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    • 6. 发明公开
    • 멀티 칩 적층 패키지들을 제조하는 방법
    • 制作半导体堆叠结构的方法
    • KR1020140113089A
    • 2014-09-24
    • KR1020130028026
    • 2013-03-15
    • 삼성전자주식회사
    • 곽병수조차제조태제한상욱
    • H01L23/48
    • H01L25/50H01L25/0657H01L2224/13H01L2924/0002H01L2924/00
    • Described is a method of fabricating a multi-chip stack package which includes preparing a single body lower chip substrate which has a first surface and a second surface facing the first surface, forming a single body substrate-chip bonding structure by bonding unit package substrates onto the first surface of the single body lower chip substrate, separating unit substrate-chip bonding structures from the single body substrate-chip bonding structure, preparing a single body upper chip substrate, forming a single body semiconductor chip stack structure by bonding the unit substrate-chip structures on the upper surface of the single body upper chip substrate, and separating the unit semiconductor chip stack structures from the single body semiconductor stack structure.
    • 描述了一种制造多芯片堆叠封装的方法,其包括制备具有第一表面和面向第一表面的第二表面的单体下芯片衬底,通过将单元封装衬底接合而形成单体衬底芯片结合结构 单体下芯片基板的第一表面,从单体基板芯片接合结构分离单元基板芯片结合结构,制备单体上芯片基板,通过将单元基板 - 在单体上芯片基板的上表面上的芯片结构,以及将单元半导体芯片堆叠结构与单体半导体堆叠结构分离。