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1. 发明公开

KR1020020092296A 유기물 증착 장치 无效
标题翻译：用于沉积有机材料的装置
公开(公告)号：KR1020020092296A
公开(公告)日：2002-12-11
申请号：KR1020020068947
申请日：2002-11-07
申请人： 정세영 , 주식회사 컴텍스
发明人： 정세영 , 김동진 , 조용찬
IPC分类号： H05B33/10
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/26 , H01L51/001 , H01L51/0011 , H01L51/0012
摘要： PURPOSE: An apparatus for depositing an organic material is provided to perform stably a depositing process for forming a deposition pattern by installing a substrate or a mask at a lower side or a side portion of a deposition source. CONSTITUTION: A deposition source(120) is a vaporization melting pot(121), the first heater(122), the second heater(123), and an exhaust member(124). The organic materials are vaporized in the vaporization melting port(121) if the first and the second heaters(122,123) are operated. The vaporized organic materials are transferred to a flowing space portion(125). The molecules generated from the vaporized organic materials are moved in the flowing space portion(125) by using thermal energy. The moving molecules are deposited on a substrate after passing through an opening portion of the second heater(123) and an exhaust hole(124a) of the exhaust member(124). At this time, a deposition ratio is determined according to pressure of the molecules.
摘要翻译：目的：提供一种用于沉积有机材料的设备，以便通过在沉积源的下侧或侧部安装基底或掩模来稳定地进行用于形成沉积图案的沉积工艺。构成：沉积源（120）是蒸发熔化罐（121），第一加热器（122），第二加热器（123）和排气构件（124）。如果第一和第二加热器（122,123）被操作，有机材料在蒸发熔化口（121）中蒸发。蒸发的有机材料被转移到流动空间部分（125）。由蒸发的有机材料产生的分子通过使用热能在流动空间部分125中移动。移动分子在穿过第二加热器（123）的开口部分和排气部件（124）的排气孔（124a）之后沉积在基板上。此时，根据分子的压力来确定沉积比。

2. 发明授权

KR100478440B1 압착된 유기물을 이용한 유기물 증착용 소스 失效
标题翻译：使用压缩有机物的气相沉积源
公开(公告)号：KR100478440B1
公开(公告)日：2005-03-23
申请号：KR1020020068946
申请日：2002-11-07
申请人： 정세영 , 주식회사 컴텍스
发明人： 정세영 , 김동진 , 조용찬
IPC分类号： H05B33/10
摘要： 본 발명은 유기물 증착용 소스에 관한 것으로, 유기물 진공증착장치에 있어서, 상부가 개구되고, 증발을 위한 유기물이 수용되되, 수용되는 유기물이 부피 및 두께가 일정하게 유지되도록 압착수단(200)을 이용하여 압착된 유기물이 수용되는 압착용기(110)와; 상기 압착용기(110) 내부에 수용되며, 상하 관통된 격자형 공간부(141)가 형성되며 압착용기(110) 내부에 수용되는 압착유기물을 공간단위로 구획수용시킴과 동시에 압착유기물에 열전달을 시키는 열전도매체(140);를 포함하여 구성되는 압착된 유기물을 이용한 유기물 증착용 소스를 기술적 요지로 한다. 이에 따라, 압착용기에 수용되는 유기물이 위치에 관계없이 동일한 부피 및 두께를 가지게 함과 동시에 유기물에 고른 열전달을 함에 의해 유기물의 고른 증발이 일어나 기판에 증착되는 유기물의 두께를 일정하게 유지할 수 있다는 이점이 있다.

3. 发明公开

KR1020020092295A 압착된 유기물을 이용한 유기물 증착용 소스 失效
标题翻译：使用压缩有机材料沉积有机材料的来源
公开(公告)号：KR1020020092295A
公开(公告)日：2002-12-11
申请号：KR1020020068946
申请日：2002-11-07
申请人： 정세영 , 주식회사 컴텍스
发明人： 정세영 , 김동진 , 조용찬
IPC分类号： H05B33/10
CPC分类号： C23C14/06 , C23C14/12 , C23C14/243 , H01L51/001
摘要： PURPOSE: A source for depositing an organic material by using a compressed organic material is provided to maintain constantly volume and density of organic materials by using a compressing device. CONSTITUTION: A compressing vessel(110) is loaded into the inside of a melting pot(100). An upper heater(120) is installed on an upper portion of the melting port(100). The upper heater(120) is connected to an external power source. The upper heater(120) transmits heat to an organic material within the compressing vessel(110). The organic material vaporized by the heat. The vaporized organic material is deposited on a substrate. A thermocouple(130) is installed at the upper heater(120) in order to detect the temperature of the upper heater(120) and control a caloric value of the upper heater(120). A thermal conductive medium(140) is inserted into the compressing vessel(110).
摘要翻译：目的：提供通过使用压缩有机材料沉积有机材料的源，以通过使用压缩装置来保持有机材料的不断的体积和密度。构成：将压缩容器（110）装入熔炉（100）的内部。上部加热器（120）安装在熔化口（100）的上部。上加热器（120）连接到外部电源。上加热器（120）将热量传递到压缩容器（110）内的有机材料。有机物质被热量蒸发。蒸发的有机材料沉积在基底上。为了检测上部加热器（120）的温度并控制上部加热器（120）的热值，热电偶（130）安装在上部加热器（120）处。导热介质（140）插入压缩容器（110）中。

4. 发明公开

KR1020020089288A 유기물 증착용 소스 无效
标题翻译：沉积有机材料的来源
公开(公告)号：KR1020020089288A
公开(公告)日：2002-11-29
申请号：KR1020020068945
申请日：2002-11-07
申请人： 정세영 , 주식회사 컴텍스
发明人： 정세영 , 김동진 , 조용찬
IPC分类号： C23C14/12
CPC分类号： C23C14/243 , C23C14/12
摘要： PURPOSE: A source for depositing organic matter is provided which improves yield and productivity of a device by improving temperature equilibrium of a heating element so that the organic matter is constantly deposited on a substrate to a certain thickness regardless of position of the substrate. CONSTITUTION: The source for depositing organic matter comprises a crucible an upper part of which is opened, and in which a sample is rested; a heating element(110) which is formed at an upper opening part of the crucible and formed of a conductive material, at the central part of which a crosswise extended vapor entrance and exit hole(111) is formed, and which is formed in such a manner that width is gradually getting widened as it goes from the edge part to the central side, wherein width of the edge is h, and width of the central part is m so that a ratio of h:m is 1.5-10, and the heating element(110) is connected to an external power source to be heated; a thermal insulating body that is formed in a shape that the thermal insulating body envelops the lower outer surface of the crucible and prevents heat of the crucible from being emitted to the outside; and a connection body formed at a power source connection part of the heating element(110).
摘要翻译：目的：提供用于沉积有机物质的来源，其通过改善加热元件的温度平衡来提高装置的产率和生产率，使得有机物质不断地沉积在基板上至一定厚度，而与基板的位置无关。构成：用于沉积有机物质的来源包括其上部打开的坩埚，其中放置样品; 加热元件（110），其形成在所述坩埚的上部开口部并且由导电材料形成，所述加热元件的中心部形成有横向延伸的蒸气入口和出口（111），并且形成在所述加热元件宽度随着从边缘部分到中心侧逐渐变宽的方式，其中边缘的宽度为h，中心部分的宽度为m，使得h：m的比率为1.5-10，并且加热元件（110）连接到待加热的外部电源; 绝热体形成为绝热体包围坩埚的下外表面并防止坩埚的热量向外部排出的形状; 以及形成在所述加热元件（110）的电源连接部分处的连接体。

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