE: A super-precision position control method using laser is provided to control accurately a position by installing a feedback system using the laser at a semiconductor fabrication apparatus and a super-precision processing apparatus. CONSTITUTION: A super-precision position control device is formed with a coarse positioning table and a fine positioning table. The coarse positioning table is formed with a lead screw portion. The lead screw portion is formed with a ball screw and a double nut. The lead screw portion is driven by an AC servo motor. The fine positioning table is used for forming a micro stage. The fine positioning table is driven by a piezoelectric device. A laser interferometer is used for measuring the displacement and performing a realtime feedback operation. A DSP(Digital Signal Processing) portion is used as a control portion.
    • 目的:提供使用激光的超精密位置控制方法,通过在半导体制造装置和超精密加工装置中安装使用激光的反馈系统来精确地控制位置。 构成:超精密位置控制装置形成有粗定位台和精细定位台。 粗定位台由导螺杆部分形成。 导螺杆部分由滚珠丝杠和双螺母形成。 导螺杆部分由交流伺服电机驱动。 精细定位台用于形成微型台。 精密定位台由压电装置驱动。 激光干涉仪用于测量位移并执行实时反馈操作。 DSP(数字信号处理)部分用作控制部分。