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    • 1. 发明公开
    • 진공증착용 발열조립체 및 이를 구비한 진공증착장치
    • 用于真空沉积的加热组件和具有该沉积物的真空沉积装置
    • KR1020150128254A
    • 2015-11-18
    • KR1020140055318
    • 2014-05-09
    • 주식회사 쎄코
    • 김현중김홍철황영준진찬우김정래최병경이석
    • C23C14/24H05B3/02
    • C23C14/24H05B3/02
    • 본발명은증착물질이담지된담체부를가열하기위한진공증착용발열조립체에있어서, 복수개의파형들을형성한선재형의발열체로이루어진장착몸체부; 상기장착몸체부의양측에위치되는한 쌍의전극연결부들; 및각각상기장착몸체부의종단및 상기전극연결부의종단을연결하여장착공간을형성하는장착지지부들을포함하는것을특징으로하는특징으로하는진공증착용발열조립체및 이를구비한진공증착장치를개시한다. 상기와같은진공증착용발열조립체및 이를구비한진공증착장치는다양한크기의담체가증착물질을담지한상태로용이하게설치되고, 작동, 보관및 이동에따른손상을감소시키며, 담체부에대한열전달효율을향상시킨다.
    • 本发明公开了一种用于真空沉积的加热组件,包括:安装体单元,其由用于形成多个波形的线型加热体形成; 位于所述安装体单元两侧的一对电极连接单元; 以及通过将安装体单元的端部和电极连接单元的端部连接而形成安装空间的装置,以及包括该真空沉积装置的真空沉积装置,用于真空沉积的加热组件中以加热载体单元,其中沉积 材料被放置。 用于真空沉积的加热组件和包括该真空沉积装置的真空沉积装置在载体被沉积材料填充的状态下容易地安装各种尺寸的载体,减少由操作,储存和运动引起的损坏并改善热量 运输单位的转运效率。
    • 4. 发明公开
    • 진공증착용 발열조립체 및 이를 구비하는 진공증착장치
    • 用于真空沉积的加热组件和具有该沉积物的真空沉积装置
    • KR1020140013471A
    • 2014-02-05
    • KR1020120080536
    • 2012-07-24
    • 주식회사 쎄코
    • 김현중김홍철전경일김정래황영준
    • C23C14/24H05B3/02
    • C23C14/243C23C14/26H05B3/03H05B3/12H05B2203/021H05B2203/022
    • The present invention relates to a heating assembly for heating a carrier where a deposition material is dipped in a vacuum deposition process. According to the present invention, disclosed is a heating assembly for a vacuum deposition comprising: a carrier mounting part which a carrier is mounted on; and an electrode connecting part, which is formed on both sides of the carrier mounting part, and which is connected to an electrode. Moreover, disclosed is a heating assembly for a vacuum deposition where more than one between the carrier mounting part and the electrode connecting part is formed as a plate form. According to the present invention, a heating assembly for a vacuum deposition is capable of stably mounting a carrier where a deposition material is dipped, and making the carrier to evaporate toward a specific direction inside the vacuum deposition apparatus. Therefore, a small amount of carriers can be uniformly and efficiently deposited.
    • 本发明涉及一种用于加热载体的加热组件,其中沉积材料在真空沉积工艺中浸渍。 根据本发明,公开了一种用于真空沉积的加热组件,包括:载体安装部分,载体安装在其上; 以及电极连接部,其形成在所述载体安装部的两侧,并且与电极连接。 此外,公开了一种用于真空沉积的加热组件,其中载体安装部分和电极连接部分之间的多于一个形成为板形。 根据本发明,用于真空沉积的加热组件能够稳定地安装沉积材料浸渍的载体,并使载体朝向真空沉积设备内的特定方向蒸发。 因此,可以均匀且有效地沉积少量的载体。