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    • 2. 发明公开
    • 화학 액체 밸브
    • 化学液体阀
    • KR1020060083979A
    • 2006-07-21
    • KR1020067005622
    • 2004-09-21
    • 씨케이디 가부시키 가이샤
    • 마사무라,아키노리오수기,시게루
    • F16K7/12F16K7/14F16K31/122F16K41/00
    • F16K7/14F16K31/1221F16K41/12
    • A chemical liquid valve (1A) with stable sealing performance allowing a diaphragm (7) connected to a piston rod (10A) to come into contact with or apart from a valve seat (5) installed between an input port (3) and an output port (4). A lock part (7d) formed in a semi-spherical shape at the tip part is formed at the diaphragm (7), and the lock part (7d) is inserted into the recessed part (10a) of the piston rod (10A) to engage with the recessed part (10a) so that the lock part (7d) of the diaphragm (7) can be brought into point-contact with the inner wall of the recessed part (10a) of the piston rod (10A) to swingably hold the diaphragm (7) on the piston rod (10A).
    • 一种具有稳定密封性能的化学液体阀(1A),其允许连接到活塞杆(10A)的隔膜(7)与安装在输入端口(3)和输出端(3)之间的阀座(5)接触或分离 港(4)。 在隔膜(7)形成有在前端部形成为半球状的锁定部(7d),将锁定部(7d)插入到活塞杆(10A)的凹部(10a)内, 与所述凹部(10a)接合,使得所述隔膜(7)的锁定部(7d)能够与所述活塞杆(10A)的所述凹部(10a)的内壁形成点接触,以可摆动地保持 活塞杆(10A)上的隔膜(7)。
    • 4. 发明公开
    • 화학 액체 제어 밸브
    • 化学液体控制阀
    • KR1020060096120A
    • 2006-09-06
    • KR1020067012917
    • 2004-11-17
    • 씨케이디 가부시키 가이샤
    • 나가오,토시유키오수기,시게루토미타,히로시
    • F16K1/00F16K7/12F16K7/16F16K1/32
    • F16K27/02F16K1/42
    • An object is to provide a chemical solution control valve which, in controlling supply of a chemical solution containing particles such as abrasive particles, is capable of dispersing the particles in the chemical solution so as to prevent flocculation thereof. In a chemical solution control valve (10), the outer peripheral end of a projection (23)(the outer peripheral bottom of a valve seat (26)) is provided with a barrier (40). The barrier (40) is disposed such that an angle (alpha) defined by the centerline (L1) of an output flow path (21) and a line (L2) connecting the center (C) of a valve hole (26a) and the end of the barrier (40) is 30 - 90 degrees. Further, the height (H) of the barrier (40) with the valve disk abutment surface (26c) of the valve seat (26) used as a reference is about half the amount of travel of a diaphragm valve disk (27).
    • 本发明的目的是提供一种化学溶液控制阀,其在控制含有颗粒如化学溶液的化学溶液的供应中能够将颗粒分散在化学溶液中以防止其絮凝。 在化学溶液控制阀(10)中,突起(23)的外周端(阀座(26)的外周底部)设置有屏障(40)。 隔壁40设置成由输出流路21的中心线L1和连接阀孔26a的中心(C)的线(L2)和 屏障(40)的端部为30-90度。 此外,作为基准的阀座(26)的阀盘抵接面(26c)的阻挡物(40)的高度(H)约为隔膜阀盘(27)行进量的一半。