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    • 1. 发明授权
    • 평판표시장치용 셀세정장치
    • 평판표시장치용셀세정장치
    • KR100463186B1
    • 2004-12-23
    • KR1020020004294
    • 2002-01-24
    • 삼성에스디아이 주식회사주식회사 케이씨
    • 현인걸김광일정석헌남명우윤철남김형일
    • G02F1/13
    • PURPOSE: An apparatus for cleaning cells for a flat panel display is provided to prevent inferiority due to moisture, restrict industrial wastewater from generating, and minimize an installation space. CONSTITUTION: A tray(10) is provided for mounting a cassette(20) loaded with a plurality of cells arranged at certain intervals. A transferring device(80) transfers the tray at a predetermined speed. A cleaning chamber(30) includes a first nozzle(32) spraying gas for cleaning to the cells loaded in the tray, and second nozzles(34) spraying gas maintaining an inside atmosphere at a low humidity. A pair of auxiliary chambers(50) are installed on both sides of the cleaning chamber and include auxiliary nozzles(54) for maintaining inside atmospheres to be similar to the atmosphere of the cleaning chamber. An exhaust port(40) is installed at a lower part of the cleaning chamber for exhausting the gas for cleaning.
    • 目的:提供一种用于清洁平板显示器的电池的设备,以防止由于湿气引起的劣势,限制工业废水的产生并且使安装空间最小化。 组成:托盘(10)被提供用于安装装载有以特定间隔布置的多个单元的盒(20)。 传送装置(80)以预定速度传送托盘。 清洗室(30)包括将用于清洗的气体喷射到装载在托盘中的电池的第一喷嘴(32)和喷射保持内部气氛为低湿度的气体的第二喷嘴(34)。 一对辅助腔室(50)安装在清洁腔室的两侧,并包括用于保持内部气氛的辅助喷嘴(54),以与清洁腔室的气氛相似。 排气口(40)安装在清洁室的下部,用于排出清洁气体。
    • 2. 发明公开
    • 평판표시장치용 셀세정장치
    • 用于清洁平板显示器的装置的装置
    • KR1020030063932A
    • 2003-07-31
    • KR1020020004294
    • 2002-01-24
    • 삼성에스디아이 주식회사주식회사 케이씨
    • 현인걸김광일정석헌남명우윤철남김형일
    • G02F1/13
    • PURPOSE: An apparatus for cleaning cells for a flat panel display is provided to prevent inferiority due to moisture, restrict industrial wastewater from generating, and minimize an installation space. CONSTITUTION: A tray(10) is provided for mounting a cassette(20) loaded with a plurality of cells arranged at certain intervals. A transferring device(80) transfers the tray at a predetermined speed. A cleaning chamber(30) includes a first nozzle(32) spraying gas for cleaning to the cells loaded in the tray, and second nozzles(34) spraying gas maintaining an inside atmosphere at a low humidity. A pair of auxiliary chambers(50) are installed on both sides of the cleaning chamber and include auxiliary nozzles(54) for maintaining inside atmospheres to be similar to the atmosphere of the cleaning chamber. An exhaust port(40) is installed at a lower part of the cleaning chamber for exhausting the gas for cleaning.
    • 目的:提供一种用于清洁平板显示器的电池的设备,以防止由于潮气导致的劣化,限制工业废水的产生,并使安装空间最小化。 构成:托盘(10)用于安装装载有以一定间隔布置的多个单元的盒(20)。 传送装置(80)以预定速度传送托盘。 清洁室(30)包括:喷射用于清洁的气体的第一喷嘴(32)到装载在托盘中的单元;以及第二喷嘴(34)喷射保持低湿度的内部气氛的气体。 一对辅助室(50)安装在清洁室的两侧,并且包括用于将内部气氛保持与清洁室的气氛相似的辅助喷嘴(54)。 排气口(40)安装在清洁室的下部以排出用于清洁的气体。
    • 4. 发明授权
    • 플라즈마 디스플레이 패널 조립장치
    • 装配等离子体显示面板的装置
    • KR100496277B1
    • 2005-09-09
    • KR1019980039947
    • 1998-09-25
    • 삼성에스디아이 주식회사
    • 전병윤현인걸장찬영도우현
    • H01J9/24H01J17/00
    • 플라즈마 디스플레이 패널(plasma display panel) 조립장치가 개시된다. 개시된 플라즈마 디스플레이 패널 조립장치는, 베이스 프레임; 상기 베이스 프레임의 상부에 슬라이딩 가능하게 설치되어 소정의 제1패널을 외부로부터 공급받아 흡착하고, 상기 제1패널과 결합되는 제2패널을 이어서 공급받는 패널공급장치; 상기 패널공급장치의 상부에 승강 가능하게 설치되어 상기 패널공급장치상의 상기 제2패널을 진공흡착하도록, 상기 제2패널을 상기 패널공급장치로부터 직접 진공흡착하는 진공패드장치와, 상기 진공패드장치가 설치되어 상기 진공패드장치를 승강 가능하도록 상기 베이스 프레임에 설치된 지지 프레임, 상기 지지 프레임에 적어도 하나 이상 설치된 볼 스크류 및 상기 볼 스크류가 승강될 수 있도록 상기 볼 스크류를 회전시키는 회전수단을 포함하는 승강수단을 구비하는 패널결합장치; 상기 패널공급장치를 상기 베이스 프레임상에서 슬라이딩 가능하게 하는 슬라이딩수단; 상기 베이스 프레임의 일측에 설치되어 상기 제1, 2패널의 위치를 각각 정렬하는 얼라인먼트수단; 상기 제1, 2패널의 흡착, 정렬, 및 결합이 이루어지도록 제어하는 제어부;를 포함하는 것을 그 특징으로 한다. 본 발명에 따르면, 대형기판의 조립이 가능하고 제품의 신뢰성 및 생산성 향상에 기여할 수 있는 이점이 있다.
    • 5. 发明公开
    • 마그네트론 스퍼터링 공정의 캐소드 및 마그네트론스퍼터링 방법
    • 磁控溅射过程的阴极和能够防止目标的破裂和降解的磁控溅射方法
    • KR1020040095850A
    • 2004-11-16
    • KR1020030026843
    • 2003-04-28
    • 삼성에스디아이 주식회사
    • 허명수송관섭현인걸박진
    • C23C14/35
    • C23C14/35C23C14/3407
    • PURPOSE: To minimize crack and degradation of target and improve deposition ratio and minimize wattage supplied by maximizing electric discharge region on the surface of the target without increase of the wattage supplied. CONSTITUTION: The cathode comprises a target (11) installed at the outer side of case (10) and formed of a deposition material; a magnetron (12) installed inside the case to form a magnetic field on the surface of the target during sputtering deposition; and a cooling part (13) for circulating cooling water to the magnetron to cool heat of the target generated during sputtering deposition, wherein the magnetron is separately installed at two regions at least or more to separate an electric discharge region of the surface of the target, wherein the cooling part is arranged between the separated magnetrons. The magnetron sputtering method lowers electric discharge voltage and increases current density of plasma by separating the electric discharge region into a plurality of electric discharge regions.
    • 目的:尽量减少目标表面的放电区域,提高沉积比,最大限度地降低瓦数,从而最大限度地减少目标表面的破裂和降解,同时不增加提供的瓦数。 构成:阴极包括安装在壳体(10)的外侧并由沉积材料形成的靶(11); 安装在壳体内的磁控管(12),以在溅射沉积期间在靶表面上形成磁场; 以及用于将冷却水循环到磁控管以冷却在溅射沉积期间产生的靶的热量的冷却部分(13),其中磁控管至少或更多地分开安装在两个区域以分离目标表面的放电区域 其中,所述冷却部配置在所述分离的磁控管之间。 磁控溅射法通过将放电区域分离成多个放电区域来降低放电电压并提高等离子体的电流密度。
    • 6. 发明公开
    • 전자총의 이물 제거 장치 및 방법
    • 用于去除电子枪颗粒的装置和方法
    • KR1020030056193A
    • 2003-07-04
    • KR1020010086367
    • 2001-12-27
    • 삼성에스디아이 주식회사
    • 정지영현인걸홍정민노철래남명우정석현김광일
    • H01J9/38
    • PURPOSE: An apparatus and a method for removing particles of an electron gun are provided to remove the particles stuck on the electron gun as well as floating particles of the electron gun by performing repeatedly an air blowing process, an ionizing process, and a CO2 cleaning process. CONSTITUTION: An apparatus for removing particles of an electron gun includes one or more mounters(6), the first air and ionizing section(10), the first CO2 cleaning section(20), the second air and ionizing section(30), the second CO2 cleaning section(40), and the third air and ionizing section(50). The mounter is used for loading an electron gun(8). The first air and ionizing section performs an air blowing process and an ionizing process for the electron gun and sucks the air and particles from the electron gun. The first CO2 cleaning section injects CO2 to the electron gun and sucks the CO2 and the particles from the electron gun. The second air and ionizing section performs the air blowing process and the ionizing process for the electron gun and sucks the air and the particles from the electron gun. The second CO2 cleaning section injects CO2 to the electron gun and sucks the CO2 and the particles from the electron gun. The third air and ionizing section performs the air blowing process and the ionizing process for the electron gun and sucks the air and the particles from the electron gun.
    • 目的:提供一种用于去除电子枪颗粒的装置和方法,通过重复进行吹气过程,电离过程和二氧化碳清洗来除去粘附在电子枪上的颗粒以及电子枪的浮动颗粒 处理。 构成:用于除去电子枪颗粒的装置包括一个或多个安装件(6),第一空气和电离部分(10),第一CO 2清洗部分(20),第二空气和电离部分(30), 第二CO 2清洗部(40)和第三空气和电离部(50)。 安装器用于装载电子枪(8)。 第一空气和电离部分对电子枪执行吹气过程和电离过程,并从电子枪吸入空气和颗粒。 第一个CO 2清洗部分向电子枪注入二氧化碳,并从电子枪吸入二氧化碳和颗粒。 第二空气和电离部分执行吹风过程和电子枪的电离过程,并从电子枪吸入空气和颗粒。 第二个CO 2清洗部分向电子枪注入二氧化碳,并从电子枪吸入二氧化碳和颗粒。 第三空气和电离部分执行吹风过程和电子枪的电离过程,并从电子枪吸入空气和颗粒。
    • 8. 发明公开
    • 플라즈마 디스플레이 패널 조립장치
    • 装配等离子体显示面板的装置
    • KR1020000021035A
    • 2000-04-15
    • KR1019980039947
    • 1998-09-25
    • 삼성에스디아이 주식회사
    • 전병윤현인걸장찬영도우현
    • H01J9/24H01J17/00
    • PURPOSE: An apparatus is provided to enable the assembly of a 42 inch large substrate to work smoothly and improves the tolerance of the apparatus and the safety of a worker. CONSTITUTION: An apparatus for assembling a plasma display panel includes: a base frame(100); a panel supplying apparatus(200) which absorbs a first panel(110) being supplied from the external and is supplied with a second panel(120) combined with the first panel, being installed on a top of the base frame; a panel combining apparatus(300) which combines the second panel with the first panel by absorbing the second panel in vacuum, being installed on a top of the panel supplying apparatus; a table sending part(500) enabling the panel supplying apparatus to slide on the base frame; an alignment part which aligns the position of the first and the second panel, being installed on one side of the base frame; and a control part controlling the absorption, alignment and combination of the first and the second panel. The apparatus improves the reliability and productivity of a product and enables the assembling of a large substrate.
    • 目的:提供一种装置,以便能够组装42英寸大的基板以平稳地工作并且改善装置的公差和工人的安全性。 构成:用于组装等离子体显示面板的装置包括:基架(100); 吸收从外部供给的第一面板(110)的面板供给装置(200),并且被供给与第一面板组合的第二面板(120),安装在基部框架的顶部; 面板组合装置(300),其通过在真空中吸收第二面板而将第二面板与第一面板组合,安装在面板供应装置的顶部; 桌面发送部件(500),使得面板供应装置能够在基架上滑动; 对准部,其将第一和第二面板的位置对准,安装在基架的一侧; 以及控制部件,其控制第一和第二面板的吸收,对准和组合。 该装置提高了产品的可靠性和生产率,并且能够组装大的基板。