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    • 2. 发明公开
    • 적외선 방사 소자 및 이를 이용한 가스 센서
    • 红外发光装置和使用相同的气体传感器
    • KR1020060058149A
    • 2006-05-29
    • KR1020067008002
    • 2004-10-27
    • 파나소닉 전공 주식회사
    • 이치하라쓰토무하마다초세이아케도코시기타무라히로아키후크시마히로시고모다다쿠야하타이다카시
    • H05B3/26H01K1/04
    • H01L37/00H05B3/009H05B3/265H05B2203/032
    • Disclosed is an infrared light emitting device (A) comprising a semiconductor substrate (1), a heat insulating layer (2) having a heat conductivity sufficiently lower that that of the semiconductor substrate (1) and formed on one surface of the semiconductor substrate (1) in the thickness direction, a lamellar heating layer (3) having a heat conductivity and electrical conductivity higher than those of the heat insulating layer (2) and formed on the heat insulating layer (2), and a pair of pads (4, 4) formed on the heating layer (3) for electrical conduction. The semiconductor substrate (1) is composed of a silicon substrate. The heat insulating layer (2) and the heating layer (3) are composed of porous silicon layers having different porosities, and the porous silicon layer for the heating layer (3) has a lower porosity than that for the heat insulating layer (2). By using such an infrared light emitting device (A) as the infrared radiation source in a gas sensor, there can be realized an infrared radiation source having a prolonged life.
    • 公开了一种红外线发光器件(A),其包括半导体衬底(1),绝热层(2),其热导率足够低于半导体衬底(1)的热导率并形成在半导体衬底的一个表面上 1),在隔热层(2)上形成具有比绝热层(2)的导热性和导热性高的导热性和导电性的层状加热层(3),以及一对焊盘(4) ,4)形成在加热层(3)上用于导电。 半导体衬底(1)由硅衬底构成。 绝热层(2)和加热层(3)由具有不同孔隙率的多孔硅层构成,并且用于加热层(3)的多孔硅层的孔隙率低于隔热层(2)的孔隙率, 。 通过在气体传感器中使用红外线发射装置(A)作为红外辐射源,可以实现寿命延长的红外线辐射源。