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2. 发明公开

KR1020090013716A 진공발생유니트 有权
标题翻译：真空发生单元
公开(公告)号：KR1020090013716A
公开(公告)日：2009-02-05
申请号：KR1020080075183
申请日：2008-07-31
申请人： 에스엠씨 가부시키 가이샤
发明人： 후카노요시히로 , 오시마마사유키
IPC分类号： F16B47/00 , F15B11/064 , F15B21/14
CPC分类号： F04F3/00 , F04F5/02 , Y10T137/86083
摘要： A vacuum generating unit is provided to connect a vacuum port with the atmosphere only at positive pressure in which a negative pressure state is released or cancelled so as to maintain negative pressure for material maintenance. A vacuum generating unit includes a main body(12) in which a supply port(24) supplying a pressure fluid, a vacuum port connected to a chucking tool and an exhaust port(64) discharging the pressure fluid supplied from the supply port are arranged, a vacuum generating unit(14) generating negative pressure according to the operation of the pressure fluid supplied from the supply port, a supply valve(69a) switching the pressure of the pressure fluid supplied to the vacuum port to a negative pressure state and a positive pressure state, a switching valve(22) having a vacuum cutoff value(69b), and an atmosphere introducing valve(40) for changing the connecting state of the vacuum port and the atmosphere.
摘要翻译：提供真空发生单元，用于仅在负压状态被释放或消除的正压力下将真空端口与大气连接，以保持用于材料维护的负压。真空发生单元包括：主体（12），其中供应压力流体的供给口（24），连接到夹紧工具的真空口和排出从供给口供给的压力流体的排气口（64），根据从供给口供给的压力流体的动作产生负压的真空发生单元（14a），将供给真空口的压力流体的压力切换为负压状态的供给阀（69a）正压状态，具有真空截止值（69b）的切换阀（22）和用于改变真空口和大气的连接状态的气氛导入阀（40）。

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